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39results about How to "Reduce the number of patterning processes" patented technology

Array substrate, preparing method thereof and display device

The invention provides an array substrate, a preparing method thereof and a display device, wherein the preparing method comprises the steps of: forming an active material layer, a gate electrode insulating layer and a metal film on a substrate, forming a pattern which comprises an active layer and a pattern that comprises a gate electrode, a source electrode, a drain electrode, a gate line and a data line through a primary composition process; forming a passivation layer on the substrate, forming a source electrode contact hole, a drain electrode contact hole and an over-bridge structure contact hole through a secondary composition process; and forming a transparent conductive film on the substrate, eliminating partial transparent conductive film through a film peeling process for forming a source electrode contact part, a drain electrode contact hole, a pixel electrode and an over-bridge structure. According to the preparing method, number of times in using the composition process is reduced. The array substrate has advantages of simple preparing process, high production efficiency and high yield rate.
Owner:BOE TECH GRP CO LTD

Array substrate, manufacture method of array substrate and display device

The invention belongs to the technical field of display and discloses an array substrate and a manufacture method of the array substrate. Source electrode patterns, drain electrode patterns, pixel electrode patterns and active layer patterns of the array substrate are formed through the once picture composition process. Compared with the traditional manufacture process of the array substrate, the manufacture method of the array substrate is simple in process, shortens production time, reduces product cost and improves product quality.
Owner:BOE TECH GRP CO LTD

Array substrate, preparing method thereof and display device

The invention provides an array substrate, a preparing method thereof and a display device, wherein the preparing method comprises the steps of: forming a pattern and a gate electrode insulating layer on a substrate, wherein the pattern comprises an active layer; forming a metal film on the gate electrode insulating layer, patterning the metal film through a primary composition process for forming the pattern which comprises a gate electrode, a source electrode, a drain electrode, a gate line and a data line; forming a passivation layer on the substrate; patterning the passivation layer through the primary composition process for forming a source electrode contact hole, a drain electrode contact hole and an over-bridge structure contact hole; and forming a transparent conductive film on the substrate, eliminating partial transparent conductive film through a film peeling process for forming a source electrode contact part, a drain electrode contact hole, a pixel electrode and an over-bridge structure. According to the preparing method, number of times in using the composition process is reduced. The array substrate has advantages of simple preparing process, high production efficiency and high yield rate.
Owner:BOE TECH GRP CO LTD

Thin film transistor and manufacturing method thereof, array substrate and display device

ActiveCN103730346ASolve the problem of contact resistanceSkip the manufacturing processTransistorSolid-state devicesIndiumDisplay device
The embodiment of the invention provides a thin film transistor and a manufacturing method of the thin film transistor, an array substrate and a display device, and relates to the technical field of display. The thin film transistor can solve the problem that the contact resistance exists between a source electrode and a semiconductor active layer and exists between a drain electrode and the semiconductor active layer, reduce the number of times of the picture composition technology and reduce the cost. The manufacturing method comprises the steps of forming a grid electrode, a grid insulating layer, the metal-oxide semiconductor active layer, the source electrode and the drain electrode on a substrate, wherein the formed metal-oxide semiconductor active layer comprises an indium-oxide series binary metal-oxide pattern layer making direct contact with the source electrode and the drain electrode, and a first pattern, a second pattern and a third pattern are included in the indium-oxide series binary metal-oxide pattern layer; using the insulating layer formed above the source electrode and the drain electrode as a barrier layer, adopting the ion implantation technology to implanting metal doping ions into the indium-oxide series binary metal-oxide pattern layer, conducting annealing treatment, converting the binary metal oxide of the third pattern into a polybasic metal-oxide semiconductor, and forming the metal-oxide semiconductor active layer. The thin film transistor is used for manufacturing the display device.
Owner:BOE TECH GRP CO LTD

Thin film transistor driving backplane, manufacturing method thereof and display panel

The invention relates to the technical field of display, in particular to a thin film transistor driving backplane, a manufacturing method and a display panel. The manufacturing method of the thin film transistor driving backplane comprises the following steps that a backplane substrate provided with a plurality of active device structures is manufactured; an electrode layer is arranged on the backplane substrate; the electrode layer is made into source electrodes, drain electrodes and pixel electrodes by the adoption of the one-time picture composition technology, wherein the pixel electrodes and the drain electrodes are arranged in an integrated mode. According to the manufacturing method, the electrode layer is made into the source electrodes, the drain electrodes and the pixel electrodes by the adoption of the one-time picture composition technology, wherein the pixel electrodes and the drain electrodes are arranged in the integrated mode; therefore, the source electrodes, the drain electrodes and the pixel electrodes are located on the same electrode layer; the prior art that the source electrodes, the drain electrodes and the pixel electrodes are formed through two-time picture composition technology is simplified into the manufacturing method that the source electrodes, the drain electrodes and the pixel electrodes can be formed only through the one-time picture composition technology; the thickness of the thin film transistor driving backplane is greatly reduced, the manufacturing steps are simplified, and the manufacturing cost is saved.
Owner:BOE TECH GRP CO LTD

Array substrate preparation method, array substrate and display device

The invention belongs to the display technical field and relates to an array substrate preparation method, an array substrate and a display device. The array substrate preparation method includes steps for forming a thin film transistor, a pixel electrode and a common electrode line. Steps for forming the thin film transistor include steps for forming patterns of a gate, a gate insulating layer, a semiconductor layer, an etching stopping layer, a source and a drain, the gate and the common electrode line being formed in the same layer. The array substrate preparation method is characterized in that: a gate insulating thin film and a semiconductor thin film are formed sequentially, and a pattern containing the semiconductor layer is formed through one-step patterning process; and an etching stopping thin film is formed, and a pattern containing the gate insulating layer and the etching stopping layer is formed through one-step patterning process. With the array substrate preparation method of the invention adopted, the number of times of patterning process can be decreased, and production process can be simplified, and the manufacturing capacity of array substrate products can be improved, and production efficiency can be improved, and production cost can be reduced.
Owner:BOE TECH GRP CO LTD +1

Array substrate, manufacturing method thereof and display device

The invention provides an array substrate, a manufacturing method thereof and a display device. The manufacturing method comprises the steps that a grid metal film is deposited on a substrate body, and a first graph comprising a grid is formed through a primary composition technology; a grid insulating film, a first transparent conductive film, a source drain metal film and a doped a-si film are sequentially deposited, and a second graph comprising a pixel electrode, a source, a drain and a doped semiconductor layer is formed through a secondary composition technology; the a-si film is deposited, and a third graph comprising a TFT channel, a semiconductor layer and a grid insulating layer via hole is formed through a third composition technology; a passivation layer film is deposited and a fourth graph comprising a passivation layer via hole is formed through a fourth composition technology, wherein the passivation layer film via hole corresponds to the grid insulating layer via hole in position; a second transparent conductive layer is deposited and a fifth graph comprising an electric connecting part is formed through a fifth composition technology. By means of the manufacturing method, manufacturing processes can be reduced and the product quality can be improved.
Owner:BEIJING BOE OPTOELECTRONCIS TECH CO LTD

Array substrate, manufacturing method of array substrate, and display device

An embodiment of the invention provides an array substrate, a manufacturing method of the array substrate, and a display device, and relates to the technical field of display. The manufacturing method includes steps of 1, forming a pattern layer with a grid electrode on a substrate; 2, forming a pattern layer with a grid insulation layer on the substrate subjected to the last step; 3, forming a pattern layer with an active layer on the substrate subjected to the second step; 4, sequentially forming a transparent conductive thin film and a metal thin film on the substrate subjected to the third step, and forming a pattern layer with a first electrode, a data line, a source electrode, a drain electrode and a thin film transistor (TFT) channel through pattern composition process; 5, forming a pattern layer with a passivated layer on the substrate subjected to the fourth step; and 6, forming a pattern layer with a second electrode on the substrate subjected to the fifth step. The manufacturing method is used for manufacturing the array substrate and the display device and the like. The array substrate, the manufacturing method of the array substrate and the display device have the advantages that pattern composition process times can be decreased, and accordingly, productivity of mass production products is improved, and cost is reduced.
Owner:BEIJING BOE OPTOELECTRONCIS TECH CO LTD

Array substrate and preparation method thereof

The invention provides an array substrate and a preparation method thereof, belongs to the technical field of array substrates, and aims at solving the problem of complicated preparation technology of the existing array substrate employing a double-channel thin-film transistor. The array substrate provided by the invention comprises a plurality of thin-film transistors, a first electrode and a second electrode, wherein each thin-film transistor comprises a grid, a first active region and a second active region; each first active region and each second active region are respectively located below and above each grid and are composed of metal-oxide semiconductors; the first electrode and the first active regions are located on the same layer; the second electrode and the second active regions are located on the same layer; and the first electrode and the second electrode are composed of ion-implanted metal-oxide semiconductors.
Owner:BOE TECH GRP CO LTD

Array substrate manufacturing method, array substrate and display device

The invention provides an array substrate manufacturing method, an array substrate and a display device. The array substrate manufacturing method includes the steps of forming patterns of an active layer, a grid insulation layer, a grid and a grid line with the once layout technology; forming a passivation layer on a substrate where the active layer, the grid insulation layer, the grid and the grid line are formed, and forming a via hole in the passivation layer with the once layout technology; forming patterns of a data line, a source, a drain and a pixel electrode on the substrate where the passivation layer is formed with the once layout technology, wherein the drain makes contact with the active layer through the via hole. By means of the array substrate manufacturing method, the array substrate and the display device, the number of times of the layout technology adopted in the low temperature polycrystalline silicon array substrate manufacturing technology process is decreased, the technology complexity is accordingly lowered, and the technology cost is reduced while the manufacturing technology time is shortened.
Owner:BOE TECH GRP CO LTD

Upper substrate and preparation method thereof, touch display panel and preparation method thereof

The embodiment of the invention provides an upper substrate for the touch display panel, and a preparation method thereof, a touch display panel and a preparation method thereof, relating to the technical field of display and aiming at preventing the increase of picture composition times, and lowering the production cost. The preparation method of the upper substrate comprises the following steps: forming a black matrix through one-time composition technology, wherein the black matrix in the display area corresponds to a gap between the two adjacent touch electrodes; forming a negative photosensitive type organic resin thin film on the substrate of the black matrix, exposing and developing by taking the black matrix as a mask, removing the organic resin thin film corresponding to the black matrix so as to form an organic resin layer; forming a transparent conductive thin film above the organic resin layer, wherein the transparent conductive thin films respectively positioned above the organic resin layer and the black matrix are separated, the touch electrode is formed on the transparent conductive thin film above the organic resin layer, and a retention pattern is formed on the transparent conductive thin film above the black matrix. The preparation methods are used for manufacturing the upper substrate for the touch display panel, and the touch display panel.
Owner:BOE TECH GRP CO LTD

Array substrate and manufacturing method thereof as well as display device

The present invention provides an array substrate and a manufacturing method thereof as well as a display device, and belongs to the technical field of display. The manufacturing method of the array substrate comprises the following steps: forming a gate electrode, a gate line, a data line, a source electrode and a drain electrode on an insulation layer through a one-step patterning process; and installing the gate electrode, the gate line, the data line, the source electrode and the drain electrode in the same layer by using the same material. The technical solution of the present invention can reduce the number of times of patterning process when the array substrate is prepared, increase the production efficiency, reduce the manufacturing cost, and can also reduce a coupling capacitance among the source electrode, the drain electrode and the grate electrode of the array substrate, thereby reducing the power consumption of the array substrate.
Owner:BOE TECH GRP CO LTD

Array substrate and preparation method thereof and display device

The embodiment of the invention discloses an array substrate and a preparation method thereof, and a display device, relates to the technical field of display, and aims to prevent an active layer frombeing over-etched and reduce the process frequency and the manufacturing cost. The array substrate comprises an underlayer substrate, a light shading pattern, a buffer pattern, an active layer, a gate insulating layer, a first passivation layer and source and drain electrodes, wherein the orthographic projection of the buffer pattern on the underlayer substrate covers the orthographic projectionof the active layer on the underlayer substrate, the orthographic projection of the buffer pattern on the underlayer substrate is within the orthographic projection range of the light shading patternon the underlayer substrate, the area of the orthographic projection of the buffer pattern on the underlayer substrate is smaller than that of the orthographic projection of the light shading patternon the underlayer substrate, a first via hole, a second via hole and a third via hole are formed in the gate insulating layer and the first passivation layer, one of the source electrode and the drainelectrode is coupled with the active layer through the first via hole, and the other one is coupled with the active layer through the second via hole and is coupled with the light shading pattern through the third via hole. The array substrate is applied to the display device, so that the display device displays a picture.
Owner:BOE TECH GRP CO LTD +1

Array substrate and manufacture method thereof and display device

The invention discloses an array substrate and a manufacture method thereof and a display device, and relates to the technical field of display. The times of a picturing technology adopted in the manufacture process of the array substrate can be decreased. The array substrate comprises an underlayment substrate and a gate, a gate insulation layer and an active layer, and further comprises a passivation layer arranged on the active layer and a source electrode, a drain electrode, a first electrode and a second electrode which are arranged on the passivation layer in a same-layer mode; the passivation layer is provided with a first via hole which comprises two oppositely arranged inclined side surfaces; the first electrode at least partially covers one side surface of the first via hole, the second electrode at least partially covers the other side surface of the first via hole, and the second electrode is in electronic connection with a lead of a common electrode; the passivation layer is further provided with a second via hole, the source electrode and the drain electrode are connected with the active layer through the second via hole, and the first electrode is in electronic connection with the source electrode or the drain electrode. The array substrate can be applied to the display device.
Owner:BOE TECH GRP CO LTD +1

Photoelectric detection substrate, preparation method thereof, and photoelectric detection device

The invention provides a photoelectric detection substrate, a preparation method thereof, and a photoelectric detection device. The photoelectric detection substrate comprises a thin film transistor and a photodiode having coplanar structure, and the thin film transistor is a vertical channel structure. By forming a coplanar structure of the thin film transistor with a vertical channel structure and the photodiode, the invention effectively reduces the overall thickness of the photoelectric detection substrate, reduces the deformation of the substrate caused by stress, avoids damage caused bythe deformation of the substrate, and improves the yield of the product. At the same time, because of the coplanar structure, the thin film transistor and the photodiode can be fabricated simultaneously, the number of times of the patterning process are reduced, the preparation process is simplified, and the production cost is reduced. As the occupied area of the vertical channel structure thin film transistor is small, the photodiode photosensitive area can be increased, so that the detection efficiency can be improve and the resolution of the product can be improved.
Owner:BOE TECH GRP CO LTD

Electrostatic discharge protection structure and forming method and working method thereof

The invention relates to an electrostatic discharge protection structure and a forming method and a working method thereof. The forming method comprises steps that a substrate is provided, and the substrate includes a first region, a second region and a third region; a first well region is formed in the substrate, and the first well region has first ions with the first concentration; a first gatestructure is formed on a surface of the second region; a first doping region is formed in the first region, and the first doping region has second ions having a conductivity type opposite to the firstions; a second doping region is formed in the third region, the second doping region has second ions with the second concentration, and the second concentration is greater than the first concentration; a third doping region is formed in the third region, the second doping region and the third doping region are arranged parallel to the first direction, the second doping region is adjacent to the third doping region, the three doping region has third ions with the third concentration, a conductivity type of the third ions is opposite to the second ions, and the third concentration is greater than the first concentration. The method is advantaged in that performance of the electrostatic discharge protection structure is improved.
Owner:HUAIAN IMAGING DEVICE MFGR CORP

Contact-control substrate, manufacture method thereof, and display device

The invention provides a touch control substrate and a manufacturing method thereof, and a display device, belonging to the technical field of display. The touch substrate comprises a first touch electrode, a first insulating layer, a second touch electrode and a second insulating layer arranged sequentially on a substrate, and the manufacturing method of the touch substrate comprises the steps offorming a pattern of the second touch electrode and the second insulating layer by a primary patterning process. The technical proposal of the invention can reduce the number of mask plates requiredfor manufacturing the touch substrate, reduce the number of patterning processes for manufacturing the touch substrate, shorten the production time of the touch substrate, and reduce the production cost of the touch substrate.
Owner:HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1

A kind of thin film transistor drive backplane and its manufacturing method, display panel

The invention relates to the field of display technology, in particular to a thin film transistor driving backplane, a manufacturing method thereof, and a display panel. The manufacturing method includes manufacturing a backplane substrate provided with multiple active device structures; setting an electrode layer on the backplane substrate; making the electrode layer into a source electrode, a drain electrode, and a drain electrode through a patterning process. An integrated pixel electrode. The manufacturing method of the present invention adopts a design in which the electrode layer is made into multiple source electrodes, drain electrodes, and pixel electrodes integrally arranged with the drain electrodes through a patterning process; the source electrodes, the drain electrodes, and the pixel electrodes are all in the same electrode layer; The source, drain and pixel electrodes that need to be formed by two patterning processes in the existing method are simplified to only one patterning process; the thickness of the thin film transistor driving backplane is greatly reduced, the manufacturing steps are simplified, and the savings production cost.
Owner:BOE TECH GRP CO LTD

Array substrate, manufacturing method thereof, and display device

The invention discloses an array substrate, a manufacturing method thereof, and a display device, which relate to the field of display technology and can reduce the number of patterning processes used in the preparation process of the array substrate. Wherein, the array substrate includes a base substrate and a gate stacked on the base substrate, a gate insulating layer and an active layer, and also includes a passivation layer disposed on the active layer and a passivation layer disposed on the passivation layer. The source electrode, the drain electrode, the first electrode and the second electrode are arranged in the same layer; the passivation layer is provided with a first via hole, and the first via hole includes two opposite inclined sides; the first electrode at least partially covers the second electrode One side of a via hole, the second electrode at least partially covers the other side of the first via hole, the second electrode is electrically connected to the common electrode lead; a second via hole is also provided on the passivation layer, and the source and drain pass through The second via hole is connected to the active layer, and the first electrode is electrically connected to the source or the drain. The array substrate provided by the present invention can be applied to display devices.
Owner:BOE TECH GRP CO LTD +1

Oxide thin film transistor and its preparation method, array substrate and display device

The invention provides an oxide thin film transistor, a preparation method thereof, an array substrate and a display device. In the preparation method of the oxide thin film transistor provided by the present invention, the channel protection layer is formed by oxidizing the first metal layer between the source and drain during the patterning process for forming the source and drain. Therefore, under the premise that the number of patterning processes is small, a channel protective layer that effectively protects the channel can be formed, and the electrical performance of the oxide thin film transistor is effectively improved.
Owner:BOE TECH GRP CO LTD +1

Upper substrate and its preparation method, touch display panel and its preparation method

The embodiment of the invention provides an upper substrate for the touch display panel, and a preparation method thereof, a touch display panel and a preparation method thereof, relating to the technical field of display and aiming at preventing the increase of picture composition times, and lowering the production cost. The preparation method of the upper substrate comprises the following steps: forming a black matrix through one-time composition technology, wherein the black matrix in the display area corresponds to a gap between the two adjacent touch electrodes; forming a negative photosensitive type organic resin thin film on the substrate of the black matrix, exposing and developing by taking the black matrix as a mask, removing the organic resin thin film corresponding to the black matrix so as to form an organic resin layer; forming a transparent conductive thin film above the organic resin layer, wherein the transparent conductive thin films respectively positioned above the organic resin layer and the black matrix are separated, the touch electrode is formed on the transparent conductive thin film above the organic resin layer, and a retention pattern is formed on the transparent conductive thin film above the black matrix. The preparation methods are used for manufacturing the upper substrate for the touch display panel, and the touch display panel.
Owner:BOE TECH GRP CO LTD

Array substrate and its preparation method

The invention provides an array substrate and a preparation method thereof, belongs to the technical field of array substrates, and aims at solving the problem of complicated preparation technology of the existing array substrate employing a double-channel thin-film transistor. The array substrate provided by the invention comprises a plurality of thin-film transistors, a first electrode and a second electrode, wherein each thin-film transistor comprises a grid, a first active region and a second active region; each first active region and each second active region are respectively located below and above each grid and are composed of metal-oxide semiconductors; the first electrode and the first active regions are located on the same layer; the second electrode and the second active regions are located on the same layer; and the first electrode and the second electrode are composed of ion-implanted metal-oxide semiconductors.
Owner:BOE TECH GRP CO LTD
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