This invention discloses a thin-film
bulk acoustic wave resonator structure and its fabrication method, comprising: a substrate; a cavity formed on the substrate; wherein, viewed from above: the cavity has a pentagonal structure with a release port formed on each side of the pentagonal structure; a support ring located on the substrate and surrounding the cavity, with the release ports exposed; a support layer located on the support ring and having a thickness less than that of the support ring; a bottom
electrode edge load located above the release ports of the cavity and having a thickness equal to that of the support layer; a bottom
electrode located on the support layer and the bottom
electrode edge load; a piezoelectric layer located on the bottom electrode; a top electrode located on the piezoelectric layer; a
passivation layer; and the periphery of the piezoelectric layer, bottom electrode, support layer, and support ring located on and below the top electrode. This invention improves some performance characteristics of the device and enhances its practicality, reliability, stability, and durability.