This application provides a spot detection control method, device, and spot detection
system, which are applied to spot detection
control equipment. First, according to the change information between the
laser spot sizes corresponding to different positions on the main
optical axis when the
laser emitted by the
laser is transmitted to these positions, the spot analyzer is controlled to move to the
focal position on the main
optical axis; then, the spot detection result of the laser is determined based on the first spot information collected by the spot analyzer at the
focal position. The first spot information includes at least one of spot size, spot shape, and
spot intensity data. This realizes the automatic real-time movement adjustment of the spot analyzer, ensures the accuracy of movement adjustment, improves the efficiency of moving the spot analyzer to the
focal position, and thus enhances the detection efficiency of the detection result.