A catadioptric projection optical system for forming an intermediate image of a first object twice and for forming an image of the intermediate image onto a second object, said catadioptric projection optical system comprising, in order from the first object side and along an optical axis of said catadioptric projection optical system, a first dioptric group that does not form a reciprocating optical system (double-pass optical system) that an incidence light and reflected light pass, said first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group that forms the reciprocating optical system (double-pass optical system), said catadioptric group including a third lens group that forms the reciprocating optical system (double-pass optical system), a second dioptric group that does not form the reciprocating optical system (double-pass optical system), a first deflective reflector that arranges between the first lens group and the second lens group, and a second deflective reflector that arranges between the second lens group and the third lens group or between the second dioptric group and the third lens group.