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109results about How to "Compensation for deformation" patented technology

Optical proximity correction method for contact hole graphic design

The invention provides an optical proximity correction method for contact hole graphic design, and the method comprises the following steps: providing a design layout with contact hole graph; implementing a first optical proximity correction for the contact hole figure in the design layout; determining whether the contact hole figure after the first optical proximity correction satisfies the requirement of mask layer rule examination, if the contact hole figure does not satisfy the requirement of mask layer rule examination, implementing a second optical proximity correction for the contact hole figure which is processed by the first optical proximity correction, and simultaneously adding another figure between the contact hole figures which are processed by the first optical proximity correction, and thereby connecting the two adjacent contact hole figures for forming a figure unit; carrying out a photoetching projection simulation for the figure unit. According to the invention, the optical proximity correction for the contact hole figure is not limited by the mask layer rule examination, and thereby the corrected contact hole figure can completely compensate the deformation of the contact hole figure caused by interference and diffraction of light during photoetching simulation.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Hard sealing double eccentric butterfly valve for S-shaped elastic double O-shaped metal sealing ring

The invention discloses a hard sealing double eccentric butterfly valve for an S-shaped elastic double O-shaped metal sealing ring, which comprises a double eccentric butterfly plate, a valve body and a valve rod and is characterized in that the S-shaped elastic double O-shaped metal sealing ring is placed between the double eccentric butterfly plate and the valve body, and a regulation mechanism consisting of a pressing ring, a control ring, a positioning plate, a regulating screw bolt and a retainer ring is arranged at the sealing ring part. The S-shaped elastic double O-shaped metal sealing ring structure is adopted, so the problem of complicated sealing structures or single static sealing design structures caused by the dynamic and static sealing coupling is effectively solved, and the sealing structure is simplified. The sealing ring part is provided with a regulating structure, the elastic deformation quantity and the deformation direction of large and small elastic O-shaped metal sealing rings can be simultaneously regulated, the elastic deformation quantity and the elastic force can be effectively provided, the reliability of the sealing performance is improved, the deformation caused by the heat expansion and cold contraction of materials can be obviously and perfectly compensated particularly in high and low temperature application occasions with sharp temperature change, and the internal sealing performance of the butterfly valve is ensured.
Owner:704TH RES INST OF CHINA SHIPBUILDING IND CORP
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