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39results about How to "Reduce and eliminate vibration" patented technology

Positioning device for workpiece fixture in ion beam polishing equipment

The invention discloses a positioning device for a workpiece fixture in ion beam polishing equipment. The scheme includes that an annular positioning plate and the chuck type workpiece fixture interact with each other, and the annular positioning plate used as a positioning reference is horizontally and fixedly mounted, so that the workpiece fixture can be positioned by the positioning device. The positioning device is characterized in that a convex horizontal positioning plane, lifting devices and positioning pins are arranged on the upper surface of the annular positioning plate, the lifting devices and the positioning pins are symmetrically arranged along the peripheral edge of the positioning plate, a positioning plane which can cling to the horizontal positioning plane on the positioning plate is arranged on the fixture, and positioning holes which can be in one-to-one correspondence with the positioning pins on the positioning plate are formed in the fixture. The lifting devices lift the fixture with a clamped workpiece to a certain altitude and then slowly descend, so that the two positioning planes can completely cling to each other, all the positioning pins can be inserted into the positioning holes, and the workpiece fixture can be positioned. The positioning device has the advantages that positioning references are arranged on the same component, so that the workpiece fixture can be easily adjusted and can be completely positioned under the effect of the gravity of the fixture as long as the references are effectively adjusted, and the positioning device is simple in action; the positioning movement speed is controllable, so that positioning operation can be slowly carried out, and vibration can be greatly reduced and eliminated.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI

A positioning device for workpiece fixture in ion beam polishing equipment

The invention discloses a positioning device for a workpiece fixture in ion beam polishing equipment. The scheme includes that an annular positioning plate and the chuck type workpiece fixture interact with each other, and the annular positioning plate used as a positioning reference is horizontally and fixedly mounted, so that the workpiece fixture can be positioned by the positioning device. The positioning device is characterized in that a convex horizontal positioning plane, lifting devices and positioning pins are arranged on the upper surface of the annular positioning plate, the lifting devices and the positioning pins are symmetrically arranged along the peripheral edge of the positioning plate, a positioning plane which can cling to the horizontal positioning plane on the positioning plate is arranged on the fixture, and positioning holes which can be in one-to-one correspondence with the positioning pins on the positioning plate are formed in the fixture. The lifting devices lift the fixture with a clamped workpiece to a certain altitude and then slowly descend, so that the two positioning planes can completely cling to each other, all the positioning pins can be inserted into the positioning holes, and the workpiece fixture can be positioned. The positioning device has the advantages that positioning references are arranged on the same component, so that the workpiece fixture can be easily adjusted and can be completely positioned under the effect of the gravity of the fixture as long as the references are effectively adjusted, and the positioning device is simple in action; the positioning movement speed is controllable, so that positioning operation can be slowly carried out, and vibration can be greatly reduced and eliminated.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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