The utility model provides a kind of automatic recognition device of degumming and
material removal, it is related to
silicon wafer production and
processing technical field, to solve the existing mechanical arm to execute
material removal action, because lack accurate, reliable
material removal state identification mechanism, cannot accurately judge whether transfer frame has completely separated from mechanical arm and successfully fallen into degumming
pool, this problem can lead to mechanical arm to lift reset, transfer frame is still not correctly separated, and then interfere with the normal progress of subsequent
processing process Problem, including main frame;The main frame is rectangular long rod structure.After mechanical arm executes material
removal action, before lifting reset, whether transfer frame completely separates from mechanical arm and falls into degumming
pool is detected in real time, when identifying that material removal is not successful, can timely feedback to mechanical arm control device, to make mechanical arm execute material removal instruction again, avoid the problem that subsequent
processing process is interfered because transfer frame is not correctly separated, the reliability of mechanical arm to execute material removal instruction is significantly improved.