The invention discloses a chemical mechanical
grinding control method and device, equipment and a storage medium, and the method comprises the steps: obtaining the state information, current task information and next task information of any
grinding chamber, determining whether the
grinding chamber is in a waiting state or not according to the state information of the grinding chamber, and if the grinding chamber is in the waiting state, determining whether the grinding chamber is in the waiting state; if yes, the
maximum duration that the grinding chamber can be in the waiting state is determined according to the current task information and the next task information of the grinding chamber, and when the duration that the grinding chamber is in the waiting state exceeds the
maximum duration, task object protection operation is executed, and the task object protection operation is used for protecting a task object of the grinding chamber. Therefore, the problem that the task object in the grinding chamber is excessively corroded due to the fact that the time of the grinding chamber in the waiting state is long can be avoided.