The invention provides a split-gate
flash memory unit and a forming method thereof. The split-gate
flash memory unit comprises a
semiconductor substrate, a source line
polycrystalline silicon layer which is located on the surface of the
semiconductor substrate, a source
electrode which is located in the
semiconductor substrate aligned to the source line
polycrystalline silicon layer, a
coupling oxide layer and a floating gate which are sequentially located on the semiconductor substrate surfaces at two sides of the source
polycrystalline silicon layer, a side wall medium layer which is used for electrically isolating the source wire line polycrystalline
silicon from the
coupling oxide layer and the floating gate, a
coupling oxide layer which is located on the side wall of the floating gate far away from the source line polycrystalline
silicon layer, an epitaxial layer which is located on the surface of the semiconductor substrate at one side of the coupling oxide layer far away from the source line polycrystalline
silicon layer, tunneling oxide
layers which are located on the surface of the epitaxial layer and on the side wall of the side medium layer far away from the source line polycrystalline silicon layer, word line polycrystalline silicon
layers which are located on the surfaces of the tunneling oxide
layers, and drainage electrodes which are located in the epitaxial layer at one side of the word line polycrystalline silicon layer far away from the floating gate and the semiconductor substrate. With the adoption of the split-gate
flash memory unit provided by the invention, the
programming efficiency of the split-gate flash memory unit can be improved and the
miniaturization is easy to realize.