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104 results about "Mass spring" patented technology

Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device

A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part. The position control system comprises at least one reference object that is movable relative to the supporting part; a reference support device that supports the reference object relative to the first part, wherein the reference object and the reference support device form a reference mass-spring system; at least one position sensor that detects at least one attribute of the position of the second part relative to at least one of the reference objects, the position sensor including a sensor output for outputting a position signal representing at least one of the attributes; and an actuator, communicatively coupled to the position sensor, that is configured to adjust the position of the second part relative to the first part, in response to the position signal.
Owner:ASML NETHERLANDS BV

Simulation Method of Soft Tissue Deformation Based on Meshless Galerkin and Particle Spring Coupling

The invention relates to an object deformation real-time simulation graphic processing technique, particularly a soft tissue deformation simulation method based on coupling of mesh-free Galerkin and mass spring, which comprises the following steps: in the pretreatment process, establishing a linear viscoelasticity biomechanical model for soft tissues; in the deformation computation process, dynamically partitioning a mesh-free region and a mass spring region according to the load carried by the soft tissues, establishing a transitional unit of the connection region between the mesh-free region and mass spring region, and constructing a transitional unit approximation displacement function, thereby implementing self-adapting coupling of a mesh-free Galerkin method and a mass spring method;and in the after-treatment process, outputting the state of the mass or node of each time step in the deformation process onto a screen, carrying out illumination rendering, and finally displaying the real-time deformation process of the soft tissue organ under stressed conditions on the screen, thereby implementing visualization effect of dynamic deformation. By utilizing the advantage of high efficiency in the mass spring method and the advantages of high precision and no need of mesh reconstruction in the mesh-free Galerkin method, the invention overcomes the defect that the Galerkin method is not suitable for solving a large-scale problem, thereby effectively lowering the complexity of computation in the soft tissue deformation simulation and enhancing the operation efficiency.
Owner:NORTH CHINA UNIV OF WATER RESOURCES & ELECTRIC POWER

Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device

A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part. The position control system comprises at least one reference object that is movable relative to the supporting part; a reference support device that supports the reference object relative to the first part, wherein the reference object and the reference support device form a reference mass-spring system; at least one position sensor that detects at least one attribute of the position of the second part relative to at least one of the reference objects, the position sensor including a sensor output for outputting a position signal representing at least one of the attributes; and an actuator, communicatively coupled to the position sensor, that is configured to adjust the position of the second part relative to the first part, in response to the position signal.
Owner:ASML NETHERLANDS BV

Design and structure of self-locking type rail base dynamic vibration absorber

The invention discloses the design and a structure for a self-lock type rail bottom dynamic vibration absorber. An elastic element (3) is paved under a steel rail (1); the middle part of the elastic element is buried with one or more resonant mass blocks (4, 5) in an adhesion mode or an non-adhesion mode; the mass and the distribution positions of the resonant mass blocks are optimized according to the maximum vibration-absorbing amplitude; the elastic element and the resonant mass blocks form a multi-mode dynamic resonant mass-spring unit; and a self-lock type magazine clip (2) passes through the elastic element along the vertical direction of the steel rail and then is clamped at side edges of both ends of a rail root of the steel rail to firmly lock the elastic element on the bottom of the steel rail; when the steel rail vibrates, the dynamic resonant mass-spring unit produces the resonance, thereby realizing the suppression to the vibration of the steel rail and the transfer and absorption to vibration energy, attenuating the amplitude of the steel rail, and reducing the noise radiation of the steel rail caused by the vibration; at the same time, the design can also inhibit the generation and increase of the waviness corresponding to resonant frequency bands of the wave of the steel rail, thereby controlling the excitation of the waviness of the steel rail to a wheel rail and the produced vibration and noise, reducing the action force of the wheel rail, and increasing the riding comfortableness .
Owner:洛阳双瑞橡塑科技有限公司

A method for calculating a sound absorption coefficient of a porous material

ActiveCN109388886ASimplify complex calculationsContribute to theoretical researchGeometric CADSustainable transportationMATLABEquivalent model
The invention discloses a method for calculating a sound absorption coefficient of a porous material, comprising the following five steps: Step 1: the sound absorption model of the single hole is equivalent, including obtaining the stiffness k of the single hole sound absorption equivalent model based on the analogy equivalent theory of the acoustic force line, and obtaining the damping loss factor eta through the sound absorption simulation calculation of the single hole; Step 2: creating a random distribution function, generating a 3D Voronoi diagram in Matlab software, and getting the coordinates of the point; Step 3: performing modeling with the Java language combined with Matlab and finite element analysis software; Step 4: establishing a spatial random array mass-spring-damping system equivalent model of the porous material; Step 5: performing simulation analysis to obtain the energy loss curve, that is, the sound absorption coefficient curve. The invention can establish an acoustic equivalent model of the porous material which is simple and applicable, and simplifies the complicated calculation of the sound absorption performance of the porous material; the method reduces the design and experiment cost, and accelerate the development speed of the product.
Owner:SHANDONG UNIV OF TECH
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