The invention relates to a quick-response
magnetic levitation micropositioner driven by a PCB (
Printed Circuit Board) coil, which aims to solve the problem that the traditional air floatation and mechanical workpiece stage is difficult to meet the requirement of extremely high positioning accuracy of the workpiece stage, and comprises a micropositioner base, an objective table, a gravity compensator
assembly, a
stator array, a PCB coil group and a limiting
assembly, and the objective table and the micropositioner base are arranged from top to bottom; the objective table is connected with the micropositioner base through the limiting
assembly, the gravity compensator assembly is installed between the micropositioner base and the objective table, the
stator array is connected with the upper surface of the micropositioner base, and the PCB coil assembly is installed on the lower surface of the objective table. Compared with other micropositioner schemes, the complexity of a mechanical structure is reduced, and the overall weight of a micropositioner
system is reduced, so that the load of the
macro-positioner is reduced, the acceleration and the maximum speed of the
macro-positioner are increased, the response speed of the
system is improved, and the scheme has great significance in improving the productivity of a photoetching
machine. The invention belongs to the technical field of precision motion tables.