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Flexible tactile sensor array and preparation method thereof

The invention discloses a flexible tactile sensor array and a preparation method thereof. The flexible tactile sensor array comprises a flexible substrate and a tactile sensing array. The tactile sensing array comprises N * M tactile sensing units and an interconnection line network; the tactile sensing unit is a grid-shaped metal foil wrapped and packaged by a conformal polymer, and an in-situ hard micro-column array is integrated on each grid-shaped metal foil; the interconnection line network comprises N row lines and M column lines which are vertically crossed, the row lines and the columnlines are insulated from each other by crossed insulating pads, and the row lines and the column lines are wrapped and packaged by the conformal polymers; and the flexible substrate and the tactile sensing array are bonded into a whole. According to the invention, the in-situ hard micro-column extrusion grid-shaped metal foil structure is constructed according to the mechanism that the resistanceof the metal foil is changed under pressure, and a novel tactile sensor array is constructed by combining the in-situ hard micro-column extrusion grid-shaped metal foil structure as a tactile sensingunit with the interconnection line network; and the novel tactile sensor array has the advantages of high stability, high sensitivity, low hysteresis, high integration level and the like.
Owner:ZHEJIANG UNIV
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