32results about How to "Increase rotor speed" patented technology

A variable capacitive micro-electrostatic motor adopting five-degree-of-freedom electrostatic levitation is used in the fields of micro-executive components, micro-inertia sensitive elements, etc. of MEMS systems. The present invention includes an upper stator, a lower stator, a rotor, an inner stator and an outer stator, and a suspension control system. The upper and lower stators and the inner and outer stators form a closed inner cavity, and the rotor is suspended in the geometric center of the annular inner cavity during operation. The electrostatic force is applied by radial force electrodes, displacement detection is realized by detecting the capacitance differential change between the electrodes and the rotor, and the five-degree-of-freedom active electrostatic levitation is realized by means of the levitation control system, using the salient poles on the rotor and the driving electrodes on the stator Apply drive torque. The micro-electrostatic motor proposed by the present invention can constrain all degrees of freedom of motion of the rotor except the rotation around the Z axis, which not only eliminates the friction torque caused by mechanical contact, significantly improves the working life, but also provides greater driving torque and radial overload ability to obtain high rotor speeds.