An AFM that combines an AFM Z position
actuator and a self-actuated Z position
cantilever (both operable in cyclical mode and
contact mode), with appropriate nested
feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either
ambient air or fluid includes a self-actuated
cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated
cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an
oscillation amplitude generally equal to a
setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever
control signal in response to
vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever
control signal to generate a
position control signal. A Z position
actuator is also included within the second feedback circuit and is responsive to the
position control signal to position the sample. In operation, preferably, the cantilever
control signal alone is indicative of the
topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor ("Q") of the cantilever
resonance to optimize the bandwidth of the cantilever response.