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In telecommunications, a mode scrambler mode mixer is a device for inducing mode coupling in an optical fiber, or a device that, itself, exhibits a uniform output intensity profile independent of the input mode volume or modal excitation condition. Mode scramblers are used to provide a modal distribution that is independent of the optical source for purposes of laboratory, manufacturing, or field measurements or tests. Mode scramblers are primarily used to improve reproducibility of multimode fiber bandwidth measurements.
Systems and methods for overlay metrology with reduced coherence and speckle contrast
An infinite impulse response filter includes at least one N x N multimode optical coupler and one or more mode scrambling loops. The at least one N x N multimode optical coupler has N input ports and N output ports. One of the N input ports is coupled to a laser source that generates a light beam. The at least one N x N multimode optical coupler splits the light beam into a plurality of sub-beams that are partitioned in an amplitude domain across the N output ports. One of the N output ports is coupled to a detection system. The one or more mode scrambling loops include a mode scrambler and couple one of the N output ports to one of the N input ports. The one or more mode scrambling loops produce temporal incoherence and spatial incoherence that reduce peak power and speckle contrast of the light beam.
Owner:ASML NETHERLANDS BV