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46results about How to "Facilitate delivery" patented technology

Gas-liquid two-phase atomization cleaning device and cleaning method

The invention provides a gas-liquid two-phase atomization cleaning device and relates to the technical field of the semiconductor chip technology. The gas-liquid two-phase atomization cleaning device comprises a gas pipeline, a liquid pipeline and a gas-liquid two-phase atomization nozzle, one end of the gas pipeline and one end of the liquid pipeline are arranged on a swing arm while the other end of the gas pipeline and the other end of the liquid pipeline are communicated with the gas-liquid two-phase atomization nozzle to form atomization particles, and the swing arm drives the gas-liquid two-phase nozzle to reciprocate in a circular arc manner between the edge and the center of a wafer. High-speed liquid flow and high-speed gas flow are sufficiently acted through a gas-liquid two-phase atomization nozzle structure, superfine atomized droplets uniform in particle size are formed by adjusting gas flow rate and liquid flow rate of small flow rate, the superfine atomized droplets are sprayed on the surface of the wafer after being accelerated through the high-speed gas flow, and cleaning is completed. By the arrangement, transferring of impurities in troughs to a main flow body is promoted, efficiency in cleaning is improved, cleaning effect is improved, and damage to the surface structure of the wafer is reduced due to small quality of the atomization particles.
Owner:BEIJING SEVENSTAR ELECTRONICS CO LTD

Preparation method of three-dimensional ordered mesoporous MOF material

ActiveCN110600699AFacilitate deliveryOvercoming the low charge-discharge specific capacitySecondary cellsNegative electrodesSolventTube furnace
The invention relates to a preparation method of a three-dimensional ordered mesoporous MOF material. The preparation method comprises the following steps of: the step A, preparing polystyrene PS microspheres; the step B, preparing a three-dimensional ordered mesoporous zif8 material; B1, dispersing a proper amount of zinc nitrate hexahydrate into methanol to obtain a solution A, dispersing a proper amount of 2-methylimidazole into methanol to obtain a solution B, adding the solution B into the solution A, adding 1-2g of PS microspheres obtained in the step A for uniform stirring, sealing, standing and aging; B2, sequentially adopting methanol and ethanol as solvents after centrifuging, and respectively washing for three times; drying the solid and liquid to obtain a 3Dzif8 material with an ordered mesoporous structure; the step C, carbonizing the 3Dzif8 material; putting the 3Dzif8 material in the step B2 into a tubular furnace, performing carbonizing at a high temperature in Ar/H2 mixed gas, and performing cooling to a room temperature to obtain the CNT-3Dzif8. According to the preparation method, the 3D ordered zif8 material is prepared by adoption of a template method, and thethree-dimensional ordered ZnS material is prepared after carbonization, so that the electrochemical performance of the lithium ion battery is improved.
Owner:INT ACAD OF OPTOELECTRONICS AT ZHAOQING SOUTH CHINA NORMAL UNIV
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