Provided is the design and fabrication of the novel bounce drive
actuator (BDA) for the development of a new-type micro rotary motor. Although the scratch drive
actuator (SDA)
micro motor has been developed more than one decade, such device has limited commercial applications due to its shorter lifetime, high
power consumption and sudden reverse rotation. In contrast, present invention proposes an innovative BDA micro rotary motor with different actuating mechanism and
improved performance. Several significant investigations shown in this research present that the length of the SDA-plate is longer than 75 μm and the plate length of the BDA is less than 75 μm. Under the same driving power and frequency with SDA-based
micro motor, the BDA-based micro rotary motor exhibited a consistent “reverse” rotation and a higher speed. BDA has higher
flexural rigidity due to its shorter length of plate; thus, the contact area of the bending BDA-plate and the insulator substrate will substantially be reduced even under the same applied
voltage as the priming value of SDA-plate. Furthermore, a novel rib and
flange structure design for the improvement of lifetime (>100 hrs) and rotational speed (>30 rpm) of BDA
micro motor was also demonstrated in this invention.