The invention provides a handling robot system for chemical mechanical polishing, which is characterized in that an actuating mechanism comprises a robot body and a support device, the robot body comprises jaws, jaw turning mechanisms, small arms, large arms and a sleeve, the support device comprises a linear guide slide and a guide screw, a detector is used for detecting operating state parameters of the actuating mechanism to generate detection formation, a control device is used for controlling movement and motional angle of the jaws and comprises an upper computer controller, a master controller, a motion controller, a servo driver, a motor and an encoder, the upper computer controller is used for receiving operational orders input by a user, the encoder is used for detecting corresponding state information of the motor, the master controller is used for generating movement orders for the actuating mechanism, the motion controller is used for calculating motor controlling quantity according to a preset control algorithm, the servo driver is used for calculating corresponding control torques of the motor, and the motor is used for driving the actuating mechanism to move under control of the corresponding control torques.