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145 results about "Position control system" patented technology

Position Control refers to a system of tracking information based on positions rather than employees. It creates a framework of positions for all the jobs within RIT without regard to whether there is an incumbent in a specific job or not. Position control applies to all regular faculty and staff positions.

Closed loop control of filling mechanisms

An agricultural harvester has a frame and a spout that is mounted to the frame. A target landing point indicates a position in a receiving vehicle where material is intended to land. A control system detects an actual landing point and automatically controls the spout based on a difference between the actual landing point and the target landing point.
Owner:DEERE & CO

Self-positioning control method and system of pipe bending all-in-one machine

The invention discloses a self-positioning control method and system of a pipe bending all-in-one machine, and relates to the technical field of self-positioning control methods. A plurality of sub-positioning spaces are determined according to recognition of a positioning image of the bent pipe, a positioning repair area of the bent pipe is determined according to the plurality of sub-positioning spaces, positioning coefficients corresponding to the plurality of supporting nodes and a current positioning posture of the bent pipe, and a positioning compensation process of the bent pipe is triggered according to the positioning repair area and the bent pipe all-in-one machine. And the accuracy of the positioning compensation process is improved. Determining a plurality of positioning compensation parameters of the elbow pipe according to each positioning compensation item, the overall shape of the elbow pipe and the positioning coefficients of the plurality of supporting nodes; corresponding positioning compensation actions are determined according to the multiple positioning compensation parameters, the corresponding positioning compensation positions and the surface quality requirement of the bent pipe; the multi-stage self-positioning control system is constructed based on the multiple positioning compensation actions, the preset positioning requirement of the bent pipe and the form of the bending area of the bent pipe, and the accuracy of the multi-stage self-positioning control system is improved.
Owner:GUANGDONG KEXIN ELECTRIC CO LTD

Storage and transfer RGV trolley for railway vehicle wheels

The invention discloses a storage and transfer RGV trolley for railway vehicle wheels. The storage and transfer RGV trolley comprises a conveying rail of a profile steel structure; the RGV body comprises a steel structure body, a driving mechanism and a wheel vertical storage rack, and the steel structure body is arranged on the conveying track in a sliding mode; the driving mechanism is arranged between the steel structure vehicle body and the conveying track and used for driving the steel structure vehicle body to move along the conveying track, and the vertical wheel storage rack is arranged on the steel structure vehicle body and used for storing a plurality of vertically-placed wheels; and the positioning control system is used for detecting the position of the RGV body and controlling the driving mechanism to start and stop. The technical effects are as follows: automatic transfer can be realized, and high efficiency is achieved; the structure is simple and the cost is lower; more wheels can be placed and transferred, the wheels can be prevented from toppling and bumping, the stability is higher, and the transferring process is safer; a conveying line is easier to adjust and modify, and the flexibility is good; various wheels with different diameters and different thicknesses can be stored, and the adaptability is better.
Owner:BEIJING SINO-RAILWAY TG TECH DEV CO LTD

Systems and methods of controlling position of a trawl net

A method of controlling position of a trawl net is provided. The method may comprise: receiving, by a processor, a control input, wherein the control input comprises: (i) a selection of one of a plurality of position control modes, and (ii) a position control setpoint for the trawl net; receiving, by the processor, sensor data indicating a sensed position of the trawl net; generating, by the processor, a first trawl position control output based on the control input and the sensor data; determining, by the processor, a rate of change of bathymetry along a travel path of the trawl net; and in response to the rate of change of bathymetry meeting a threshold condition, generating a second trawl position control output by changing the one of the plurality of position control modes to another of the plurality of position control modes.
Owner:KATCHI TECH INC

Switched reluctance motor angle position control system and optimization calibration method

The invention provides a switched reluctance motor angle position control system and an optimization calibration method. The method comprises the following steps: initializing system parameters of a switched reluctance motor; optimizing and calibrating a motor operation angle based on an improved Kepler optimization algorithm; and the motor performs real-time fine-tuning operation. An improved Kepler optimization algorithm is introduced, rapid global search is carried out, an angle calibration point candidate range is rapidly positioned in the initial stage of motor operation, and the time cost of manual intervention or blind calculation is reduced. Fusing a perturbation and observation algorithm, observing feedback data in a motor operation state, finely adjusting candidate calibration points, improving calibration precision, and ensuring adaptation to dynamic working condition changes; the sensor data is collected in real time, the controller and the upper computer work cooperatively, dynamic adjustment and optimization of calibration points are achieved, and therefore the synchronism and operation efficiency of the system are improved.
Owner:JIANGSU UNIV OF TECH

Trolley online automatic oiling system and method

The application discloses a kind of trolley online automatic oiling system and method, belong to industrial automation technical field.The high safety risk of operation, great labor intensity, low efficiency and the problem that positioning accuracy is difficult to guarantee exist in the operation state of belt-type baking machine or sintering machine trolley for manual oiling mode, the combination structure of three-axis servo module, follow-up device, positioning system and control system is used in the application, multi-axis motion control is realized by three-axis servo module, follow-up device completes the clamping and following positioning of trolley wheel, positioning system detects wheel position, and control system coordinates each component to execute online automatic oiling operation.The system is mainly used for the online automatic lubrication of belt-type baking machine, sintering machine trolley wheel bearing, improves the automation level and operation reliability of oiling process.
Owner:BEIJING ZHONGHONGLIAN ENG TECH CO LTD

Positional control system

A working machine comprising an implement pivotable with respect to a loader arm and an actuator arranged to pivot the implement about a physical angular range of motion; wherein the hydraulic system
Owner:J C BAMFORD EXCAVATORS LTD

Systems Comprising Agricultural Implements Connected to Lifting Hitches and Related Control Systems and Methods

A system includes a tractor comprising a lifting hitch, and an implement comprising an implement frame carried by the lifting hitch. The implement frame has an integrated elongate toolbar carrying at least one row unit. A sensor is configured to sense a position of the at least one row unit relative to the ground. A control system is configured to receive a signal related to the sensed position of the at least one row unit relative to the ground and cause the lifting hitch to raise or lower a portion of the implement frame connected to the lifting hitch relative to the tractor based at least in part on the signal. Control systems and related methods are also disclosed.
Owner:AGCO CORP

Camera module, portable electronic device, and position control system

Provided is a camera module, comprising a controller including a first position control unit generating a first position control signal indicating a first target position to which an object provided with an image sensor or a lens is to be moved, and a first master port outputting the first position control signal, a first driver including a first slave port connected to the first master port, a first driving unit providing driving force to the object based on the first position control signal, a second position control unit generating a second position control signal indicating a second target position to which the object is to be moved, and a second master port outputting the second position control signal, and a second driver including a second slave port connected to the second master port, a second driving unit providing driving force to the object based on the second position control signal.
Owner:ASAHI KASEI MICRODEVICES CORP

Flexible material dynamic positioning control system and method based on real-time length detection

The application relates to a flexible material dynamic positioning control system and method based on real-time length detection, which comprises a transmission mechanism, a sensing mechanism, an encoder, an array air jet group, a peripheral system and a motion controller. The motion controller is connected to the sensing mechanism, the encoder, the array air jet group and the peripheral system. The motion controller is used for calculating the length and displacement of the flexible material according to the response time of the flexible material passing through the sensing mechanism and the conveying speed of the transmission mechanism, dynamically calculating the midpoint position of the flexible material according to the length and displacement of the flexible material, and determining the corresponding array air jet group of the flexible material according to the flexible material obtained by the peripheral system. When the center position of the flexible material reaches the position of the corresponding array air jet group, the corresponding array air jet group is triggered. The array air jet group can realize accurate air blowing sorting of the flexible material, realize adaptive adjustment of the air blowing position of the flexible material with different lengths, and meet the accurate sorting requirements of the flexible material with different lengths.
Owner:FUJIAN YILI INTELLIGENT TECH CO LTD

Ultrasonic vibration internal liquid electrochemical discharge-grinding processing device and tool changing method

The present invention relates to the field of micro-machining technology, and in particular, provides an ultrasonic vibration internal liquid electrochemical discharge grinding processing device and a tool changing method. The method includes a processing device including an old tool holder, a new tool holder, an electric spindle, a spindle clamp, an auxiliary electrode, a processing workpiece, an electrolyte tank, a Hall current sensor, an automatic tool changing device; an ultrasonic generator, a frequency converter, a high-frequency pulse power supply, a data acquisition device, an external liquid supply device, a programmable frequency converter, a tool changing operating system, and a position control system; wherein the tool holder includes a primary coil, a secondary coil, an ultrasonic transducer, a rotary liquid joint, and a tool electrode. The processing device integrates the three technologies of ultrasonic vibration, mechanical grinding, and external rotation and internal liquid through the ultrasonic transducer, the tool electrode, and the external liquid supply device. While ensuring processing efficiency, it improves the continuity and stability of processing, improves processing quality, and achieves high-quality, high-efficiency, and low-cost processing of processing materials.
Owner:SHANDONG UNIV

An FPGA-controlled automatic maintenance and cleaning method and system for multi-nozzle plotters

PendingCN122300080AGratingLoop control
This invention discloses an automatic maintenance and cleaning method and system for multiple printheads of a plotter based on FPGA control, belonging to the field of inkjet printing equipment control technology. The method includes: the FPGA main control board and each FPGA printhead control board completing hardware self-tests and bidirectional communication handshakes, using 8B / 10B encoding for data transmission; upon receiving a cleaning command, sequentially executing the entire automated maintenance process of initial ink intake, grating closed-loop control of the doctor blade, multi-printhead synchronous flash printing, secondary ink intake, and printhead moisturizing. It adopts an FPGA distributed hardware architecture, achieving communication between the main control board and the printhead board group via fiber optic links, and constructing a fully closed-loop position control system in conjunction with a grating feedback module. This invention features high real-time performance, strong synchronization, and high anti-interference capability, enabling non-destructive, efficient, and automated maintenance of multiple printheads, effectively reducing the probability of nozzle clogging, extending printhead lifespan, and is suitable for high-precision applications in industrial large-format inkjet plotters.
Owner:XI AN JIAOTONG UNIV

System and method of controlling position of motor

A motor position control system includes a central server including first information of a first display device and second information of a second display device, and a motor position control device which controls positions of the plurality of motors, where the motor position control device includes a controller which receives the first and the second information from the central server and store the first and the second information in a memory, controls the positions of the plurality of motors based on the first information, calculates at least one value based on the first and the second information, selects at least some motors based on the at least one value, and controls positions of the at least some motors based on the at least one value.
Owner:SAMSUNG DISPLAY CO LTD

A high-precision omnidirectional vision positioning control system based on laser cutting

The application discloses a kind of high-precision omnidirectional vision positioning control systems based on laser cutting, including first cylinder, first lifting frame and rotating plate, the output end of the first cylinder is installed with first lifting frame, the bottom of the first lifting frame is symmetrically installed with multiple first mounting rods, the inside of the first mounting rod is through active installation with rotating plate, the top of the rotating plate is installed with camera, the top of the first lifting frame is installed with multiple second cylinder, the output end of the second cylinder is installed with second lifting frame.The first cylinder can drive the first lifting frame to move up and down, while the second cylinder drives the second lifting frame to move up and down, the rotating plate can rotate up and down when the second lifting frame moves up and down, so that the camera on the rotating plate can change the inclination angle, and then the camera can monitor the cutting head of cutting machine at different inclination angles at different heights, so that the monitoring of cutting head is more comprehensive.
Owner:SUZHOU INDO LCD TECH CO LTD

Intelligent equipment based on uranium concentration plant flat plate support arm installation

The utility model belongs to the technical field of workpiece installation and welding, and particularly relates to intelligent equipment based on uranium concentration plant flat plate supporting arm installation. A base is arranged on the portal, a six-axis mechanical arm is installed on the base, and a welding gun, a collision sensor and a welding seam tracking sensor are arranged at the tail end of the six-axis mechanical arm. And a crawler-type walking mechanism is arranged. The track is made of synthetic rubber. And a three-stage composite lifting mechanism is arranged. And a hydraulic and servo position control system is arranged. The utility model solves the problems of quality, cost and efficiency in the welding process of mounting the flat plate support arm to the door-shaped frame.
Owner:CNNC LANZHOU URANIUM ENRICHMENT

Article volume detection method and system for logistics sorting intelligent robot

The invention provides an article volume detection method and system for a logistics sorting intelligent robot, the system structurally comprises a positioning frame, a control system main body, a transmission table, a driving motor, a novel sorting structure and a transmission structure, the positioning frame determines the positions of the control system main body, the transmission table, the driving motor, the novel sorting structure and the transmission structure; the control system main body is used for electrically controlling the novel sorting structure and the driving motor; after a control system main body is improved, an intelligent control chip and a program storage module which are superposed on the basis of an original volume data calculation module, an original shape recognition module and an original internet module can effectively store an intelligent sorting program through a touch screen; according to the intelligent robot, the situation that a program needs to be reset due to initialization after follow-up operation stopping and shutdown can be prevented, so that the use convenience effect of the intelligent robot can be effectively improved, then the internal temperature can be balanced through the constant temperature module in the operation process, and overload caused by the high temperature influence is avoided.
Owner:YANGO UNIV

Shuttle changing device and automatic calibration method

PCT designated stageWO2026138623A1MachineAuto calibration
A shuttle changing device and an automatic calibration method, relating to the technical field of shuttle changing devices. The shuttle changing device comprises: a large rotating arm, which is arranged on a template machine frame; a small rotating arm, which is rotatably arranged at the tail end of the large rotating arm, the tail end of the small rotating arm being provided with a lower mechanism; a detection mechanism, which is used for detecting the rotation positions of the large rotating arm and the small rotating arm; and a control system, which is connected to the shuttle changing mechanism and the detection mechanism. The shuttle changing device solves the technical problem that when a template machine frame deforms during movement or transportation, the position of a shuttle changing device mounted on the template machine frame changes accordingly, resulting in deviations in shuttle picking and placing positions, thereby reducing the shuttle changing success rate or even rendering the device unusable. On the basis of detection signals of a first calibration sensor and a second calibration sensor, the control system controls the shuttle changing mechanism to adjust the positions of the large rotating arm and the small rotating arm, thereby ensuring the absolute positions of the large rotating arm and the small rotating arm, realizing automatic correction of the shuttle changing mechanism, and ensuring the shuttle changing success rate.
Owner:JACK SEWING MASCH CO LTD

A device for preventing belt misalignment to overcome uneven material distribution at the tail end of a belt conveyor

This invention provides an anti-deviation device to overcome uneven material receiving at the tail of a belt conveyor, comprising: a mounting frame; rollers, wherein several rollers are mounted parallel to each other on the mounting frame for contacting and adjusting the position of the conveyor belt, wherein the rolling direction of the rollers is perpendicular to the transmission direction of the conveyor belt; a driving device for driving the rollers to rotate clockwise or counterclockwise in the same direction; two sensors, respectively installed on the left and right sides of the conveyor belt, for sensing the position of the conveyor belt; and a control system for receiving information from the two sensors and controlling the driving device to run or stop. This device can quickly correct the deviation of the conveyor belt at impact points, preventing abnormal damage to the main components of the belt conveyor due to deviation, avoiding system malfunctions and downtime affecting production efficiency, and preventing safety hazards such as lateral tearing caused by conveyor belt overturning.
Owner:FUJIAN MAKENG MINING CO LTD

Mobile robot and motion positioning control system thereof

The utility model discloses a mobile robot and a motion positioning control system thereof, and relates to the technical field of engineering machinery. The system comprises: a mobile chassis; the sensing assembly is mounted on the movable chassis and at least comprises a linear structure light sensor; and the control device is electrically connected with the sensing assembly and is configured to carry out posture adjustment and displacement adjustment on the movable chassis according to the linear structured light emitted to the target workpiece by the linear structured light sensor in the deviation threshold range of the target point position. And the emitted line structured light is aligned with the target workpiece, and the mobile chassis reaches the target point position. According to the embodiment of the invention, the wire structured light sensor is configured, so that the control device can be combined with the wire structured light to perform posture adjustment and displacement adjustment of the mobile robot, fine positioning of the mobile robot is realized, and the mobile robot can adapt to more scenes.
Owner:ZOOMLION HEAVY INDUSTRY SCIENCE AND TECHNOLOGY CO LTD

A vision-guided rotary mold handler positioning control system

The present application relates to the technical field of manipulator control, in particular to a visual-guided rotary mold transfer machine positioning control system.The system comprises a joint driving unit, a flexible transmission assembly and a vision module.A master controller first decouples the generalized disturbance torque representing the nonlinear resistance of the flexible assembly from the cross-axis current feedback of the driving unit based on the joint dynamics model;then, the LSTM network is used to learn the mechanical hysteresis loop characteristics of the torque under different rotary motion states, predict the end dynamic position compensation amount covering the system transmission delay time;finally, based on the smooth weight generated by the real-time running speed, the dynamic position compensation amount is fused with the visual positioning coordinates without disturbance.The present application combines physical priori and data driving, effectively overcomes the cumulative error caused by the nonlinear interference of the cable and the signal transmission lag in the non-slip ring rotary operation, and realizes high dynamic precision positioning.
Owner:ZHEJIANG MAQI SEWING MACHINE

Flexible material dynamic positioning control system and method based on real-time length detection

The invention relates to a flexible material dynamic positioning control system and method based on real-time length detection, and the system comprises a transmission mechanism, an induction mechanism, an encoder, an array wind spraying group, a peripheral system, and a motion controller which is connected with the induction mechanism, the encoder, the array wind spraying group, and the peripheral system. The motion controller is used for calculating the length and the displacement of the flexible material according to the response time of the flexible material passing through the sensing mechanism and the conveying speed of the conveying mechanism, dynamically calculating the midpoint position of the flexible material according to the length and the displacement of the flexible material, and determining the corresponding array air spraying group according to the flexible material acquired by the peripheral system; and when the center position of the flexible material reaches the position of the corresponding array air spraying group, the corresponding array air spraying group is triggered. The flexible materials can be accurately blown and sorted by the array air spraying set, self-adaptive adjustment of the blowing positions of the flexible materials with different lengths is achieved, and the requirement for accurate sorting of the flexible materials with different lengths is met.
Owner:FUJIAN YILI INTELLIGENT TECH CO LTD

One-key in-place control system and method for seat push rod

The invention provides a one-key in-place control system and method for a seat push rod, the system comprises a hand controller, an actuator assembly and a motor driving main control module, the motor driving main control module has a self-learning mode and a common operation mode, and the push rod is driven to reciprocate to a limit position during self-learning so as to automatically obtain stroke information; during common operation, one-key in-place closed-loop position control or inching control is correspondingly executed according to identification of short pressing or long pressing of the key. The intelligent control system based on the brushless motor and position feedback is introduced, and self-learning stroke calibration and intelligent identification of long and short press instructions are combined, so that the core pain points that a traditional seat push rod system needs long press operation, cannot be in place by one key and is poor in adaptability are successfully solved.
Owner:JIANGSU MOXUN TECH CO LTD

Self-folding scooter

PendingFR3166878A1Foldable cyclesMotorcyclesElectric machinerySelf folding
Title: Self-folding scooter. The invention relates to a scooter comprising a front part (1) and a base part (2) connected by a joint (3) to move the scooter from an unfolded configuration to a folded configuration in which the base part (2) is folded towards the front part (1). It includes: - a motor (17), - a locking system capable of moving from a locked position, in which the base part (2) is immobilized relative to the front part (1) in the unfolded configuration, to an unlocked position, - a control system for moving the locking system from the locked position to the unlocked position, and then for activating the motor (17) so as to rotate the base part (2) to reach the folded configuration. Figure for the abstract: Fig. 2
Owner:PAHWATT

Multi-axis cooperative cup carrying and positioning control system and working process

The invention relates to the field of cups, in particular to a multi-axis cooperative cup carrying and positioning control system and workflow, the multi-axis cooperative cup carrying and positioning control system comprises a central control unit and a shaft system module, the shaft system module comprises an X-axis moving module, a Y-axis moving module, a Z-axis lifting module and a clamping hand opening and closing module, an X-axis origin sensor is arranged on the X-axis moving module, a Y-axis origin sensor is arranged on the Y-axis moving module, the X-axis moving module comprises an X-axis driving assembly, an X-axis track and an X-axis platform, the Y-axis moving module comprises a Y-axis driving assembly, a Y-axis track and a Y-axis platform, and the Z-axis lifting module comprises a Z-axis driving assembly, a limiting piece, a Z-axis lead screw and a loading platform. The clamping hand opening and closing module comprises an opening and closing driving assembly, a limiting piece, an opening and closing lead screw and a cup clamp. According to the method, the positioning precision is improved, the compatibility is comprehensively upgraded, the efficiency is obviously optimized, the safety is greatly enhanced, and the compliance adaptation is realized.
Owner:SHARETRONIC DATA TECH CO LTD

Anti-deviation positioning device of transplanting mechanism

The invention belongs to the technical field of automatic control, and discloses an anti-deviation positioning device for a transplanting mechanism, which comprises a data acquisition unit, a deviation prediction module, a self-adaptive PID control module and a deviation early warning module, the problems that in existing transplanting mechanism positioning control, PID parameter self-adaptive capacity is poor, neural network error modeling is insufficient, deviation risk prejudgment lags behind and the like are solved, and high-precision dynamic positioning and deviation risk active early warning in the transplanting process are achieved. According to the device, a PID-timing attention fusion control framework is innovatively introduced, the real-time adjustment characteristic of a traditional PID is combined with the multi-dimensional error prediction capability of a timing attention neural network, and real-time deviation correction and pre-judgment of positioning deviation are achieved through a double-branch cooperation mechanism; on the deviation prediction level, a multi-scale time sequence convolution-gating cycle unit (TCN-GRU) fusion model is constructed, multi-dimensional time sequence feature extraction is carried out on motion parameters and environmental perception data of the transplanting mechanism, and positioning deviation trends under different working conditions are accurately predicted.
Owner:TIANJIN LONGGE ROBOT TECH CO LTD

Positioning control system for overlay precision instrument

The invention provides a positioning control system for an overlay precision instrument, and relates to the technical field of control, and the system comprises a mobile platform which is used for bearing a sample and executing displacement; the laser interferometer module is used for measuring the displacement of the mobile platform; the environment sensing module is used for monitoring at least one physical parameter of the environment where the mobile platform is located; the environment compensation module is connected with the environment sensing module and the laser interferometer module and used for correcting the displacement according to the physical parameters to obtain target displacement; and the control unit is connected with the laser interferometer module and the mobile platform and is used for calculating a difference value between a target position and the target displacement and generating a control signal according to the difference value to drive the mobile platform. By applying the system provided by the embodiment of the invention, the stability and accuracy of positioning control of the mobile platform can be improved.
Owner:FUDAN UNIV NINGBO RES INST

De-icing systems and control

The present disclosure is generally directed to methods and systems for heating the exterior surface of a bulk medium such as an aircraft. An exemplary system includes a series of individual heating elements, a sensor, and a control system. The heating elements are arranged on a skin of the an aircraft. The sensor is positioned on the skin in a location that corresponds with a region of relatively low temperature within a heating pattern produced by the heating elements. The control system is connected to the heating elements and the sensor. The control system configured to control power supplied to the heating elements responsive to output from the sensor.
Owner:DE ICE TECHNOLOGIES INC

Real-time position calculation method for four-way shuttle

The present invention discloses a method for calculating the real-time position of a four-way shuttle. The method is implemented through a three-point positioning control system and includes the following steps: determining the current row position of the four-way shuttle within a shelf; setting a target row position for the four-way shuttle; calculating the row and column numerical difference between the current row and column position and the target row and column position; controlling the forward or reverse rotation of a travel motor based on the row and column numerical difference to drive the four-way shuttle; and a controller collecting signals from a positioning sensor and performing logical operations based on the rotation direction of the travel motor to calculate the position of the four-way shuttle. The present invention uses a dual calculation method to calculate the current position of the shuttle, ensuring the shuttle's accurate position. It also eliminates the need to attach a barcode or install an RFID chip, thus preventing the effects of barcode dust and RFID chip damage, thereby reducing costs.
Owner:上海甲佳智能科技有限公司

Position control system for an agricultural harvester reel assembly

A reel assembly of an agricultural harvester includes an arm supporting a reel of the reel assembly, wherein the arm includes an internal passage. The reel assembly also includes a position control system with a motor having a shaft. The position control system also includes a driver non-rotatably coupled to the shaft of the motor. The driver is disposed within the internal passage of the arm, and the motor drives the driver to rotate. In addition, the position control system includes a carriage coupled to the reel. The carriage is disposed within the internal passage of the arm, and the driver drives the carriage to move through the internal passage along a length of the arm in response to rotation of the driver.
Owner:CNH IND BRASIL LTDA

Method for controlling a position of a movable object, position control system, and an exposure apparatus

A method for controlling a position of a movable object, the method including: measuring a position of a sensor or sensor target on the movable object to obtain a position measurement signal, providing an error signal, providing a control signal on the basis of the error signal using a controller, providing a feed-forward signal on the basis of a set-point signal, actuating one or more actuators on the basis of the control signal and the feed-forward signal, and providing a compliance compensation signal, wherein the error signal is obtained by comparing a set-point position, the measured position of the position measurement, and the compliance compensation signal, and wherein the compliance compensation signal is a direction dependent compliance compensation signal, which direction dependent compliance compensation signal is dependent on a direction of acceleration of the movable object.
Owner:ASML NETHERLANDS BV