The utility model provides an asymmetric high-reliability
trench gate silicon carbide VDMOS. The asymmetric high-reliability
trench gate silicon carbide VDMOS is characterized in that a drift layer is connected to a
silicon carbide substrate; the P-type well region is connected to the drift layer; the shunt region is connected to the drift layer and located at the lower left corner of the first groove, and the P-type base region is connected to the shunt region and located at the left side of the first groove; the P-type source region is connected to the P-type well region; the N-type source region is respectively connected with the P-type well region, the P-type base region and the P-type source region; the Schottky
metal layer is connected to the drift layer, the P-type well region and the N-type source region; the outer side surface of the insulating
dielectric layer is respectively connected with a P-type source region, an N-type source region, a P-type well region, a P-type base region and a shunt region; a groove is formed in the insulating medium layer; the gate
metal layer is arranged in the groove; the source
metal layer is respectively connected with the P-type source region, the N-type source region and the Schottky metal layer; the drain metal layer is connected to the
silicon carbide substrate, so that the characteristics of the device after conduction are ensured at one side, the follow current characteristics of the
diode of the device body are ensured at one side, and the reliability of the device is improved.