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37results about How to "Reduce collector resistance" patented technology

Germanium-silicon heterojunction bipolar transistor (HBT) single tube structure, manufacture method thereof and germanium-silicon HBT multi-finger structure

The invention discloses a germanium-silicon heterojunction bipolar transistor (HBT) single tube structure. A collector region C is manufactured through a low-doping N type epitaxy technique, and the bottom of the collector region C is extracted by a heavy N type doping buried layer; a base region B is composed of a boron heavy doping germanium-silicon epitaxial layer; a transmitting region E is formed by etching media deposited on the base region to form a window and then depositing N type doping polycrystalline silicon; an N type epitaxy at the bottom of field oxide under outer base region polycrystalline silicon is converted to a P type region through P type ion injection and high-temperature annealing; and a collector electrode is extracted by a deep groove contact hole and metals. The invention further discloses a multi-finger structure in a CBEBE...BEBC or CEBECBE...CEBEC mode. The deep groove contact hole penetrates through the field oxide and the N type epitaxy to penetrate into the N type buried layer, the space of two transmitting electrodes can be greatly reduced, the collector resistance of device is reduced, and junction capacitance of the collector electrode for the base region and a silicon substrate is reduced. A P type ion injection region is not communicated with a P type ion injection region arranged outside the device, so that base electrode-collector electrode medium capacitance is reduced. The multi-finger structure can obtain the largest output power and power gain.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Vertical parasitic PNP transistor in silicon-germanium BICMOS (Bipolar Complementary Metal Oxide Semiconductor) technique and fabrication method

The invention discloses a vertical parasitic PNP transistor in the silicon-germanium BICMOS technique. A groove which is in contact with a base region is formed in a shallow trench field oxide around the base region, the depth of the groove is smaller than or equal to the depth of the base region, polycrystalline silicon is filled in the groove and doped with N-type dopant, the polycrystalline silicon doped with the N-type dopant is formed into an outer base region, which is in contact with the side of the base region, and a metal contact is formed on the outer base region, and leads out a base. The invention also discloses a fabrication method for the vertical parasitic PNP transistor in the silicon-germanium BICMOS technique. The vertical parasitic PNP transistor can be used as an output device in a high-speed, high-gain HBT (heterojunction bipolar transistor) circuit, so that one more type of device is provided as an option for the circuit, the area of the device can be effectively reduced, the parasitic effect of the device can be effectively decreased, the collector resistance of the PNP transistor can be effectively decreased, and the performance of the device can be effectively enhanced; and the method does not need additional process conditions, and can reduce the production cost.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

SiGe hbt single tube structure, its manufacturing method and SiGe hbt multi-finger structure

The invention discloses a germanium-silicon heterojunction bipolar transistor (HBT) single tube structure. A collector region C is manufactured through a low-doping N type epitaxy technique, and the bottom of the collector region C is extracted by a heavy N type doping buried layer; a base region B is composed of a boron heavy doping germanium-silicon epitaxial layer; a transmitting region E is formed by etching media deposited on the base region to form a window and then depositing N type doping polycrystalline silicon; an N type epitaxy at the bottom of field oxide under outer base region polycrystalline silicon is converted to a P type region through P type ion injection and high-temperature annealing; and a collector electrode is extracted by a deep groove contact hole and metals. The invention further discloses a multi-finger structure in a CBEBE...BEBC or CEBECBE...CEBEC mode. The deep groove contact hole penetrates through the field oxide and the N type epitaxy to penetrate into the N type buried layer, the space of two transmitting electrodes can be greatly reduced, the collector resistance of device is reduced, and junction capacitance of the collector electrode for the base region and a silicon substrate is reduced. A P type ion injection region is not communicated with a P type ion injection region arranged outside the device, so that base electrode-collector electrode medium capacitance is reduced. The multi-finger structure can obtain the largest output power and power gain.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Vertical parasitic PNP transistor and manufacturing method thereof in germanium silicon heterojunction bipolar transistor (HBT) technology

The invention discloses a vertical parasitic PNP transistor in a germanium silicon heterojunction bipolar transistor (HBT) technology. A groove contacted with a base region is formed in shallow groove field oxygen in the circumference of the base region, the depth of the groove is smaller than or equal to that of the base region, polycrystalline silicon mixed with N type impurities is filled in the groove, a outer base region is formed by the polycrystalline silicon mixed with N type impurities, the outer base region are contacted with the base region on the sides of the base region, metal is arranged on the outer base region, and the metal is contacted with a base electrode and leads the base electrode out. The invention further discloses a manufacturing method of the vertical PNP transistor in the germanium silicon HBT technology. The vertical PNP transistor in the germanium silicon HBT technology can be used as an output component in a high speed and high gain HBT circuit, and thus one more component choice is supplied for the circuit, the size of a component, the parasitic effect of the component and the collector resistance of the PNP transistor are effectively reduced, the performance of the component is improved, and production lost can be reduced due to the fact that according to the manufacturing method of the vertical PNP transistor in the germanium silicon HBT technology, no extra technological conditions are needed.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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