Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

36results about How to "Program disturb" patented technology

Split-gate flash memory unit and forming method thereof

The invention provides a split-gate flash memory unit and a forming method thereof. The split-gate flash memory unit comprises a semiconductor substrate, a source line polycrystalline silicon layer which is located on the surface of the semiconductor substrate, a source electrode which is located in the semiconductor substrate aligned to the source line polycrystalline silicon layer, a coupling oxide layer and a floating gate which are sequentially located on the semiconductor substrate surfaces at two sides of the source polycrystalline silicon layer, a side wall medium layer which is used for electrically isolating the source wire line polycrystalline silicon from the coupling oxide layer and the floating gate, a coupling oxide layer which is located on the side wall of the floating gate far away from the source line polycrystalline silicon layer, an epitaxial layer which is located on the surface of the semiconductor substrate at one side of the coupling oxide layer far away from the source line polycrystalline silicon layer, tunneling oxide layers which are located on the surface of the epitaxial layer and on the side wall of the side medium layer far away from the source line polycrystalline silicon layer, word line polycrystalline silicon layers which are located on the surfaces of the tunneling oxide layers, and drainage electrodes which are located in the epitaxial layer at one side of the word line polycrystalline silicon layer far away from the floating gate and the semiconductor substrate. With the adoption of the split-gate flash memory unit provided by the invention, the programming efficiency of the split-gate flash memory unit can be improved and the miniaturization is easy to realize.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Preparation method for flash memory

The invention provides a preparation method for a flash memory. Oxidation processing is performed on a semiconductor substrate with formation of a tunneling oxidation layer before formation of a floating gate so that stability of an active region surface contacted with the tunneling oxidation layer is enhanced. Meanwhile, deposition thickness of a metal layer for preparation of a metal silicide is reduced, and heat treatment for formation of the metal silicide is performed via two divided phases so that enhancement of stability and surface uniformity of the metal silicide is facilitated, wherein temperature of the second phase of heat treatment is higher than that of the first phase, and time of the second phase of heat treatment is shorter than that of the first phase. With application of the aforementioned method, the metal silicide can be prevented from irregularly eroding to the gate structure and the contact surface of the active region so that programming interference caused by irregular erosion can be reduced, an objective of suppressing programming interference of the flash memory is achieved, reduction of reliability of a drain region in cycle operation can be further avoided, and generation of tail bits of data retention of the flash memory can also be avoided.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Split-gate flash memory unit and forming method thereof

The invention provides a split-gate flash memory unit and a forming method thereof. The split-gate flash memory unit comprises a semiconductor substrate, a source line polycrystalline silicon layer which is located on the surface of the semiconductor substrate, a source electrode which is located in the semiconductor substrate aligned to the source line polycrystalline silicon layer, a coupling oxide layer and a floating gate which are sequentially located on the semiconductor substrate surfaces at two sides of the source polycrystalline silicon layer, a side wall medium layer which is used for electrically isolating the source wire line polycrystalline silicon from the coupling oxide layer and the floating gate, a coupling oxide layer which is located on the side wall of the floating gate far away from the source line polycrystalline silicon layer, an epitaxial layer which is located on the surface of the semiconductor substrate at one side of the coupling oxide layer far away from the source line polycrystalline silicon layer, tunneling oxide layers which are located on the surface of the epitaxial layer and on the side wall of the side medium layer far away from the source line polycrystalline silicon layer, word line polycrystalline silicon layers which are located on the surfaces of the tunneling oxide layers, and drainage electrodes which are located in the epitaxial layer at one side of the word line polycrystalline silicon layer far away from the floating gate and the semiconductor substrate. With the adoption of the split-gate flash memory unit provided by the invention, the programming efficiency of the split-gate flash memory unit can be improved and the miniaturization is easy to realize.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Programming operation method and device of memory

ActiveCN112820329AAvoid the problem of not being able to effectively increase the channel potentialProgram disturbRead-only memoriesMemory cellParallel computing
The invention relates to a programming operation method and device of a memory, the memory comprises a first memory string, a first input end and a second input end, the first input end and the second input end are located at the two ends of the first memory string, the first memory string comprises a plurality of first memory cells connected in series, and the programming operation method comprises the following steps: performing pre-charging of a first programming operation, providing a first preset voltage for a second input end, and providing a second preset voltage for a gate layer of a first memory cell in a programmed state, so that the first memory cell in the programmed state is conducted, and a channel in a first memory string is pre-charged; carrying out first programming operation, wherein the first programming operation carries out programming on the multiple to-be-programmed first storage units from the first storage unit close to the second input end to the direction away from the second input end, and therefore when programming operation is carried out on the storage string, the charge density of a channel can be effectively reduced in the pre-charging stage of the programming operation. And the programming interference is further reduced.
Owner:YANGTZE MEMORY TECH CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products