1results about How to "Shorten teaching time" patented technology

The utility model discloses a demonstration device for wafer loading port. The demonstration device includes: the substrate, the first surface of substrate is provided with at least two wafer card slot analog block, the second surface of substrate is provided with wafer loading port fixed structure and sensing trigger module, the analog wafer is set up on wafer card slot analog block, and the first surface of analog wafer, substrate and wafer card slot analog block form demonstration space, and the first mark is set up on the analog wafer, the wafer transfer mechanism is used to take and shift analog wafer, and the wafer transfer mechanism includes manipulator, and the manipulator has demonstration executor, and demonstration executor can stretch into, stretch out demonstration space and move in demonstration space, and, the second mark is set up on demonstration executor, and the second mark and the first mark can be aligned under the specified gesture. Through alignment mark, improve calibration accuracy, and it is convenient for operator to identify positioning quickly, and improve semiconductor equipment debugging and calibration efficiency.