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Objective with pupil obscuration

An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first, convex mirror and a second, concave mirror. The second partial objective, which projects the intermediate image onto a second field plane, has a third and a fourth mirror, both concave. All of the four mirrors have central mirror apertures. The axial distance between the first and second mirrors is in a ratio between 0.95 and 1.05 relative to the distance between the second mirror and the intermediate image. The axial distance ZM3-IM between the third mirror and the second field plane conforms to the relationship <math-cwu id="MATH-US-00001"> <NUMBER>1< / NUMBER> 0.03 · Du M3 + 5.0 ⁢ ⁢ mm < Z M3 - IM < 0.25 · Du M3 tan ⁡ ( arcsin ⁡ ( NA ) ) . <mathematica-file id="MATHEMATICA-00001" file="US20040114217A1-20040617-M00001.NB" / > <image id="EMI-M00001" wi="216.027" he="18.00225" file="US20040114217A1-20040617-M00001.TIF" imf="TIFF" ti="MF" / > < / MATH-CWU> NA represents the numerical aperture NA in the second field plane, and DuM3 represents the diameter of the third mirror. The objective furthermore has a Petzval radius with an absolute value larger than the distance between the first and second field planes.
Owner:CARL ZEISS SMT GMBH
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