The invention discloses a micro-through-hole quality detection method and
system based on
data model feedback, and relates to the technical field of
semiconductor detection, and the method comprises the steps: obtaining micro-through-hole image data, carrying out the gray
processing of the micro-through-hole image data, carrying out the binary conversion of a processed gray image, obtaining micro-through-hole
binary image data, and carrying out the detection of the micro-through-hole quality. And obtaining two-dimensional
binary image data of the micro-through hole according to the
binary image data of the micro-through hole. According to the method, the micro-through hole is roughly detected through the shortest
diameter of the micro-through hole, the monitoring efficiency is improved, resource waste is avoided, the
point cloud spacing information is obtained through the minimum
defect size information and the shortest
diameter of the micro-through hole, dynamic adjustment of
point cloud model construction is achieved, the accuracy of the model is improved, and the accuracy of the model is improved. The micro through hole is further analyzed through the contour curve function of the micro through hole instead of directly comparing the aperture of the micro through hole with the production standard, so that misjudgment of the micro through hole is avoided, and the quality detection efficiency of the micro through hole is improved.