The invention discloses a
system for detecting water-vapor content in a high-purity gas based on a
cavity ring down spectroscopy technology. The
system comprises a DFB
laser control power source, a DFB
laser, an optical
collimator, an
optical isolator, an acoustic
optical modulator, a reflector, a matching lens, an optical
resonator, piezoelectric ceramics, a piezoelectric ceramics
control power source, a focusing lens, a
detector, a trigger, a
data acquisition card, and a computer. The
laser emitted by the DFB laser successively passes through the optical
collimator, the
optical isolator, the acoustic
optical modulator, the reflector, the matching lens, the optical
resonator, the piezoelectric ceramics, and the focusing lens, and arrives to the
detector. The piezoelectric ceramics
control power source is connected with the piezoelectric ceramics. The
detector is connected with the trigger and the
data acquisition card. The trigger is connected with the acoustic
optical modulator. The collected data of the
data acquisition card is transmitted to the computer. Based on the
system, the detection precision of the water-vapor content in the high-purity gas is about 100 pptv. In addition, the system does not need to calibrate instruments frequently, and the requirement for the environment
humidity is high.