A method and a device for generating a multidimensional XCT measurement
data set ((Kx, Ky, Kz)) of a sample (P) by means of spectrally multi-structured scattering imaging are disclosed. A plurality of scattering images (19) are generated by a measurement process comprising the steps of: a) Structuring a spectrum of an EUV / X-
ray radiation (6) as a structured frequency range to provide an EUV / X-
ray measuring beam (12) with a measuring beam spectrum comprising narrow-band structured frequency ranges, wherein at least one axial
frequency space coordinate (Kz) in the
frequency space (Kx, Ky, Kz) is assigned to each of the narrow-band structured frequency ranges, b) irradiating the EUV / X-
ray measuring beam (12) onto a spatially laterally extended surface section of the sample (P), c) detecting scattered
radiation which is scattered back by the sample (P) with a
detector (17) which outputs intensity values for the structured frequency range belonging to the measuring process, each of which is assigned at least one lateral
frequency space coordinate (Kx, Ky) in the frequency space (Kx, Ky, Kz), the intensity values forming the scattering pattern (19) for the associated measuring process. The intensity values can be combined to form a multidimensional XCT measurement
data set ((Kx, Ky, Kz)), wherein the positions of the intensity values in the frequency space (Kx, Ky, Kz) are given by at least one lateral frequency space coordinate (Kx, Ky) and one axial frequency space coordinate (Kz). Furthermore, computer-implemented methods for reconstructing a multidimensional structure of a sample from a multidimensional XCT measurement
data set are disclosed.