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41results about How to "Real-time search" patented technology

Intelligent book positioning system based on ultrahigh frequency RFID technology

The invention belongs to the technical field of automatic management of libraries, particularly relates to an intelligent book positioning system based on the ultrahigh frequency RFID (Radio Frequency Identification) technology, and aims to provide a system which can realize tracing and positioning for documents in a library, is used for optimizing current management work of a library, and brings more efficient and humanized retrieve experience to readers. The invention adopts the technical scheme that the intelligent book positioning system based on the ultrahigh frequency RFID technology mainly comprises intelligent bookshelves 1, a communication base station 6, a system server 7 and a retrieve terminal 8; an electronic tag code matching method is used for positioning; and the positioning method comprises a real-time positioning method and a non-real-time positioning method. According to the invention, the ultrahigh frequency RFID technology is introduced into the intelligent management of the library, and the Internet of Things of the library is constructed from three aspects, namely an electronic tag aspect, a reader and base station aspect and the system server aspect.
Owner:NORTH CHINA ELECTRIC POWER UNIV (BAODING)

Channel ground grid model representation method based on double-layer regularization

The invention discloses a method for expressing a canal terrestrial grid model based on double-layer regularization, and pertains to the method for expressing terrestrial grid models. The terrain where a channel passes through is divided into equal quadrangular grids according to X coordinate and Y coordinate thereof, the quadrangular grids are named as external grids; the complete terrain is divided into a form of determinant grids. Each external grid is examined whether the external grid has measured terrain data point, if a data point is in a grid, then the external grids are further divided into small cells, the small cells are named as internal grids. The elevation value of each peak in the external grids and the internal grids can be computed in advance according to the measured terrain data points, and the peak coordinate and the elevation data information are stored in an array of the internal grids and external grids; in this way, the terrain elevation of an arbitrary point can be computed in a real time manner by the grid coordinate and the peak elevation. The method can adjust the terrain resolution and express jumping phenomenon of complex terrain.
Owner:HOHAI UNIV

Method and system for information searching on basis of multimedia information fingerprint technology and application

The invention provides a method, system and service for information searching through multimedia information fragments / samples, a searching application client and a service or information popularization method based on the method, system and service for information searching and the searching application client. The method is characterized in that by establishing a multimedia fingerprint database for multimedia information and enabling fingerprints to serve as indexes of corresponding associated information, inquiry services are provided; when users use a terminal to submit the to-be-inquired multimedia information fragments / samples to an application or the system, the corresponding information fingerprints are generated for the multimedia information fragments / samples, the fingerprint database is inquired in the system, and if similar fingerprints are found, the associated information or service corresponding to the fingerprints is returned. At present, various intelligent devices such as a smartphone, a smart television and a tablet personal computer are more and more popular and are universally provided with input peripherals such as cameras and microphones, multimedia information collection can be performed, and the users can extremely conveniently perform information searching with the multimedia information fragments / samples serving as searching conditions. Besides, existing traditional unidirectional medium modes of televisions, broadcasts and outdoor advertising and the like can be in real-time interaction with the users, and the users are provided with the capability of searching further information in real time along with media contents or performing immediate action.
Owner:丁瑞彭

Noise detecting method and system of air conditioner for car and car

The invention provides a noise detecting method and system of an air conditioner for a car and the car. The method comprises the steps that a probe is used for collecting the sound pressure levels of n sound sources in the air conditioner for the car, and n is a positive integer; according to the sound pressure levels of the n sound sources, the sound pressure level of a header sound source is obtained; whether the sound pressure level of the header sound source exceeds preset decibels is judged, if no, the probe is used for carrying out collecting continuously, and otherwise, a noise source is determined preliminarily by decomposing header sound pressure through the position of the probe; the probe uses ultrasonic waves to detect the noise source, and the three-dimension appearance of the noise source is obtained; and compared with the three-dimension appearance, so that fault products are determined, and fault product codes are output. According to the noise detecting method of the air conditioner for the car, the fault source of the air conditioner can be found timely and accurately, a user can know faults conveniently, and user experience is improved.
Owner:MIND ELECTRONICS APPLIANCE CO LTD

Tourist area smart service system and tourist area monitoring and data access method

The invention discloses a tourist area smart service system and a tourist area monitoring and data access method. The smart service system comprises a service end and a data acquisition device. Application servers are disposed in the service end. A client gets access to data resources in the application servers in the service end via a communication network. The application servers comprise tourist information databases and tourist area resource databases. The communication network comprises a wireless mobile network and the Internet, wherein the wireless mobile network is a 3G or 4G communication network and the internet supports wired access or WiFi access. The data acquisition device comprises a monitoring camera and an RFID module and is connected with the application servers in the service end. The RFID module is used for acquiring ticket data. The client comprises at least one of a PC, a smart phone, a notebook computer, and a tablet computer. The tourist area smart service system may offer abundant data resources for the user to get access in order to monitor the tourist area omnibearingly in real time.
Owner:CHANGSHA NORMAL UNIV

Visualization-based bridge health monitoring system and method

The invention discloses a visualization-based bridge health monitoring system and method, and relates to the field of bridge monitoring. The system includes a data collection module used for collecting related information of a bridge; an on-site data processing module used for receiving, filtering and storing data information acquired by all data collectors; a plurality of on-site databases used for storing the data information after filtering and checking by the on-site data collection module; an on-site collector analysis and management module used for detecting the working states of the collectors; a central database module used for receiving all on-site data information and collector state information; and a background analysis module used for judging whether the data collection module is connected with the background analysis module in real time, whether the bridge runs normally is judged according to the data information, and an analysis result is written in the central database module. The visualization-based bridge health monitoring system provided by the invention can avoid database redundancy, and improve the rate of detecting and maintaining detection equipment.
Owner:CHINA RAILWAY BRIDGE SCI RES INST LTD +1

Internet-of-things-based collection and alarm system for real product state

The invention provides an internet-of-things-based collection and alarm system for a real product state. The system is composed of a product information management module, a position information acquisition module, a processing data acquisition module, a quality evaluation module and a visual monitoring and alarm module. A product identification number, production information, and processing standard data are recorded into the product information management module; the position information acquisition module collects production and position information based on binding of the product with an RFID tag; the processing data acquisition module collects processing data in real time when the product is processed on a machine tool; the quality evaluation module searches corresponding processing standard data of a corresponding processed product according to the position of the machine tool and carries out comparison and determination on the processing standard data and actually measured data, and alarming is carried out when a deviation degrees exceeds a threshold value; and the product position and alarm prompting information are displayed for a product processing worker by the visual monitoring and alarm module. Therefore, collection efficiency of the product position information during the production process is improved; the product quality is evaluated during the processing process; the wrong operation is stopped based on alarming; and the economic losses are reduced.
Owner:BEIJING SATELLITE MFG FACTORY

ELK-based log burying point service analysis alarm system and method

The invention relates to the field of data processing, in particular to an ELK-based log burying point service analysis alarm system, which comprises a service system used for executing service operation, storing service data and generating original log information of service; the system further comprises a data collection module, a preprocessing module, a processing module, an analysis module andan output module, and the data collection module is used for collecting original log information of a service system; the preprocessing module is used for receiving the original log information and performing format serialization on the original log information to generate standard log information; the processing module is used for collecting standard log information through Logstash, pushing thestandard log information to Elasticsearch, and aggregating the standard log information through Elasticsearch; the analysis module is used for processing the standard log information on the Elasticsearch according to a pre-configured alarm rule and generating an alarm push; and the output module is used for receiving and displaying the alarm push; by adopting the system, the problem of poor expansibility of the application program can be solved.
Owner:重庆富民银行股份有限公司

Automatic monitoring system for underwater dragging operation width

The invention provides an automatic monitoring system for an underwater dragging operation width. The automatic monitoring system is composed of a console and a photoelectric measuring device. The console is installed in a monitoring room and is a manual control and display device. The console is composed of a computer system and is used by operation personnel for remotely controlling and operating the photoelectric measuring device and also used for automatic calculation of the operation width. The photoelectric measuring device is installed at the high position, where blocking is avoided in the measurement direction, of a mast of an unmanned remote control boat. The photoelectric measuring device is composed of a first shell, a visible light camera, an infrared camera, a laser range finder and a rotating platform and can achieve real-time shooting of an indicating floating body on the water and monitor the path of a target. The console and the photoelectric measuring device are in communication through a wireless radio station. The automatic monitoring system can complete all-weather measurement under the condition of electromagnetic interference or a blackout and has the advantages that the interference resisting capacity is high, passive detection is conducted, and data precision is high.
Owner:710TH RES INST OF CHINA SHIPBUILDING IND CORP

A cloud log collection method based on distributed architecture

The invention provides a cloud log collection method based on a distributed architecture, The invention belongs to the field of information technology. According to the characteristics of the components, the invention needs to deploy Kafka cluster, Elasticsearch cluster, Logstash, each server installs FileBeat component, and finally builds a log system framework. Realize the automatic collection and real-time query analysis of various logs and the fast import of the third-party logs.
Owner:INSPUR SOFTWARE CO LTD

Deep web mobile search method, server and system

The embodiment of the invention provides a deep web mobile search method, a server and a system. The method comprises the following steps: obtaining member search engine representing values of deep web member search engines; receiving search requests sent by a client, and obtaining search request information from the search requests; calculating the matching degree of the search requests and the member search engines according to the search request information and the member search engine representing values, and selecting the member search engines from the member search engine set according to the matching degree for carrying out content data search; and sending the searched content data to the client. The invention is used for integrating the deep web member search engines, realizing the representing of the deep web member search engines and automatically selecting the member search engines for search through the deep web member search engine representing values.
Owner:HUAWEI TECH CO LTD

Weblogic deserialization vulnerability scanning detection method and device

The invention discloses a Weblogic deserialization vulnerability scanning detection method and device. The method comprises the following steps: firstly obtaining a to-be-detected document; starting a weblogic deserialization vulnerability scanning detection tool; carrying out vulnerability scanning on the to-be-detected document; and finally judging whether the to-be-detected document has vulnerability or not, if the judging result is positive, outputting vulnerability information of a host, and if the judging result is negative, returning to continue the scanning until the scanning is finished. According to the Weblogic deserialization vulnerability scanning detection method provided by the invention, vulnerability scanning and verification are carried out on a server which is deployed with Weblogic on the basis of Java deserialization vulnerability, so that real-time search, reliability, rapidness and convenience mounting and using can be achieved. Scanning can be carried out to verify whether the server which is deployed with weblogic has Java deserialization vulnerability or not, and the server can be utilized, so that simplicity and high efficiency are provided, the manual intervention is decreased, an automatic diagnosis function is realized and a support is provided for the system safety.
Owner:STATE GRID CHONGQING ELECTRIC POWER CO ELECTRIC POWER RES INST +2

Bank-searching convenience querying system and working method thereof

The invention discloses a bank-searching convenience querying system and a working method thereof, and belongs to the technical field of bank data collecting querying. The bank-searching convenience querying system comprises a bank searching module, wherein the bank searching module comprises a bank data collecting unit, a comprehensive condition querying unit and a map positioning navigation unit; the bank-searching convenience querying system also comprises a user module, wherein the user module comprises a user login and registration unit and a user information storage unit, the user information storage unit comprises user personal information and a held bank card information; bank net point information comprises bank names, net point types, special functions and business hours, the special functions comprise loan handling, accumulation fund handling, penalty payment on behalf and cost payment on behalf, searching conditions correspond to the bank net point information, bank net points are defaulted to be arranged in a ascending order mode according to the distances between the bank net points and user current positions, and the bank net points of held bank cards of users are preferential under the condition that the distances are same. Various banks can be pertinently screened, query conditions are detailed, and the bank net points are positioned and searched in real time.
Owner:ZIBO TECHNICIAN COLLEGE

Internet of things real-time data oriented automatic analysis method

The invention relates to an Internet of things real-time data oriented automatic analysis method. The method comprises the following steps of collecting and obtaining entity information and processingthe information through adoption of a Watir and Nokogiri information real-time obtaining method; carrying out real-time management on data; carrying out real-time statistics on the data; carrying outreal-time search on the entity information; carrying out real-time prediction; and carrying out real-time exchange. A search result can be directly transmitted to a user or a prediction module for preprocessing, a prediction model is established, compared with a direct search result, a predicted result has the advantage of relatively high practical significance, and then the predicted result is transmitted to the user, so an instructional effect acts on decision making of the user. An entity consistent with a specific state can be searched. Moreover, a real-time state of a specific entity canbe searched, the state of the entity after certain time also can be predicted, and the information useful for the user can be obtained.
Owner:苏州耕耘无忧物联科技有限公司

Real-time big data calculation and storage method and system

The invention relates to the technical field of real-time big data, in particular to a real-time big data calculation and storage method and system, which are characterized by comprising the followingsteps of: S1, extracting multi-source heterogeneous data through a data conversion module, converting the multi-source heterogeneous data into data with a unified format, and sending the processed data to an input control module; S2, enabling an input control module to perform aggregation, centralization and caching on the input data, perform a series of processing such as interception, monitoring and scheduling, and forward the data to the real-time computing module in batches; S3, dividing a real-time calculation module to space filtering calculation and space mapping calculation, and sending a calculation result to the streaming data service module after calculation is completed; and S4, providing a real-time data service and a historical data service through a streaming data service module. According to the invention, the multi-source heterogeneous real-time big data can be processed more efficiently.
Owner:武汉中地数码科技有限公司

Block indoor positioning system and method based on wifi and face recognition

The invention discloses a block indoor positioning system and method based on wifi and face recognition, and belongs to the field of indoor positioning, and the system comprises a cloud system, a positioning terminal, and a mobile phone terminal. The mobile phone terminal comprises a camera module and a wifi module, and the camera module is used for collecting a current face image of a locator; the positioning terminal comprises a single-chip microcomputer and a camera in bidirectional signal connection with the single-chip microcomputer, and the camera is used for shooting a face image of a positioned person; the camera module is connected with the single-chip microcomputer through a 4g network or wifi to carry out face image information transmission of a localizer. The cloud system comprises a positioning target matching system, a block database and a camera database, wherein the block database and the camera database carry out signal transmission with the positioning target matchingsystem through a 4g network or wifi. According to the invention, the indoor area is blocked, the wifi positioning method based on block recognition is adopted to initially position the mobile phone holder, and the face recognition and geometric calculation of the camera are combined for further positioning, so that the indoor positioning precision can be greatly improved.
Owner:CHINA JILIANG UNIV

Dynamic placeholder grid model construction method and application architecture design method thereof

The invention relates to the technical field of information, and discloses a dynamic placeholder grid model construction method and an application architecture design method thereof, and the method comprises the following steps: 1) constructing a real-time dynamic digital visual region grid block diagram model associated with region mapping of reality description according to an application scene; and (2) constructing a real-time dynamic digital visual grid placeholder structure diagram or a diagram block set which is mapped with a real moving or static entity and is associated with the regional grid block diagram based on a sensor system. According to the dynamic placeholder grid model construction method and the application architecture design method thereof, the problem that various types of information management systems in the prior art cannot well achieve digital and intelligent management such as real-time, efficient and accurate monitoring, searching, tracking, scheduling, early warning and the like on various types of vehicles, personnel and moving objects, and have the problems of difficulty in automatic monitoring management and weak performance and efficacy exist can be solved.
Owner:武汉旭云智慧交通有限公司

Quasi-real-time log data analysis and statistics method based on Elasticsearch

The invention discloses a quasi-real-time log data analysis and statistics method based on Elasticsearch. The quasi-real-time log data analysis and statistics method based on Elasticsearch comprises the following steps: S1, storing Elasticsearch clusters in a distributed mode; s2, using an Elasticsearch cluster to carry out data writing; and S3, reading the data by adopting an Elasticsearch cluster. The invention has the beneficial effects that the invention can realize fragmented storage and efficient query, can support approximately real-time search, and the distributed deployment does not need other components and transverse extension to supports a plug-in development mode; the invention has rich open source plug-in libraries, cannot reduce the query efficiency along with the increase of the data volume, can be suitable for real-time data search, and realizes data statistics and query in scenes of real-time change updating and the like.
Owner:UNICLOUD (NANJING) DIGITAL TECH CO LTD

Method for controlling chip temperature in reaction chamber for semiconductor etching process

The invention deals with the domain of the semiconductor chiseling and eroding. The invention discloses the method of controlling the temperature of the wafer during the course of chiseling and eroding the semiconductor. The process of the invention is showed below: the corresponding relation between the temperature of the cavity and the temperature controlling machine is gained on the base of the testing, videlicet, when the temperature of the cavity hoists, the corresponding needing of the temperature of the temperature controlling to keep the temperature of the silicon the normal range. These corresponding relations are reserved in one database, during the process, according to the changing of the temperature of the cavity, the database is find to adjust the temperature of the temperature controlling machine real-timely, so the temperature of the silicon is controlled; because of adopting the said technical project, the system can lookup the database real-timely to adjusting the temperature of the temperature of the temperature controlling setting according to the changing of the temperature of the active cavity, so the temperature of the silicon can be controlled above the normal value to improve the effect of the chiseling and the eroding of the wafer.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD

Network multimedia terminal equipment

The invention relates to network multimedia terminal equipment. The network multimedia terminal equipment comprises a central processing unit, a power amplifier, a microphone, a loudspeaker, a dynamic memory, a Nand-flash memory chip, an interface management module, a power management module, a battery, a universal serial bus (USB) interface, a frequency modulation (FM) module, a Micro secure digital (SD) card slot, a wireless fidelity (WiFi) module and a touch screen, wherein the central processing unit is connected with the power amplifier, the dynamic memory, the Nand-flash memory chip, the interface management module, the power management module, the USB interface, the FM module and the touch screen respectively; the power amplifier is connected with the microphone and the loudspeaker respectively; the interface management module is connected with Micro SD card slot, the WiFi module and the power management module respectively; and the power management module is connected with the battery. Compared with the prior art, the network multimedia terminal equipment has the advantages of multiple functions, capability of realizing WiFi Internet access and the like.
Owner:上海乐萌信息科技有限公司

A visualization-based bridge health monitoring system and method

The invention discloses a visualization-based bridge health monitoring system and method, and relates to the field of bridge monitoring. The system includes a data collection module used for collecting related information of a bridge; an on-site data processing module used for receiving, filtering and storing data information acquired by all data collectors; a plurality of on-site databases used for storing the data information after filtering and checking by the on-site data collection module; an on-site collector analysis and management module used for detecting the working states of the collectors; a central database module used for receiving all on-site data information and collector state information; and a background analysis module used for judging whether the data collection module is connected with the background analysis module in real time, whether the bridge runs normally is judged according to the data information, and an analysis result is written in the central database module. The visualization-based bridge health monitoring system provided by the invention can avoid database redundancy, and improve the rate of detecting and maintaining detection equipment.
Owner:CHINA RAILWAY BRIDGE SCI RES INST LTD +1

Threat tracking method and device for log access relation and electronic equipment

ActiveCN113839952AImprove search speedGuaranteed search performanceTransmissionEngineeringReal-time Search
The invention discloses a threat tracking method and device for a log access relation, electronic equipment and a readable storage medium. The method comprises the following steps: obtaining an access relation query request, wherein the access relation query request comprises query targets and query types; if the query types comprise detail types, searching for detail data corresponding to the query targets from a detail database; and if the query types comprise form types, searching for form data corresponding to the query targets from a form database, wherein the form database stores form data corresponding to original access logs. According to the invention, the form database is used for storing the form data corresponding to each query target, and the search speed of log access relations is increased through storage of the form data; and the detail database is utilized to store the detail data corresponding to each query target, so that the latest log details can be quickly stored in the detail database. Therefore, real-time search of the latest data is realized on the premise of ensuring the search performance of the log access relations.
Owner:SANGFOR TECH INC

Handheld network multimedia radio

The invention discloses a handheld network multimedia radio, which comprises a central processing unit, a DDR SDRAM (double-data-rate synchronous dynamic random access memory), a Nand-flash, an interface management module and a power management module connected with a battery. The DDR SDRAM, the Nand-flash, the interface management module and the power management module are respectively connected with the central processing unit, and in order to realize a wireless WiFi (wireless fidelity) net surfing function, the central processing unit is further respectively connected with a USB (universal serial bus) interface, a Headphone interface, an FM (frequency modulation) module and a touch screen, and connected with a MicroSD (storage card) slot and a WIFI module via the interface management module. A display screen can be the colored touch screen with the size of 2.8 inches or 3.2 inches or a non-contact type display screen with the size of 2.2 inches. Compared with the prior art, the handheld network multimedia radio has the following advantages that the radio is handheld, plays various audio and video formats by means of a mplayer (media player) with sound codes, is connected with a content server to realize real-time browsing, searching and playing, can simply and effectively realize WiFi net surfing, further monitors network connection and automatic breakpoint continuous connection in real time, can receive more than ten thousand free World Station global internet broadcasting radio stations, manages WiFi net surfing with high power consumption, prolongs the service life of the battery, and effectively manages users, playing and sharing.
Owner:WUXI LEMENG INFORMATION TECH

An automatic monitoring system for underwater towing operation width

The invention provides an automatic monitoring system for the width of underwater towing operation, which is composed of two parts, namely a console and a photoelectric measuring device. The control panel is installed in the monitoring room, which is a manual control and display device, and is composed of a general-purpose computer system. It is used for the operator to remotely control the photoelectric measuring device and automatically calculate the working width. The photoelectric measuring device is installed at the height of the mast of the unmanned remote control boat and at a position where there is no obstruction in the measuring direction. It is composed of the first housing, a visible light camera, an infrared camera, a laser range finder, and a rotating platform, which can realize real-time monitoring of the floating body on the water surface. Shooting, target trajectory monitoring. The communication between the console and the photoelectric measuring device is realized by a radio station. The system can complete all-weather measurement under the condition of electromagnetic interference or light control, and has the characteristics of strong anti-interference ability, passive detection and high data accuracy.
Owner:710TH RES INST OF CHINA SHIPBUILDING IND CORP

A short and multimedia message search method and device

ActiveCN103037055BImplement full-text searchMeet needsSubstation equipmentComputer hardwareUser input
The invention relates to the technical field of communication electronics, in particular to a method and a device for searching short messages and multimedia messages. The method and the device for searching the short messages and the multimedia messages are used for solving the problem that in the prior art, the searching of short message and multimedia message sending contact person and short message and multimedia message receiving contact person or message sending phone number and the message receiving number cannot be achieved. The method comprises storing received or sent short messages and multimedia messages to information database after preprocessing, carrying out retrieval in the information database according to the search character string input by a user, and the short messages and the multimedia messages matched with the search character string are presented to the user as a retrieved result. The searching of the short message and multimedia message receiving contact person and the short message and multimedia message sending contact person or the message receiving phone number and the message sending phone number can be achieved through the method.
Owner:北京君正集成电路股份有限公司

A weblogic deserialization vulnerability scanning detection method and tool

The invention discloses a Weblogic deserialization vulnerability scanning detection method and device. The method comprises the following steps: firstly obtaining a to-be-detected document; starting a weblogic deserialization vulnerability scanning detection tool; carrying out vulnerability scanning on the to-be-detected document; and finally judging whether the to-be-detected document has vulnerability or not, if the judging result is positive, outputting vulnerability information of a host, and if the judging result is negative, returning to continue the scanning until the scanning is finished. According to the Weblogic deserialization vulnerability scanning detection method provided by the invention, vulnerability scanning and verification are carried out on a server which is deployed with Weblogic on the basis of Java deserialization vulnerability, so that real-time search, reliability, rapidness and convenience mounting and using can be achieved. Scanning can be carried out to verify whether the server which is deployed with weblogic has Java deserialization vulnerability or not, and the server can be utilized, so that simplicity and high efficiency are provided, the manual intervention is decreased, an automatic diagnosis function is realized and a support is provided for the system safety.
Owner:STATE GRID CHONGQING ELECTRIC POWER CO ELECTRIC POWER RES INST +2

A product physical status acquisition and alarm system based on the Internet of Things

A product physical state acquisition and alarm system based on the Internet of Things, including a product information management module, a location information acquisition module, a processing data acquisition module, a quality evaluation module, and a visual monitoring and alarm module. The product identification number, production information and processing standard data are entered in the product information management module. The location information collection module collects the product and its location information through the binding of the product and the RFID tag. When the product is processed on the machine tool, the processing data collection module collects the processing data in real time. , the quality evaluation module finds the processing standard data of the corresponding processed product according to the position of the machine tool, and compares and judges it with the actual measured data. When the deviation exceeds the threshold, it will alarm, and the product position and alarm prompt will be displayed to the product processor through the visual monitoring and alarm module. The invention improves the collection efficiency of product position information in the production process, enables the product quality to be evaluated during the processing process, stops wrong operation according to the alarm, and reduces economic losses.
Owner:BEIJING SATELLITE MFG FACTORY

Method for controlling chip temperature in reaction chamber for semiconductor etching process

The invention relates to the field of semiconductor etching. The invention is a method for controlling the wafer temperature of a reaction chamber in a semiconductor etching process. The method of the invention obtains a correspondence between the chamber temperature and the temperature controller on the basis of experiments. Relationship, that is to record, when the temperature of the chamber rises, the temperature of the thermostat needs to be adjusted correspondingly, so as to keep the temperature of the silicon wafer within the normal value range. Save these corresponding relationships in a database. During the process, according to the change of the chamber temperature, search the database, adjust the temperature of the thermostat in real time, so as to control the temperature of the silicon wafer; due to the above technical scheme, the system can be based on The temperature of the reaction chamber changes, the database is searched in real time, and the temperature of the thermostat is adjusted in real time, thereby controlling the temperature of the silicon wafer at a normal value and improving the etching effect of the wafer.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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