The invention discloses a spectrum
confocal measurement
system calibrating device and calibrating method. The spectrum
confocal measurement
system calibrating device comprises a
tunable laser, a double-
branch optical fiber, an
optical fiber emergent
light beam, a dispersion object lens, a dispersion object lens emergent
light beam, an object to be detected, a displacement table, a
spectrometer and a computer. The spectrum
confocal measurement
system calibrating method comprises steps of recording a position of a detected object, on which a displacement is applied, through a displacement sensor, setting an output
wavelength range of the
tunable laser to enable the
tunable laser to successively emit monochromatic
laser beams covering a working waveband of the dispersion object lens, recording the size of the
wavelength of the
laser beam emitted by the tunable
laser in the current
lambda and a spectrum
signal having a biggest amplitude in the
spectrometer and a pixel number n corresponding to a
peak value position of the spectrum
signal, and establishing a relation between a
wavelength and displacement of the detected object through a correspondence relation between the n and the
lambda. The spectrum confocal measurement system calibrating device and calibrating method effectively reduce requirements of the dispersion object lens for
linearity in the spectrum confocal measurement system and improves measurement accuracy of the spectrum confocal measurement system.