The invention relates to a method for rapidly compressing
mask and
wafer image data on the basis of a GPU and a mesh. On the basis of image binaryzation, the method comprises the steps that 1, corresponding hardware resources are distributed for image parallel; 2, a camera is utilized for collecting data to a
server, the data is not cached into a magnetic disk, and the data is directly transmitted from the HOST side to the DEVICE side; 3, the image data is filtered in the GPU; 4, binaryzation threshold values are obtained through black-and-white image data in the GPU, then, binaryzation
processing is carried out, and finally binary graphic data is obtained; 5, a
crossover operation way is adopted, and coordinates of mesh points are compared with coordinates of intersection graphs; 6, an extracted grid matrix is converted into an image with a standard BMP format; 7, the data obtained through parallel meshing is copied from the DEVICE side to the HOST side, and then follow-up
data processing is carried out. Hardware computing resources can be effectively saved, computing efficiency is effectively improved, and the detection speed is higher.