696 results about "Position control system" patented technology

A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part. The position control system comprises at least one reference object that is movable relative to the supporting part; a reference support device that supports the reference object relative to the first part, wherein the reference object and the reference support device form a reference mass-spring system; at least one position sensor that detects at least one attribute of the position of the second part relative to at least one of the reference objects, the position sensor including a sensor output for outputting a position signal representing at least one of the attributes; and an actuator, communicatively coupled to the position sensor, that is configured to adjust the position of the second part relative to the first part, in response to the position signal.

An articulated equipment position control system and method are provided for equipment consisting of motive and working components. The components are connected by an articulated connector, such as a pivotal hitch. GPS-derived positional data is utilized for power-articulating the hitch to maintain the working component, such as an implement, on a predetermined course. Operator-induced course deviations can thus be corrected. The working component can also be positioned to follow the course of the motive component. The system includes a microprocessor control subsystem, which interfaces with a steering guidance system.

The system is an integrated and self contained electric thruster system integral with a dynamic positioning control system for dynamic positioning of any waterborne vessel having a hull with at least two sides and a deck connecting the sides, at least two azimuthing thrusters, each removably mounted to the vessel, at least two self-contained electric power units removably secured to the deck, one for each thruster, at least one dynamic positioning computer connected to each of the self contained electric power units, at least one motion reference sensor connected to the dynamic positioning computer to correct reference position signals for motion of the vessel, at least one heading sensor, and at least one sensor that is either a position reference sensor connected to the dynamic positioning computer, environmental sensors connected to the dynamic positioning computer, or a combination thereof.

An encoder-type measurement system is configured to measure a position dependent signal of a movable object, the measurement system including at least one sensor mountable on the movable object a sensor target object mountable on a substantially stationary frame, and a mounting device configured to mount the sensor target object on the substantially stationary frame. The measurement system further includes a compensation device configured to compensate movements and / or deformations of the sensor target object with respect to the substantially stationary frame. The compensation device may include a passive or an active damping device and / or a feedback position control system. In an alternative embodiment, the compensation device includes a gripping device which fixes the position of the sensor target object during a high accuracy movement of the movable object.

A system, device, and computer program product is provided for the centralized or distributed warning of existing or developing significant events and / or threats to users of the device within their locale, while reporting the location of all users of the system to existing command and control systems. A pager-like user warning and positioning device, worn by or carried by the individual user, or mounted in a vehicle or vessel, having a geographical positioning means therein, periodically transmits the geographical location of the individual user, vehicle or vessel, and listens for warning / notification event messages transmitted by a network bridge or central station. When an event / threat warning is received by the device, the device alerts the user via indicia relative to the event / situation, including audible spoken warnings and instructions on how to react, and may retransmit the event / threat warning to other nodes in the network.

Systems and methods for controlling a rotating electromagnetic machine. The rotating machine, such as a permanent magnet motor or hybrid switched reluctance motor, includes a stator having a plurality of phase windings and a rotor that rotates relative to the stator. A drive is connected to the phase windings for energizing the windings. A controller outputs a control signal to the drive in response to an input demand such as a demanded speed or torque. Control methods (which can be implemented separately or in combination) include varying the gain of an estimator as a function of a demanded or estimated speed to position control system poles at desired locations, decoupling control system currents to achieve a constant torque with motor speed, compensating flux estimates of the estimator for saturation operation of the stator, estimating rotor position using averages of sample values of energization feedback, and calculating a trim adjusted speed error from a plurality of speed estimates.

A position control system for a substrate support of a lithographic apparatus includes a position measurement system configured to determine a position of a sensor or sensor target on the substrate support, a controller configured to provide a control signal based on a desired position of a target portion of the substrate and the determined position, and one or more actuators configured to act on the substrate support. The position control system includes a stiffness compensation model of the substrate support, the stiffness compensation model including a relation between a difference in a change in position of the target portion and a change in position of the sensor or sensor target as a result of a force exerted on the substrate support. The position control system is configured to substantially correct at least during projection of a patterned radiation beam on the target portion, the position of the target portion using the stiffness compensation model.

A position control system for a substrate support of a lithographic apparatus includes a position measurement system configured to determine a position of a sensor or sensor target on the substrate support, a controller configured to provide a control signal based on a desired position of a target portion of the substrate and the determined position, and one or more actuators configured to act on the substrate support. The position control system includes a stiffness compensation model of the substrate support, the stiffness compensation model including a relation between a difference in a change in position of the target portion and a change in position of the sensor or sensor target as a result of a force exerted on the substrate support. The position control system is configured to substantially correct at least during projection of a patterned radiation beam on the target portion, the position of the target portion using the stiffness compensation model.

An articulated equipment position control system and method are provided for equipment consisting of motive and working components. The components are connected by an articulated connector, such as a pivotal hitch. GPS-derived positional data is utilized for power-articulating the hitch to maintain the working component, such as an implement, on a predetermined course. Operator-induced course deviations can thus be corrected. The working component can also be positioned to follow the course of the motive component. The system includes a microprocessor control subsystem, which interfaces with a steering guidance system.

The present invention provides a position control system for a remote-controlled vehicle, a vehicle operated by the control system, and a method for operating a remote-controlled vehicle. An electromagnetic energy receiver is configured to receive an electromagnetic beam. The electromagnetic energy receiver is further configured to determine a position of the remote-controlled vehicle relative to a position of the electromagnetic beam. The vehicle is directed to maneuver to track the position of the electromagnetic beam.

Systems and methods for closed-loop feedback control of controllable devices using motion capture systems are disclosed. In one embodiment, a system includes a motion capture system configured to measure one or more motion characteristics of one or more controllable devices as the one or more controllable devices are operating within a control volume. A processor receives the measured motion characteristics from the motion capture system and determines a control signal based on the measured motion characteristics. A position control system receives the control signal and continuously adjusts at least one motion characteristic of the one or more controllable devices in order to maintain or achieve a desired motion state. The controllable device may be equipped with passive retro-reflective markers. The motion capture system, the processor, and the position control system comprise a complete closed-loop feedback control system.

Positional information of a movement plane of a wafer stage is measured using an encoder system such as, for example, an X head and a Y head, and the wafer stage is controlled based on the measurement results. At the same time, positional information of the wafer stage is measured using an interferometer system such as, for example, an X interferometer and a Y interferometer. When abnormality of the encoder system is detected or when the wafer stage moves off from a measurement area of the encoder system, drive control is switched to a drive control based on the measurement results of the interferometer system. Accordingly, drive control of the wafer stage can be performed continuously in the entire stroke area, even at the time when abnormality occurs in the encoder system.

Systems and methods for controlling a rotating electromagnetic machine. The rotating machine, such as a permanent magnet motor or hybrid switched reluctance motor, includes a stator having a plurality of phase windings and a rotor that rotates relative to the stator. A drive is connected to the phase windings for energizing the windings. A controller outputs a control signal to the drive in response to an input demand such as a demanded speed or torque. Control methods (which can be implemented separately or in combination) include varying the gain of an estimator as a function of a demanded or estimated speed to position control system poles at desired locations, decoupling control system currents to achieve a constant torque with motor speed, compensating flux estimates of the estimator for saturation operation of the stator, estimating rotor position using averages of sample values of energization feedback, and calculating a trim adjusted speed error from a plurality of speed estimates.

Systems and methods for closed-loop feedback control of controllable devices using motion capture systems are disclosed. In one embodiment, a system includes a motion capture system configured to measure one or more motion characteristics of one or more controllable devices as the one or more controllable devices are operating within a control volume. A processor receives the measured motion characteristics from the motion capture system and determines a control signal based on the measured motion characteristics. A position control system receives the control signal and continuously adjusts at least one motion characteristic of the one or more controllable devices in order to maintain or achieve a desired motion state. The controllable device may be equipped with passive retro-reflective markers. The motion capture system, the processor, and the position control system comprise a complete closed-loop feedback control system.

A rotational position-adjusting system (6) for a vertical takeoff and landing aircraft (4). The system (6) includes multiple detectors (60) that generate rotor signals. The rotor signals are indicative of the position of each rotor (8) of the aircraft (4). The rotors (8) provide lift to the aircraft (4). A controller (24) is coupled to the detectors (60) and adjusts the rotational speed of one or more of the rotors (8) in response to the rotor signals.

Control systems and methods that provide a high degree of vertical measurement accuracy for a body in motion are disclosed. The systems employ an inertial sensor system for vertical measurement and a Global Navigation Satellite System that includes multipath reduction or attenuation to provide corrected vertical information for a moving body to the inertial sensor system. The combination of these systems enables the maintenance of an accurate vertical position for said body.

A multi-joint fixture including a proximal base unit, one or more arms serially connected by electromagnetically lockable ball joints, and a distal hub. The ball joints unlock when not powered. A centering mechanism biases the ball joints toward a neutral position. A control system activates the electromagnetic brake with a high-then-low voltage profile. A headpiece attaches to the hub and holds a drape that covers the fixture. A connector connects a surgical device to the headpiece. A switch on the hub can be actuated via actuators on the headpiece or connector.

The invention relates to an industrial applied guide-way linear-electric machine feed platform of driving magnetic suspension machine tool, containing guide way stationarily supported on the machine base, moving platform and linear electric machine, where the electric machine is in the center line of the guide way, and the top and bottom surfaces of the guide way are set with bearing electromagnet, two side surfaces of the guide way are set with guiding electromagnet, the bearing and guiding electromagnets are stationarily linked with the moving platform, both set with displacement sensors and linked with a control system of the moving platform. It largely heightens the platform feed speed and precision, and has adjustable support rigid damping, no friction, etc.

When an operator operates a pointing device, a direction computing section computes a movement vector from an image photographed by an image sensor, and when the movement vector is larger than a threshold, a direction correcting section determines the movement vector as invalid based on the recognition that the movement vector was caused by an abrupt change in the illumination or other conditions, and outputs only movement vectors that are smaller than the threshold to a coordinate position updating section.

In an automatic vehicle position control system, such as a satellite-based agricultural implement steering system, the satellite-based steering information is adjusted with information obtained from one or more path sensors to facilitate the automatic nudging of the vehicle to take account of inaccurate tracking of the agricultural implement relative to its tractor, terrain variations, and inaccuracies in the satellite-based steering system.

The present invention provides a position control system for a remote-controlled vehicle, a vehicle operated by the control system, and a method for operating a remote-controlled vehicle. An electromagnetic energy receiver is configured to receive an electromagnetic beam. The electromagnetic energy receiver is further configured to determine a position of the remote-controlled vehicle relative to a position of the electromagnetic beam. The vehicle is directed to maneuver to track the position of the electromagnetic beam.

An auxiliary power unit (APU) includes a controller that controls the position of an APU inlet door, and thus ram air flow to the APU, to ensure optimal starting conditions are attained and maintained in the APU during APU startup operations. The controller receives a signal representative of an APU operational parameter and, in response, to supplies APU inlet door position commands. An APU inlet door actuator is coupled to the APU inlet door and, in response to the APU inlet door position commands, moves the APU inlet door to the commanded position.

A device for preventing backlash in a gear train, comprising a first and second drive gear, driven by a first and second motor, with a driven gear, a system controller defining a nominal trajectory of said driven gear, a position feedback controller for calculating a speed set point, a phase controller for calculating a difference between said first and second motor torque, providing torque upper and lower levels, comparing said difference to said upper and lower levels and adjusting the phase set point for said first and second motors based at least upon the comparing, where the phase is reduced if said difference is greater than or equal to said upper level, said phase is increased if said difference is less than or equal to said lower level, and said phase is kept constant if said difference is greater than said lower level and less than said upper level.

A dozer blade control system controls the position of a bulldozer blade, maintaining the blade at a constant position as the dozer travels through a worksite. The control system monitors the angle of the dozer blade with respect to the earth and when it senses that the dozer blade is tilting, it corrects the dozer blade's position by extending or retracting hydraulic cylinders that couple the dozer blade to the chassis of the crawler-tractor. When the dozer chassis pitches forwards, the blade begins to tilt forward and to drop closer to the ground. The control system senses this forward rotation of the blade and retracts the hydraulic cylinders that couple the blade to the chassis, causing the blade to return to and maintain its original position. Conversely, when the dozer chassis pitches backwards and the blade begins to tilt backward and rise higher above the ground, the control system extends the hydraulic cylinders coupling the blade to the chassis and lowers the blade, causing the blade to return to and maintain its original position with respect to the earth.

A rail position control system is provided that controls a conveyor system configuration to accommodate a plurality of differently sized substrates in an apparatus. The rail position control system includes at least one camera, which is mounted on a mounting surface located in close proximity to the conveyor system. The rail position control system further includes a computer system that is operatively coupled to the camera and to a motor. The motor is further coupled to at least one rail of the conveyor system. The camera is operative to view and provide a plurality of images of a conveyor lane width value to the computer system. The conveyor lane width value represents a space located between at least one pair of rails of the conveyor system. The computer system responds by processing the plurality of images of the conveyor lane width value to generate a rail position adjustment value, which is communicated, via control signals, to the motor to actuate the motor to move the at least one rail a distance representing the rail position adjustment value.

Solutions for minimizing the impact of servicing a turbo machine are disclosed. In one embodiment, an apparatus for conveying a turbo machine component can include: a motive system for moving the apparatus along a surface; a platform system operably connected to the motive system, the platform system for supporting the component of the turbo machine, the platform system can include: a first portion fixed to the motive system; and a second portion moveably coupled to the first portion, the second portion for modifying a position of the turbo machine component; and a control system operably connected to the platform system, the control system for controlling at least one of a rate of movement or a direction of the second portion of the platform system.

A position control system is used for controlling a fluid operated cylinder having at least one fluid chamber defined by a piston located within a housing for movement between first and second end limits of travel. The system includes at least two electrically actuated proportional flow control valves connected to each port of the cylinder for selectively and proportionally controlling fluid flow into and out of the at least one chamber. At least one pressure sensor is provided for measuring fluid pressure with respect to each chamber. At least one discrete position sensor is located adjacent a midpoint of the cylinder for sensing a discrete centered position of the piston. A controller includes a program and is operably connected for controlling actuation of the at least two valves in response to pressure measured by the at least one pressure sensor and location measured by the at least one position sensor.

A materials processing system adapted for the reduction of metallic materials including a material feed portion configured to convey materials to a mill portion comprising a motor driven rotor in close running fit with a cage mounted grate through which reduced material is discharged onto a conveyer. The cage is biased to a closed operating position by one or more hydraulic rams. A control system receives signals from a speed sensor operatively coupled to the rotor, and is configured to regulate the hydraulic rams, thereby controlling the opening and closing of the cage in response to rotation of the rotor. The control system is further configured to regulate the operation of the materials feed portion to suspend material feed during opening of the cage, permitting trapped or jammed material to be expelled from the mill portion.