The invention discloses a LTCC-based planar
transformer and a manufacturing method thereof. The method comprises the following steps: S1, preparing an upper substrate, a lower substrate and a plurality of middle substrates, which all employ an LTCC (Low Temperature Co-Fired
Ceramic) material raw
ceramic chip with the first magnetic
conductivity; S2, forming a hole in at least one middle substrate;S3, manufacturing primary and secondary
electrode patterns on the plurality of middle substrates, and performing the filling of the holes to form a plurality of
electrode layers; S4, putting an LTCCmaterial with second magnetic
conductivity in areas where the primary electrodes and the secondary electrodes of the plurality of
electrode layers are mutually inducted and overlapped to form a plurality of filling electrode
layers, wherein the second magnetic
conductivity is greater than the first magnetic conductivity; S5, laminating the plurality of filling electrode layers, the upper substrateand the lower substrate, and carrying out glue discharging and
sintering to form the LTCC planar
transformer, in which the LTCC material with the first magnetic conductivity and the LTCC material with the second magnetic conductivity are co-fired and then tightly combined to form an intermediate magnetic conductivity material with the magnetic conductivity being between the first magnetic conductivity and the second magnetic conductivity. The
coupling coefficient of a planar
transformer can be effectively improved, and the primary
leakage inductance and the secondary
leakage inductance of theplanar transformer are reduced.