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34results about How to "Improve RC delay" patented technology

Interconnection line structure and forming method thereof

The invention provides an interconnection line structure and a forming method of the interconnection line structure. The forming method of the interconnection line structure comprises the following steps of: providing a semiconductor substrate, wherein a semiconductor device is formed in the semiconductor substrate; forming an interlayer medium layer on the semiconductor substrate; forming a conductive layer on the interlayer medium layer; after the conductive layer is formed, forming grooves in the conductive layer and the interlayer medium layer, wherein the depth of the grooves is less than a thickness sum of the conductive layer and the interlayer medium layer, and a depth-to-width ratio of the grooves is more than 0.8; after the grooves are formed, depositing intermetallic medium layers, covering the conductive layer and filling the grooves through the intermetallic medium layers, and forming air gaps in the intermetallic medium layers. Compared with the prior art, the height of the grooves comprises the height of the conductive layer and a part of the height of the intermetallic medium layers, so that the depth-to-width ratio of the grooves between the adjacent interconnection lines is increased, the air gaps formed in the intermetallic medium layers inside the grooves are larger, stray capacitance is reduced and even removed, and the properties of the semiconductor device can be improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

A manufacturing method for a semiconductor device

The invention provides a manufacturing method for a semiconductor device. The manufacturing method of the invention comprises the following steps: firstly, a substrate is provided; secondly, a metal layer and a first dielectric layer are sequentially formed on the substrate through a deposition process; thirdly, the first dielectric layer and the metal layer are etched, and metal wires and first dielectric layer patterns on the metal wires are formed, and a part of the substrate is exposed; fourthly, an obstruction material layer is formed through a deposition process on the substrate and the first dielectric layer pattern; fifthly, the obstruction material layer is etched, and at least one obstruction body is formed between the adjacent metal wires; sixthly, a second dielectric layer is formed on the substrate, the first dielectric layer patterns, and the obstruction body, and gaps are formed between the metal wires and the obstruction body and / or in the second dielectric layer between the adjacent obstruction bodies. Through the adoption of the above method, the gaps can be formed in the second dielectric layer between the metal wires, and the dielectric constant of the second dielectric layer can be effectively reduced. A parasitic capacitance between the metal wires can be reduced and the condition of a RC delay of the interconnected metal wires is improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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