The invention provides a method for repairing a damaged
graphite boat blade. The method comprises the steps that a blade of the damaged
graphite boat is demounted; a repairing area is set on the damaged blade; a damaged portion is
cut off along the repairing area, a repairing tool is used to
cut out a to-be-used part of a scrapped
graphite boat blade, the to-be-used part and a
cut to-be-repaired part can be combined into one complete blade and assembled on the graphite boat, and then calibration and repairing are conducted on a boat clamping mounting device; or, a patch piece is
cut off from the scrapped graphite boat blade, the patch piece fixedly covers the two sides of a crack of a damaged portion in the repairing area, the graphite boat is assembled, and then calibration and repairingare conducted on the boat clamping mounting device; the repaired graphite boat is cleaned and dried; dummy
silicon wafers are inserted into the repaired graphite boat, the repaired graphite boat is put into a tubular anti-reflection film deposition apparatus, and
coating process is carried out; the dummy
silicon wafers are taken out in order, according to the conditions of anti-reflection films ofthe dummy
silicon wafers at each position, the position of the repaired part is slightly adjusted.