An
inertia measurement module and three-axis
accelerometer, comprising a first
pole piece (4) located on a substrate and a
mass block (1) suspendingly connected above the substrate via elastic beams (11, 12); the elastic beams (11, 12) includes a first
elastic beam (12) and a second
elastic beam (11), two ends of the second elastic beams (11) being connected to an
anchor point (6) of the substrate, two ends of the first
elastic beam (11) being connected to the
mass block (1); a center of the first elastic beam (12) and / or the second elastic beam (11) deviates from a center of gravity of the
mass block (1); the mass block (1) is further provided with a first movable
electrode (9) and a second movable
electrode (10) in a Y-axis and an X-axis direction; the movement of one axis in a plane of the
inertia measurement module cannot be affected by an eccentric structure feature, such that both X-axis movement and Y-axis movement are linear movements, thus not intensifying an inter-axis
coupling, and also not reducing displacement of a mass block on the X-axis and the Y-axis, thus improving
capacitance detection precision.