The embodiment of the invention provides a
semiconductor wafer Mask ultra-high-cleanliness mute intelligent storage warehouse, and relates to the technical field of
semiconductor manufacturing auxiliary equipment, the
semiconductor wafer Mask ultra-high-cleanliness mute intelligent storage warehouse comprises a stacking
station main body, a storage box body and a sliding guide mechanism, a storage cavity used for containing the storage box body is formed in the stacking
station main body, and a high-efficiency
air filter is arranged at the top of the storage cavity; the inner sides of the rims are in
interference fit with flanges on the two sides of the I-shaped sliding rail, the magnitude of interference gradually changes in the length direction of the sliding rail, the storage box is of a double-layer hollow structure, a miniature constant-temperature and constant-
humidity unit is installed on the inner wall of the box, and an intelligent monitoring module is further arranged on the stacking
station body. And the intelligent monitoring module comprises a dust sensor arranged in the storage box body and a central controller arranged on the stacking station main body. The sliding mechanism has the effects of sliding stability, ultrahigh cleanliness and
low noise.