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45results about How to "Reduce field curvature" patented technology

Laser co-focusing micro-endoscope

The invention discloses a novel laser confocal microscopic endoscope with high resolution, a telescopic image transmission system is used for replacing optical fiber bundles or a single optical fiber, the laser is coupled into a tissue in vivo, a reflected light or a fluorescent signal is coupled into a detector in vitro, a fluorescent image with high resolution and contrast is obtained, meanwhile an endoscope probe diameter is reduced; a confocal scanning mechanism is arranged in vitro, the high performance confocal scanning is obtained, meanwhile the dimension of the endoscope probe can not be increased, and the confocal scanning mechanism is compatible with an existing hard tube endoscope, thereby implementing the high-performance histopathology diagnosis in vivo.
Owner:ZHEJIANG UNIV

Photographic optical system

ActiveCN105676422AReasonable correction of spherical aberrationDoes not introduce chromatic aberrationOptical elementsIlluminancePhysics
The invention provides a photographic optical system. The photographic optical system sequentially comprises a first lens (focal length being f1), a second lens (focal length being f2), a third lens (focal length being f3), a fourth lens (focal length being f4), a fifth lens (focal length being f5), a sixth lens (focal length being f6) and a seventh lens (focal length being f7) which are coaxially arranged from an object side to an image side, wherein the first lens has negative focal power and an object side surface being a convex surface; and the seventh lens has negative focal power, and satisfies the following conditions: -1.5<f1 / f<-0.5, 1.0<f2 / f<2.5, 0.5<f3 / f<1.5 , -2.5<f4 / f<-0.5, -10<f5 / f<-2, 0.2<f6 / f<1.2, -2.5<f7 / f<-0.4, wherein f is the focal length of the entire system. The photographic optical system with large relative aperture provided by the invention is designed through reasonable surface form optimization, focal power allocation and optical material selection, can provide imaging performance in a low illumination environment, and is clear in imaging.
Owner:RUISHENG OPTOELECTRONICS TECH SUZHOU CO LTD

Inspection Apparatus, Lithographic Apparatus, and Device Manufacturing Method

An inspection apparatus includes an illumination system that receives a first beam and produces second and third beams from the first beam and a catadioptric objective that directs the second beam to reflect from a wafer. A first sensor detects a first image created by the reflected second beam. A refractive objective directs the third beam to reflect from the wafer, and a second sensor detects a second image created by the reflected third beam. The first and second images can be used for CD measurements. The second beam can have a spectral range from about 200 nm to about 425 nm, and the third beam can have a spectral range from about 425 nm to about 850 nm. A third sensor may be provide that detects a third image created by the third beam reflected from the wafer. The third image can be used for OV measurements.
Owner:ASML HLDG NV

Eyepiece system and head-mounted display device

The invention discloses an eyepiece system and a head-mounted display device. The eyepiece system a spherical display screen and a Fresnel lens which are sequentially arranged along the incident direction of light; the center line of the spherical display screen is overlapped with a horizontal line where the optical axis of the Fresnel lens is located; the spherical display screen protrudes towards the Fresnel lens; and the Fresnel lens is provided with a first surface protruding towards a light path diaphragm and a second surface protruding towards the spherical display screen. According to the eyepiece system provided by the technical schemes of the invention, a Fresnel lens and spherical display screen-combined technical means is adopted; the surface shapes of the Fresnel lens are reasonably set, so that the focal power of the eyepiece system can be shared, and the astigmatism of the system can be reduced; and the spherical display screen is set reasonably, so that the curvature of field of the system can be decreased, and edge imaging quality can be improved.
Owner:BEIJING PICO TECH

Large-visual-field-angle high-image-quality eyepiece optical system and head-mounted display device

The invention relates to a large-visual-field-angle high-image-quality eyepiece optical system and a head-mounted display device. The large-visual-field-angle high-image-quality eyepiece optical system comprises a first lens group and a second lens group which are coaxially and sequentially arranged from a human eye to an image source along an optical axis direction, wherein the first lens group and the second lens group satisfy a certain focal length relationship. The effective focal length of the first lens group is a negative value, and the first lens group is composed of a first lens close to the human eye and a second lens away from the human eye. The effective focal length of the second lens group is a positive value, and the second lens group is composed of one or two pieces of lenses. The first lens is in a biconvex shape, the optical surface, close to the human eye, of the second lens is recessed towards the human eye, and the first lens and the second lens are each of an aspheric surface type. The distance between the first lens and the second lens, a focal length relationship between lenses in the second lens group, and material characteristics of the lenses satisfy certain relationships, and the second lens group further comprises a fourth lens. The large-visual-field-angle high-image-quality eyepiece optical system has the advantages of large aperture, large field of view, high resolution, low distortion, small size and the like, and is suitable for the head-mounted display and similar devices.
Owner:SHENZHEN NED OPTICS CO LTD

Optical module and head-mounted display device

The invention discloses an optical module and a head-mounted display device, the optical module comprises a display, a cemented lens, a light splitting member, a quarter-wave plate and a polarization reflection film, wherein the display emits light for imaging display; the cemented lens is arranged in the light emitting direction of the display and comprises a first lens and a second lens, the first lens and the second lens are sequentially arranged in the propagation direction of a light path, the second surface of the first lens and the third surface of the second lens are arranged in a cemented mode, and the third surface protrudes towards the direction of the display. The fourth surface of the second lens protrudes towards the direction away from the display; the light splitting member is arranged on the first surface of the first lens; the quarter-wave plate is arranged between the first lens and the second lens; the polarization reflection film is arranged between the quarter-wave plate and the second lens. According to the technical scheme, the total optical length of the optical system can be reduced, the size of the head-mounted display device is reduced, and a user can wear the head-mounted display device conveniently.
Owner:GOERTEK OPTICAL TECH CO LTD

Long-focus type panoramic annular imaging lens

The invention provides a long-focus type panoramic annular imaging lens. The long-focus type panoramic annular imaging lens is totally composed of eleven spherical lenses, and comprises a panoramic annular lens assembly and a transferring lens assembly. The panoramic annular lens assembly comprises a first lens, a second lens and a third lens coaxial and arranged sequentially from an object space to an image space, and is of a triplet panoramic annular lens structure. The transferring lens assembly is composed of eight lens including a negative meniscus lens, a positive lens and two doublets. The long-focus type panoramic annular imaging lens satisfies f-theta object-image relation, and has the advantages of high resolution, super large field of view (360 degrees in the horizontal direction and 60 degrees in the vertical direction), high imaging quality and the like; adopted glass is ordinary optical glass excluding special glass and calcium fluoride; the lens structure is good in manufacturability to the benefit of processing and reduction of cost.
Owner:CHINA JILIANG UNIV

Off-axis catadioptric projection optical system for lithography

The present invention is directed to off-axis catadioptric projection optical systems for use in lithography tools for processing modulated light used to form an image on a substrate, such as a semiconductor wafer or flat panel display. In one embodiment the optical system includes an off-axis mirror segment, a fold mirror, a relay, an aperture stop and a refractive lens group. Modulated light is transmitted through the system to form an image on a substrate. In a second embodiment the projection system includes an off-axis mirror segment, an aperture stop and a refractive lens group. In a third embodiment the projection system includes an off-axis mirror segment, a negative refractive lens group, a concave mirror, a relay, an aperture stop, and a refractive lens group. A method to produce a device using a lithographic apparatus including a projection system with an off-axis mirror segment as the first element in a projection optics system is also provided.
Owner:ASML HLDG NV

Internal reflection type catadioptric panoramic imaging lens

The invention provides an internal reflection type catadioptric panoramic imaging lens. The internal reflection type catadioptric panoramic imaging lens comprises a catadioptric mirror group and a relay mirror group which are arranged in sequence. The catadioptric mirror group includes a first catadioptric lens and a second catadioptric lens which are arranged coaxially and arranged sequentially along a direction from the catadioptric mirror group to the relay mirror group, and the first catadioptric lens and the second catadioptric lens are connected by a connecting surface. Full-view ultra-wide-angle imaging is realized. An appropriate angle magnification is provided to expand the field of view. The catadioptric mirror group is a lens group, and can bear greater vertical field of view and relative aperture. The field of view and the aperture of the lens are large. The long after-work distance ensures the installation space of other parts. Moreover, the lens has the effects of compact structure, small size, and easy installation.
Owner:吉林省中业光电技术有限公司

Five-lens type image lens and electronic device applying same

The invention discloses a five-lens type image lens and an electronic device applying the same. The image lens sequentially comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens made of plastic material from an object side to an image side. The first lens has a positive reflective index and a convex surface located at the object side; the second lens has a negative reflective index and a concave surface located at the image side; the third lens is a biconvex lens; the fourth lens is a meniscus lens and has a convex surface located at the image side; and the fifth lens is provided with a concave surface which is located at the image side and is adjacent to the region of an optical axis. The lens is made of the plastic material, therefore, the requirements for light weight and low manufacturing cost can be met; and due to the design of the five-lens type image lens, the luminous flux can be increased, the signal to noise ratio and the light absorption angle can be increased, and the field angle can be amplified, therefore, the five-lens type image lens can maintain high optical quality and meet the practical requirement.
Owner:GENIUS ELECTRONICS OPTICAL CO LTD

Catadioptric eyepiece optical system and head-mounted display device

The invention relates to a catadioptric eyepiece optical system and a head-mounted display device. The system comprises an optical polaroid, a first phase retardation film, a first lens group, a second lens group, a third lens group, a second phase retardation film and a linear polaroid which are sequentially arranged from a human eye observation side to a micro image display along an optical axisdirection, each of the first lens group, the second lens group and the third lens group comprises one or more lenses; a unique semi-transparent and semi-reflective optical surface is arranged betweenthe first phase retardation film and the second phase retardation film; the semi-transparent and semi-reflective optical surface is arranged on one optical surface of the first lens group, the secondlens group or the third lens group; the first lens group and the third lens group are positive focal power lens groups; the second lens group is a negative focal power lens group; the system realizesoptical indexes such as large field angle, low distortion, low chromatic aberration, low field curvature, low astigmatism and the like, and is compact in size, light in weight and convenient to wearon the head.
Owner:SHENZHEN NED OPTICS CO LTD

Large-field-angle eyepiece optical system and head-mounted display device

The invention relates to a large-field-angle eyepiece optical system and a head-mounted display device, and the system comprises a first lens group, a second lens group and a third lens group, which are coaxially and sequentially arranged from a human eye observation side to a miniature display side in the direction of an optical axis. The optical focal lengths of the first lens group, the second lens group and the third lens group are positive, negative and positive combinations; the first lens group is composed of two optical lenses, namely a first lens close to the human eye side and a second lens far away from the human eye side; the first lens group comprises at least two Fresnel optical surfaces; the first lens comprises at least one Fresnel optical surface; the second lens group comprises a third lens and a fourth lens which are adjacent to the first lens group and are sequentially arranged along the optical axis; the third lens and the fourth lens are negative lenses; the third lens group is composed of an optical lens; the third lens group comprises a fifth lens; the fifth lens is a positive lens; and the large-field-angle eyepiece optical system has the advantages of large field angle, high image quality, low distortion, small field curvature, small size and the like.
Owner:SHENZHEN NED OPTICS CO LTD

Large-field-angle eyepiece optical system and head-mounted display device

The invention relates to a large-field-angle eyepiece optical system and a head-mounted display device, and the system comprises a first lens group, a second lens group and a third lens group, which are coaxially and sequentially arranged from a human eye observation side to a miniature image display side in the direction of an optical axis. The effective focal lengths of the first lens group, the second lens group and the third lens group are positive, negative and positive combinations; the first lens group comprises a first lens close to the human eye side and a second lens far away from the human eye side; the first lens group comprises at least two Fresnel optical surfaces; the first lens comprises at least one Fresnel optical surface; the second lens group comprises third lenses which are adjacent to the first lens group and are sequentially arranged along the optical axis; the third lens is a negative lens; the third lens group comprises a fourth lens and a fifth lens which are adjacent to the second lens group and are sequentially arranged along the optical axis; the fourth lens is a positive lens; the fifth lens is a negative lens; and the system can realize the indexes of large field angle, high image quality, low distortion, small field curvature, small volume and the like.
Owner:SHENZHEN NED OPTICS CO LTD

Ultra-wide-angle lens and imaging equipment

ActiveCN113031230AImprove thermal stabilityGood aberration correctionOptical elementsOphthalmologyOptical axis
The invention discloses an ultra-wide-angle lens and imaging equipment, and the ultra-wide-angle lens sequentially comprises,from an object side to an imaging surface along an optical axis, a first lens with negative focal power, wherein the object side surface of the first lens is a convex surface, and the image side surface of the first lens is a concave surface; a second lens with negative focal power, wherein the object side surface and the image side surface of the second lens are concave surfaces; a third lens with positive focal power, wherein the object side surface and the image side surface of the third lens are convex surfaces; a fourth lens with positive focal power, wherein the object side surface and the image side surface of the fourth lens are convex surfaces; a diaphragm; a fifth lens with positive focal power, wherein the object side surface and the image side surface of the fifth lens are convex surfaces; a sixth lens with negative focal power, wherein the object side surface and the image side surface of the sixth lens are concave surfaces, and the fifth lens and the sixth lens form a bonding body; and a seventh lens with positive focal power, wherein the object side surface and the image side surface of the seventh lens are convex surfaces near the axis. The ultra-wide-angle lens has the advantages of ultra wide angle, small temperature drift, low chromatic aberration and high resolution.
Owner:合肥联创光学有限公司

Optical imaging lens and imaging equipment

The invention discloses an optical imaging lens and imaging equipment, and the optical imaging lens sequentially comprises, from an object side to an imaging surface along an optical axis: a first lens with negative focal power, wherein the object side surface of the first lens is a convex surface, and the image side surface of the first lens is a concave surface; a second lens with positive focal power, wherein the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a convex surface or a concave surface; a diaphragm; a third lens with positive focal power, wherein the object side surface of the third lens is a concave surface, and the image side surface of the third lens is a convex surface; a cemented lens group with positive focal power, wherein the cemented lens group is formed by bonding a fourth lens and a fifth lens; a sixth lens with positive focal power, wherein the object side surface of the sixth lens is a convex surface, and the image side surface of the sixth lens is a concave surface; an optical filter; the first lens, the second lens, the third lens, the fourth lens and the fifth lens are all glass spherical lenses, and the sixth lens is a glass aspheric lens. The optical imaging lens can correct aberration of an edge field of view, and provides a higher-quality imaging effect.
Owner:JIANGXI LIANCHUANG ELECTRONICS CO LTD

Large-field-angle eyepiece optical system and head-mounted display device

The invention relates to a large-field-angle eyepiece optical system and a head-mounted display device, and the system comprises a first lens group, a second lens group and a third lens group, which are coaxially and sequentially arranged from a human eye observation side to a miniature image display side in the direction of an optical axis. The effective focal lengths of the first lens group, the second lens group and the third lens group are positive, negative and positive combinations; the first lens group comprises a first lens close to the human eye side and a second lens far away from the human eye side; the first lens group comprises at least two Fresnel optical surfaces; the first lens comprises at least one Fresnel optical surface; the second lens group includes a third lens adjacent to the first lens group; the third lens is a negative lens; the third lens group comprises a fourth lens, a fifth lens and a sixth lens which are adjacent to the second lens group and are sequentially arranged along the optical axis; the fourth lens and the sixth lens are positive lenses; the fifth lens is a negative lens; and the system simultaneously realizes indexes such as large field angle, high image quality, low distortion, small field curvature, small volume and the like.
Owner:SHENZHEN NED OPTICS CO LTD

Eyepiece optical system with large field of view and high image quality and head-mounted display device

The invention relates to an eyepiece optical system with large field angle and high image quality and a head-mounted display device. The eyepiece optical system with large field angle and high image quality comprises a first lens group and a second lens group, which are coaxially and sequentially arranged along an optical axis from a human eye to an image source and satisfy a certain focal length relationship. The first lens group is composed of a first lens near the human eye and a second lens far away from the human eye. The second lens group is composed of one or two lenses. The first lens is biconvex. The optical surface, near the human eye, of the second lens is concave towards the human eye, and is aspheric. The spacing between the first lens and the second lens, the focal length relationship between the lenses in the second lens group and the materials of the lenses satisfy a certain relationship. The second lens group further includes a fourth lens and a fifth lens arranged separately. The eyepiece optical system of the invention has the advantages of large aperture, large field of view, high resolution, low distortion, small size, and the like, and is suitable for head-mounted displays and similar devices.
Owner:SHENZHEN NED OPTICS CO LTD

Large-field-angle eyepiece optical system and head-mounted display device

The invention relates to a large-field-angle eyepiece optical system and a head-mounted display device, and the system comprises a first lens group, a second lens group and a third lens group, which are coaxially and sequentially arranged from a human eye observation side to a miniature image display side in the direction of an optical axis. The effective focal lengths of the first lens group, the second lens group and the third lens group are positive, negative and positive combinations; the first lens group comprises a first lens close to the human eye side and a second lens far away from the human eye side; the first lens group comprises at least two Fresnel optical surfaces; the first lens comprises at least one Fresnel optical surface; the second lens group comprises a third lens and a fourth lens which are sequentially arranged along the optical axis; the third lens and the fourth lens are negative lenses; the third lens group comprises a fifth lens, a sixth lens and a seventh lens which are sequentially arranged along the optical axis; the fifth lens and the seventh lens are positive lenses; the sixth lens is a negative lens; and an observer observes a full-frame high-definition, distortion-free and uniform-image-quality picture, and high-telepresence visual experience is achieved.
Owner:SHENZHEN NED OPTICS CO LTD

Optical lens, camera module, electronic equipment and automobile

The invention discloses an optical lens, a camera module, an electronic device and an automobile, the optical lens comprises a first lens with negative refractive power which is sequentially arranged from an object side to an image side along an optical axis, and the object side surface and the image side surface of the first lens are respectively a convex surface and a concave surface; a second lens element with negative refractive power having a concave image-side surface; the third lens element with positive refractive power has a convex object-side surface and a convex image-side surface. The fourth lens element with positive refractive power has a convex object-side surface and a convex image-side surface. The fifth lens element with negative refractive power has a concave object-side surface and a convex image-side surface, respectively. The sixth lens element with positive refractive power has a convex object-side surface and a convex image-side surface. The optical lens meets the requirement of 3mm lt; f * tan (FOV / 2) lt; 4 mm. According to the optical lens, the camera module, the electronic equipment and the automobile provided by the invention, the miniaturization of the optical lens can be realized, the characteristics of large aperture and wide angle can be realized, and the imaging definition is improved.
Owner:JIANGXI JINGCHAO OPTICAL CO LTD

Catadioptric ultra-wide-angle imaging system

The invention provides a catadioptric ultra-wide-angle imaging system comprising a camera system, a circuit system, and a mechanical system. The camera system, the circuit system, and the mechanical system are connected mutually. The camera system consists of a catadioptric lens group, a relay lens group and an image surface; the relay lens group and the catadioptric lens group are arranged coaxially; and a catadioptric first lens and a catadioptric second lens are connected by a connecting surface. With the system, ultra-wide-angle view finding can be realized. Because the catadioptric lens group employs the lens group, bearing of the large vertical view field and the large relative aperture can be realized. Moreover, the system with a compact structure can be installed conveniently.
Owner:吉林省中业光电技术有限公司

Imaging lens

The invention relates to an imaging lens which comprises a first lens group (G1) with positive focal power, a diaphragm, a second lens group (G2) with positive focal power and a third lens group (G3)with positive focal power or negative focal power which are sequentially arranged from an object side to an image side, and the third lens group (G3) is a fixed group. The first lens group (G1) and the second lens group (G2) form a focusing group capable of moving along an optical axis. The imaging lens is arranged according to the limitations, and can realize the characteristics of large aperture, high resolution, low distortion, uniform image quality, large depth of field, good color rendition degree and high contrast ratio.
Owner:舜宇光学(中山)有限公司

Off-axis catadioptric projection optical system for lithography

An off-axis catadioptric projection optical systems for use in lithography tools for processing modulated light used to form an image on a substrate is provided. In one embodiment the optical system includes an off-axis mirror segment, a fold mirror, a relay, an aperture stop and a refractive lens group. Modulated light is transmitted through the system to form an image on a substrate. In a second embodiment the projection system includes an off-axis mirror segment, an aperture stop and a refractive lens group. In a third embodiment the projection system includes an off-axis mirror segment, a negative refractive lens group, a concave mirror, a relay, an aperture stop, and a refractive lens group. A method to produce a device using a lithographic apparatus including a projection system with an off-axis mirror segment as the first element in a projection optics system is also provided.
Owner:ASML HLDG NV

Wide angle optical lens

InactiveCN103487918AImprove optical transfer functionReduce aberrationOptical elementsCamera lensImaging quality
The invention belongs to an optical system, and particularly relates to a wide angle optical lens which is wide in spectrum and high in image quality. The wide angle optical lens comprises a window, a first lens, a second lens, a third lens, a fourth lens, a diaphragm, a fifth lens, a sixth lens, a seventh lens and an eighth lens, wherein the window, the first lens, the second lens, the third lens, the fourth lens, the diaphragm, the fifth lens, the sixth lens, the seventh lens and the eighth lens are coaxial with one another; the window, the lenses and the diaphragm are connected through a lens cone. Compared with the prior art, the wide angle optical lens has the advantages that by reasonably selecting the surface radius, thickness, distance and materials of the lenses, the image plane illuminance and an optical transfer function are increased, all kinds of lens aberrations, spherical aberrations, coma aberrations, astigmatism, field curvature, chromatic aberrations and distortion are reduced, and the wavelength range is broadened.
Owner:THE 3RD ACAD 8358TH RES INST OF CASC

Shooting optical lens

The invention relates to a field of an optical lens and discloses a shooting optical lens. The shooting optical lens comprises an aperture, a first lens having positive refraction power, a second lens having negative refraction power, a third lens having positive refraction power, a fourth lens having negative refraction power and a fifth lens having negative refraction power, wherein the shooting optical lens further satisfies expressions as follows, 0.45<f1 / f<0.55, 0.85<f2 / f< 0.75, 2.0<f3 / f<2.3, 3.4<f4 / f< 3, 1.3<f5 / f< 1.1 and 0.2<f2 / f4<0.3 . The shooting optical lens is advantaged in that design demands of low TTL and large aperture can be satisfied, and excellent sensitivity is realized.
Owner:AAC OPTICS SOLUTIONS PTE LTD

Imaging lens

The invention relates to an imaging lens which comprises a first lens group (G1) with positive focal power, a diaphragm (STOP) and a second lens group (G2) with positive focal power which are sequentially arranged from an object side to an image side, the first lens group (G1) is a fixed group, and the second lens group (G2) is a focusing lens group capable of moving along an optical axis; the first lens group (G1) comprises at least three positive focal power lenses and two negative focal power lenses. The imaging lens provided by the invention can realize the characteristics of large aperture, high resolution, low distortion, uniform image quality, wide working object distance range, good color rendition degree and high contrast ratio.
Owner:舜宇光学(中山)有限公司

Photosensitive chip assembly, mobile terminal, camera module and preparation method thereof

ActiveCN113132585AReduce field curvatureCounteract or reduce bulge towards the front of the photosensitive chipTelevision system detailsColor television detailsPhysicsChipset
The invention discloses a photosensitive chip assembly, and a camera module and a mobile terminal using the photosensitive chip assembly. The photosensitive chip assembly comprises a photosensitive chip which is provided with a photosensitive area and a non-photosensitive area located at the edge of the photosensitive area, wherein the photosensitive area receives light reaching the front face of the photosensitive chip; a stress film which is attached to the back face of the photosensitive chip and has a preset thickness, wherein the stress generated in the stress film enables the photosensitive area of the photosensitive chip to deform towards the back face of the photosensitive chip. According to the photosensitive chip disclosed by the invention, the stress film is plated on the back surface of the photosensitive chip, and the stress generated by the stress film enables the photosensitive chip to deform towards the back surface of the photosensitive chip, so that the condition that the central area or the photosensitive area of the photosensitive chip protrudes towards the front surface of the photosensitive chip after the heating and curing process of the camera module is counteracted or reduced; and the phenomenon of poor photographing quality caused by field curvature is reduced. The invention also utilizes the photosensitive chip assembly to manufacture a camera module.
Owner:NINGBO SUNNY OPOTECH CO LTD

Low-distortion large-field image space telecentric optical device in

InactiveCN102360115ALow distortion throughout the field of viewMeet measurement needsOptical elementsFiber bundleLow distortion
The invention relates to a low-distortion large-field image space telecentric optical device using an aspheric surface technology. The low-distortion large-field image space telecentric optical device comprises a first negative lens, a lens screen, a first positive lens, a second positive lens and a second negative lens which are sequentially arranged on the same light path, wherein the second positive lens and the second negative lens are glued, and the first surface of the first positive lens is an evenorder aspheric surface. The invention provides a front imaging device being designed aiming at 660 nano glow illumination and being capable of meeting high-precision measurement and full-filed illumination uniformity requirement and being applied to an optical fiber coherent fiber bundle.
Owner:ANHUI UNIVERSITY OF TECHNOLOGY

Inspection apparatus, lithographic apparatus, and device manufacturing method

An inspection apparatus includes an illumination system that receives a first beam and produces second and third beams from the first beam and a catadioptric objective that directs the second beam to reflect from a wafer. A first sensor detects a first image created by the reflected second beam. A refractive objective directs the third beam to reflect from the wafer, and a second sensor detects a second image created by the reflected third beam. The first and second images can be used for CD measurements. The second beam can have a spectral range from about 200 nm to about 425 nm, and the third beam can have a spectral range from about 425 nm to about 850 nm. A third sensor may be provide that detects a third image created by the third beam reflected from the wafer. The third image can be used for OV measurements.
Owner:ASML HLDG NV
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