A
plasma cooling chamber spray structure for removing process
waste gas from production equipment allows individual or mixed process waste gases to enter a dissociation chamber of a
waste gas plasma processor via separate gas pipelines. A vertical
plasma body is located in the center of the dissociation chamber, which, in conjunction with the introduction of working gas
nitrogen, dissociates the
tail gas containing the special gas generated in the dissociation chamber at high temperature. A
cooling chamber is connected to the rear end of the dissociation chamber, and the
cooling chamber has an outer cylinder connected to the dissociation chamber and a short section relative to the
tail end of the heating
flame section of the plasma body. An inner cylinder of an outer cylinder is characterized by having multiple annularly arranged spray nozzles on the inner
edge surface of the outer cylinder, each
spray nozzle spraying water onto the outer
edge surface of the inner cylinder to provide
water cooling in addition to
air cooling for the cooling chamber. Because the entire cooling chamber is cooled earlier, the dissociation of
nitrogen at high temperature is reduced, thus greatly reducing the
generation rate of
NOx (
gaseous nitrogen oxides) in the cooling chamber. Consequently, the cooling chamber can be shortened, thereby reducing the overall length and installation cost of the plasma processor.