The invention relates to an
inhomogeneous field strength
plasma waste gas processing apparatus and a
processing system thereof. The
processing system comprises a gas inlet tube, a packed
tower, the processing apparatus, a
centrifuge fan and an exhaust tube which are sequentially communicated, a plurality of
plasma processing mechanisms are arranged in the
plasma shell of the processing apparatus, each of the
plasma processing mechanisms comprises a pedestal, an annular
flange is arranged in the pedestal, the front and
tail surfaces of the
flange are connected with a ground
electrode plate and a high-
voltage electrode plate respectively, an air outlet and an insulation medium plate are arranged between the ground
electrode plate and the
flange, the front surface of the high-
voltage electrode plate is provided with a plurality of pointed cones, the tips of the pointed cones are provided with through holes, the external surface of the ground electrode is provided with a first
insulation layer, the
tail surface of the high-
voltage electrode plate is provided with a second
insulation layer, the second
insulation layer is provided with second through holes, and the high-voltage electrode plate and the ground electrode plates are connected with the
high voltage terminal and the grounding terminal of a high-voltage power supply through electrode outgoing lines respectively. The apparatus and the
system can generate high-density plasma under a low breakdown
field strength, and can treat all the gas, prolong the action time of the gas and the plasma, and improve the processing efficiency.