34results about How to "Suppresses generation of dust" patented technology

A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and / or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. The useful life of each plane mirror can be prolonged without displacing the optical axis itself by overcoming the problem that when the laser beam is employed as the light source and a thin beam with a high illumination density is illuminated to the same position on each of the first and second plane mirrors for a long time, the surface of the plane mirror is deteriorated, the reflectance is reduced, and the light quantity cannot be held at a required level.

A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol. / cm2 or less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film.

A large-size substrate adapted for light exposure is of a plate shape having a diagonal length or diameter of 500-2,000 mm, a thickness of 1-20 mm, and a peripheral surface with a roughness Ra of 0.05-0.4 μm. The number of particles released from the substrate periphery during cleaning is minimized, leading to an improved yield in the cleaning step. The substrate can be manually handled, achieving an improvement in substrate quality without a need for a handling mechanism.

Disclosed is an aggregate recycling apparatus having an air circulation type foreign substance and fine particle separation means which directs a blast of air, circulated in a dry state, toward waste having passed through a crushing process immediately after the crushing of the waste and removes fine particles and foreign substances using a cyclone, thereby removing dust generated in the course of separating and screening the waste, and a method thereof. The aggregate recycling apparatus includes a crushing device for crushing waste, an air circulation type fine particle and foreign substance separation device for directing re-circulated air to crushed products received from the crushing device, scattering fine particles and foreign substances and collecting dust in a cyclone, an air conveyor for conveying crushed products deprived of the fine particles and foreign substances, and a double vibration screen for screening the crushed products received from the air conveyor.

The present invention is to provide a plasma processing apparatus, whose structure can be simplified, and further, which is capable of forming highly effective plasma and obtaining a satisfactory vertical etching property without involving a problem concerning interference. In the plasma processing apparatus according to the invention, a ground electrode provided at a position opposite to a substrate mounting electrode is configured to be a counter electrode, whose potential is in a floating state, and radio frequency power is branched at an arbitrary position of the radio frequency antenna coil, which generates inductive discharge, into the counter electrode through a capacitor so as to share a part of the radio frequency power used for inductive discharge, thereby generating a self-bias in the counter electrode. In the system, there is provided a mechanism for controlling the radio frequency voltage to be applied to the floating electrode uniformly.

A plasma processing apparatus, comprising: at least, a plasma processing chamber for processing therein an object to be processed; antenna means for guiding microwaves into the plasma processing chamber; and a dielectric member disposed between the antenna means and the plasma processing chamber; wherein a surface of the dielectric member facing the inside of the plasma processing chamber has a projecting shape.

A composite is characterized by particulates of sand wherein at least a portion of the surface of the particulates is coated with a polycationic polymer. The presence of the polycationic polymer on the surface of the particulates reduces the amount of dust generated during handling and use of the sand. The polycationic polymer further reduces the amount of dust generated during transport of the sand as well during manufacture, treatment or processing of the sand.

A carbonaceous porous material having excellent mechanical strength is obtained by mixing a resin, that can be used as starting material for amorphous carbon, uniformly with carbon powder and an organic substance with a carbon residue rate of 0˜5% and, after molding the mixture in an arbitrary shape, carbonizing the mixture at temperature of 500° C. or higher.

A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol. / cm2 or less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film.

The invention relates to a dust treatment device for a belt conveyor. The dust treatment device comprises a feeding belt, a material collecting hopper, a sweeper, an atomizing pipeline, a spraying nozzle, a material flow adjustment device, a primary sliding groove, a secondary sliding groove, a feeding device, a material guide groove and a material receiving belt, wherein the feeding belt is connected with the material collecting hopper; the sweeper is mounted below the feeding belt; the atomizing pipeline and the spraying nozzle are arranged at the periphery of the sweeper; the material flow adjustment device is arranged in the material collecting hopper; the secondary sliding groove is formed below the sweeper; the lower end of the secondary sliding groove is connected with the primary sliding groove; the primary sliding groove is connected with the feeding device; the material guide groove is formed below the feeding device; the material receiving belt is arranged below the material guide groove. According to the dust treatment device for the belt conveyor, the generation of dust is inhibited from the source, and the dust produced by the sweeper during a sweeping process can also be inhibited.

In a suspension used in an actuator of a hard disk drive, a limiter mechanism is to be provided which produces little dust and which can restrict deformation of a gimbals even against a strong shock. According to one embodiment, when a weak shock is applied to the suspension, a limiter tab and a back side of a load beam come into contact with each other to prevent a gimbals from being largely deformed by the shock. Since deformation of the gimbals is restricted by surface contact of both load beam and limiter tab, the generation of dust is suppressed effectively. When a strong shock is applied to the suspension, the limiter tab is deformed and a projecting portion of a restrictive aperture and an end portion of a limiter tab aperture come into contact with each other. The projecting portion retains the limiter tab to restrict a further deformation of the gimbals.

Embodiments of the invention provide, in a compact magnetic disk drive, a stable structure capable of reducing self-oscillation occurring from disk spinning, while suppressing generation of dust and dirt. In one embodiment, a magnetic disk is mounted on a hub of a spindle motor. A clamp is further attached to secure the magnetic disk in position. A plurality of opening portions are formed in the clamp around an axis. A counterweight formed of an elastic material is mounted in the opening portion by being press-fitted therein. The counterweight is less likely to generate dust and dirt through friction during insertion and looseness. A gap is provided between the clamp and the hub at locations near the opening portions. The counterweight has a protruded portion on a side surface of a circular column portion. The protruded portion slides into the gap between the clamp and the hub, counteracting a tendency of the counterweight to drop out of position.

To prevent foreign matters from adhering to a substrate, etc., thereby causing inconveniences during storing and transporting a mask blank, or during manufacturing the mask blank and a mask. Thin films 2 and 3 formed in a mask thin film forming step of a mask blank manufacturing steps are covered by a dust-free protective film 5 formed of water-soluble material, thereby preventing foreign matters from adhering to the surface of the mask blank itself and preventing the surface of the mask blank from being damaged in the subsequent step, and when the mask blank is used, the dust-free protective film is removed.

In a complex pipe, a plurality of pipe members containing at least a pipe member for liquid and a pipe member for electricity are fixed in parallel arrangement. One end of the complex pipe is connected to a stationary equipment and the other end is connected to a movable member. The plurality of pipe members are integrally combined by a cover member having flexibility. A liquid supply pipe is inserted with a space in the pipe member for liquid. A fluid for temperature adjustment is supplied to the space between the pipe member for liquid and the liquid supply pipe.

A large-size substrate adapted for light exposure is of a plate shape having a diagonal length or diameter of 500-2,000 mm, a thickness of 1-20 mm, and a peripheral surface with a roughness Ra of 0.05-0.4 μm. The number of particles released from the substrate periphery during cleaning is minimized, leading to an improved yield in the cleaning step. The substrate can be manually handled, achieving an improvement in substrate quality without a need for a handling mechanism.

Embodiments of the invention provide, in a compact magnetic disk drive, a stable structure capable of reducing self-oscillation occurring from disk spinning, while suppressing generation of dust and dirt. In one embodiment, a magnetic disk is mounted on a hub of a spindle motor. A clamp is further attached to secure the magnetic disk in position. A plurality of opening portions are formed in the clamp around an axis. A counterweight formed of an elastic material is mounted in the opening portion by being press-fitted therein. The counterweight is less likely to generate dust and dirt through friction during insertion and looseness. A gap is provided between the clamp and the hub at locations near the opening portions. The counterweight has a protruded portion on a side surface of a circular column portion. The protruded portion slides into the gap between the clamp and the hub, counteracting a tendency of the counterweight to drop out of position.

A mask blank glass substrate is for use in manufacturing a mask blank. In the mask blank glass substrate, a marker expressing, by a plurality of pits, information for identifying or managing the mask blank glass substrate is formed on a surface of a region, having no influence on formation of a transfer pattern, of the mask blank glass substrate. Each of the pits forming the marker is a round hole with its edge portion being generally circular and a distance L1 between the edge portions of the adjacent pits is 50 μm or more. The marker is formed, for example, on an end face of the mask blank glass substrate.

A composite is characterized by particulates of sand wherein at least a portion of the surface of the particulates is coated with a polycationic polymer. The presence of the polycationic polymer on the surface of the particulates reduces the amount of dust generated during handling and use of the sand. The polycationic polymer further reduces the amount of dust generated during transport of the sand as well during manufacture, treatment or processing of the sand.

A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and / or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.

A method for producing modified coal using coal of a low grade comprising:adding water for preventing any dust generation to the dewatered coal; an addition amount of the water is adjusted for a water content rate of the water-added coal to be 6% by mass or more to 16% by mass or less; agglomerating the water-added coal; slowly oxidizing the agglomerated coal; and crushing the oxidized coal.

Hydraulic cylinders of a conveying apparatus includes piston rods that extend in parallel, pistons, and cylinder tubes that have an internal pressure chamber partitioned into first and second pressure chambers. A pair of the hydraulic cylinders are arranged in parallel with an interval in a width direction of a conveyance path. The cylinder tube slidingly moves to the first pressure chamber side by supplying a hydraulic pressure to the first pressure chamber and discharging a hydraulic pressure from the second pressure chamber, and the cylinder tubes slidingly move to the second pressure chamber side by supplying a hydraulic pressure to the second pressure chamber and discharging a hydraulic pressure from the first pressure chamber. The workpiece is supported by a pair of the cylinder tubes.

A method of manufacturing a resin molded article includes a step of preparing a resin powder having low dust generation property by adding a liquid paraffin to a thermosetting resin, and a step of obtaining a resin molded article by heating and kneading the resin powder having low dust generation property, in which the step of preparing the resin powder having low dust generation property includes a step in which the thermosetting resin is melted and the liquid paraffin is added to the melted thermosetting resin to be stirred and mixed.

Providing a technique for suppressing dust generation at the time of attraction and detachment of an object to be attracted, and for enabling control the attraction force of the attraction device to be uniform. The attraction device of the present invention includes a main body part having attraction electrodes within a dielectric; and an attraction part for attracting a substrate, provided on a surface of the main body part at an attraction-side. The attraction part includes a contact support part that is in contact with, and supports the substrate and a non-contact part that is not in contact with the substrate. In the attraction part, the volume resistivity of the material of the contact support part is greater than the volume resistivity of the material of the non-contact part.

A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and / or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus the useful life of each plane mirror can be prolonged without displacing the optical axis.

A water-absorbing resin composition showing suppressed dusting of an antimicrobial agent and having an antimicrobial activity. A water-absorbing resin composition which contains a water-absorbing resin and an antimicrobial agent comprising an inorganic compound carrying an antimicrobial metal characterized by showing a dusting degree of 100 CPM or less. This water-absorbing resin composition is appropriately usable in sanitary goods such as paper diapers, sanitary pads, incontinence pads, urine-absorbing materials for pet animals, structural materials such as packings, freshness-preserving materials for foods such as drip-absorbers and cooling agents, agricultural / horticultural goods such as water-retention agents for soil and so on.