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33results about How to "High coordinate accuracy" patented technology

Collaborative robot hand-eye relation automatic calibration device and method

The invention provides a collaborative robot hand-eye relation automatic calibration device and method. The calibration device comprises a collaborative robot force control pulling teaching button, acalibration probe, a calibration plate with a marker and a calibration system, wherein the calibration system is mainly used for controlling the robot button to move according to a preset track; target points in the preset track automatically acquire pixel coordinates of the center point of the marker and coordinate dot pairs of a robot; and calibration parameters are calculated according to the obtained multiple dot pairs. The calibration method comprises the steps of placing the calibration plate; pulling the collaborative robot to a teaching point and recording coordinates of the robot; pulling the collaborative robot to an initial photographing point, recording the coordinates of the robot and configuring a matched template; controlling the robot to continuously change the photographing point and acquiring the coordinates of the robot and the pixel coordinate dot pairs of the marker; and calculating the calibration parameters. Through the collaborative robot hand-eye relation automatic calibration device and method, the hand-eye relation of the collaborative robot can be conveniently and quickly calibrated, the calibration precision is high, and the collaborative robot hand-eyerelation automatic calibration device and method have the important significance in industrial grabbing and application of the collaborative robot.
Owner:SIASUN CO LTD

X-shaped corner extraction method based on image contour

The invention proposes an X-shaped corner extraction method based on an image contour, and relates to the technical field of visual detection. The method comprises the steps: sequentially traversing Harris corners on one contour through the construction of a window: taking a point which has the smallest coordinate mean value relative to seven corners as an X-shaped corner when the number of traversed corners is seven, carrying out the traversing of a next contour, extracting the X-shaped corner when the number of corners is four, and completing the extraction of X-shaped corners of all contours. The method can achieve the filtering of pseudo corners in an image, and can achieve the precise detection of a corner point in the image, wherein the detection precision can reach 0.09 pixels. Through the setting of the surrounding background of a corner, the method enables a mark point not to be affected by a feature point in an environment, and achieves the detection of the corner in a complex scene. Through combining with the advantages of Harris precise extraction and contour positioning, the method achieves the subpixel-level detection of a laid corner, and improves the coordinate precision of the corner. Through the dynamic adjustment of an image preprocessing threshold value, the method reduces the impact from the illumination in different scenes, and improves the corner detection success rate.
Owner:ANSTEEL GRP MINING CO LTD

Photomask manufacturing method, photomask inspecting method, photomask inspecting apparatus, and drawing device

The invention provides a photomask manufacturing method, a photomask inspection method, a photomask inspection apparatus, and a drawing device, which are capable of improving the coordinate precision of a pattern formed on a transferred body. The photomask manufacturing method according to the invention comprises the steps of: preparing pattern design data (A); obtaining transferred face correction data (D) representing the deformation of a main surface due to the maintaining of a photomask to an exposure apparatus and the deformation other than the dead weight deflection component; obtaining height distribution data (E) in the drawing which represent the height distribution of the main surface under such a state that the photomask green body is loaded to a work table of the drawing device; obtaining drawing differential data through the difference between the height distribution data (E) in the drawing and the transferred face correction data (D); calculating a coordinate deviation value corresponding to the drawing differential data (F), and determining coordinate deviation value data (G) for drawing; and using the coordinate deviation value data (G) for drawing and the pattern design data (A) for a drawing process on the photomask green body.
Owner:HOYA CORP

Alignment method and apparatus of mask pattern

InactiveUS20090284719A1Improve accuracyImprove accuracy in pattern-arrangement of the second layerPhotomechanical apparatusPhotographic printingRotation errorEngineering
An alignment method of mask patterns in patterning processes includes forming a first layer by transferring a first mask pattern onto a wafer or a layer formed on the wafer, and forming a second layer by transferring a second mask pattern onto the first layer. The method particularly includes a first alignment step of performing, when forming the first layer, alignment for minimizing offset between a center position of the wafer and a center position of the first mask pattern and a residual rotation error between the wafer and the first mask pattern, and alignment based on an amount of deviation of superposition of the second layer pattern on the first layer pattern. The deviation is caused by linear expansion and contraction of a wafer and caused by an orthogonal error between a wafer and a mask pattern, and also the deviation is obtained by measuring in advance in pattering processes successively performed for a plurality of wafers. The method also includes a second alignment step of performing, when forming the second layer, only alignment for minimizing offset between a center position of the first layer pattern and a center position of the second mask pattern and a residual rotation error between the first layer pattern and the second mask pattern.
Owner:TDK CORPARATION

Detector signal readout circuit, detector and signal processing method

The invention discloses a detector signal readout circuit, a detector and a signal processing method. Cathode signal output ends of each row of SiPM (Silicon Photomultipliers) pixels of an SiPM arrayare connected to form M row common connection ends, anode signal output ends of each column of the SiPM pixels are connected to form N column common connection ends, each row common connection end andeach column common connection end are connected with a signal readout circuit, in the case that the SiPM array is in a Geiger mode, the signal readout circuit can filter out alternating current signals of each row and each column, the M-row signal readout circuit can carry out weighted summation on the M-row cathode alternating current signals to obtain two row signals, the N-column signal readout circuit can carry out weighted summation on the N-column anode alternating current signals to obtain two column signals. According to the circuit, the detector and the method in the invention, setting of weight coefficients of the sub-circuits in the rows and columns enables the coordinate precision of the position of a scintillation crystal obtained through a gravity center method based on therow and column signals higher, also, large numbers of shunting resistors and analog amplifiers are not needed, so that the electronics complexity of the circuit and the area of the readout board are reduced.
Owner:SHENZHEN INST OF ADVANCED TECH

A method for automatic calibration of hand-eye relationship of collaborative robots

The invention provides a collaborative robot hand-eye relation automatic calibration device and method. The calibration device comprises a collaborative robot force control pulling teaching button, acalibration probe, a calibration plate with a marker and a calibration system, wherein the calibration system is mainly used for controlling the robot button to move according to a preset track; target points in the preset track automatically acquire pixel coordinates of the center point of the marker and coordinate dot pairs of a robot; and calibration parameters are calculated according to the obtained multiple dot pairs. The calibration method comprises the steps of placing the calibration plate; pulling the collaborative robot to a teaching point and recording coordinates of the robot; pulling the collaborative robot to an initial photographing point, recording the coordinates of the robot and configuring a matched template; controlling the robot to continuously change the photographing point and acquiring the coordinates of the robot and the pixel coordinate dot pairs of the marker; and calculating the calibration parameters. Through the collaborative robot hand-eye relation automatic calibration device and method, the hand-eye relation of the collaborative robot can be conveniently and quickly calibrated, the calibration precision is high, and the collaborative robot hand-eyerelation automatic calibration device and method have the important significance in industrial grabbing and application of the collaborative robot.
Owner:SIASUN CO LTD

Face gear error detection and machining control method, device and system

The invention provides a face gear error detection and machining control method, device and system. The face gear error detection and machining control method comprises the following steps: obtaining tooth surface grid node coordinates of a standard face gear; determining a tooth surface grid node theoretical coordinate C and a tooth surface normal vector nc in the tooth center theoretical coordinate system according to the tooth surface grid node coordinate of the standard surface gear; acquiring the actual coordinate Tf of a tooth surface grid node in the actual coordinate system of the tooth center of the to-be-corrected face gear; determining a correction value H of the to-be-corrected face gear according to the theoretical coordinate C and the tooth surface normal vector nc of the tooth surface grid node in the tooth center theoretical coordinate system and the actual coordinate Tf of the tooth surface grid node in the tooth center actual coordinate system; and controlling the face gear correction equipment to correct the to-be-corrected face gear according to the correction value H. According to the scheme, operation is easy, face gear detection and machining precision is improved, errors are reduced, and meanwhile the method is suitable for error detection and control of tooth surfaces of different face gears.
Owner:HUBEI UNIV OF ARTS & SCI

Method for manufacturing photomask, inspection method, and inspection device

The invention provides a method for manufacturing a photomask, an inspection method and an inspection apparatus, which can improve the coordinate accuracy of a pattern formed on a transferred object.The method for manufacturing a photomask comprises the steps of: preparing pattern design data (A); obtaining transfer surface correction data (D) indicating the amount of deformation of the main surface due to the holding of the photomask to the exposure device and the amount of deformation other than the deadweight deflection component; obtaining drawing height distribution data (E) representingthe height distribution of the main surface in a state where the photomask blank is placed on a workbench of a drawing device; drawing differential data (F) are obtained through the difference between the height distribution data (E) and the transfer surface correction data (D) during drawing; calculating a coordinate deviation amount corresponding to the drawing differential data (F), and obtaining coordinate deviation amount data (G) for drawing; and a drawing step in which drawing is performed on the photomask blank using the coordinate deviation amount data (G) for drawing and the patterndesign data (A).
Owner:HOYA CORP

Novel CNC wire cutting machine

The invention relates to a novel CNC wire cutting machine which can effectively improve the coordinate accuracy of a horizontal plate and a longitudinal plate. The novel CNC wire cutting machine comprises a machine tool body, a workbench, a wire walking mechanism, a high-frequency pulse power supply, a liquid supply system and an electrode wire. The workbench comprises a horizontal plate, a longitudinal plate and a displacement device. The horizontal plate is arranged on the top face of the machine tool body through the displacement device. The longitudinal plate is arranged on the top of the horizontal plate through the displacement device. The displacement device comprises a bottom plate and a top plate. A thread rod is fixed at the end of the top plate in a parallel mode. A middle rotating shaft is vertically arranged on the bottom plate. A worm wheel is arranged on the middle rotating shaft through a bearing. The worm wheel is meshed with a thread face of the thread rod. A motor box is arranged on the bottom plate. The motor box comprises a speed reducing motor, a worm and a worm adjusting sleeve. One end of the worm is arranged at the output end of the speed reducing motor. Spiral-shaped gear teeth meshed with the worm wheel are arranged on the worm. The thickness of the gear teeth are gradually increased from one end to the other end in the axial direction. The other end of the worm moves relatively in the axial direction in a worm adjusting sleeve.
Owner:TAICANG SHUNCHANG FORGE

Image acquisition equipment, water level detection equipment, water level detection method and storage medium

The embodiment of the invention provides image an image acquisition equipment, water level detection equipment, a water level detection method and a storage medium. The image acquisition equipment comprises a visible light imaging unit which is used for imaging a visible light signal reflected by a water gauge, and obtaining a visible light image of the water gauge, an invisible light imaging unitwhich is used for imaging an invisible light signal reflected by the water gauge to obtain an invisible light image of the water gauge, and an image processing unit which is used for determining coordinates of a water line in the invisible light image of the water gauge and calculating water level data according to the calibration data in the visible light image of the water gauge and the coordinates of the water line in the invisible light image of the water gauge. A water area has high absorptivity to non-visible light, the contrast ratio of the water area and the water gauge in the non-visible light image is high, and and therefore, influence of various external factors on the image definition is reduced, so that the accuracy of the water line detected in the non-visible light image ishigh, and the accuracy of a water level detection result is improved.
Owner:HANGZHOU HIKVISION SYST TECH

Guideboard generation method and device and electronic equipment

The invention relates to a guideboard generation method and device and electronic equipment. The method comprises the following steps: acquiring multiple frames of target images; respectively extracting feature points in each target image, and matching the feature points in two adjacent frames of target images to obtain relative poses of the two adjacent frames of target images and three-dimensional coordinates corresponding to the feature points; according to a preset absolute pose and each relative pose of one frame of target image, respectively determining absolute poses of other target images; performing graph optimization according to the absolute pose and the three-dimensional coordinates and the pixel coordinates of the feature points to obtain an optimized absolute pose; obtaining an optimized relative pose corresponding to each target image according to the optimized absolute pose; and triangulation is carried out according to the optimized relative pose and the pixel coordinates corresponding to the angular points of the target guideboard, and optimized three-dimensional coordinates of the angular points are obtained. According to the scheme provided by the invention, the coordinate precision of the guideboard angular points can be improved, and the method has relatively high robustness so as to deal with the processing of each guideboard.
Owner:ZHIDAO NETWORK TECH (BEIJING) CO LTD

New cnc wire cutting machine

The invention relates to a novel CNC wire cutting machine which can effectively improve the coordinate accuracy of a horizontal plate and a longitudinal plate. The novel CNC wire cutting machine comprises a machine tool body, a workbench, a wire walking mechanism, a high-frequency pulse power supply, a liquid supply system and an electrode wire. The workbench comprises a horizontal plate, a longitudinal plate and a displacement device. The horizontal plate is arranged on the top face of the machine tool body through the displacement device. The longitudinal plate is arranged on the top of the horizontal plate through the displacement device. The displacement device comprises a bottom plate and a top plate. A thread rod is fixed at the end of the top plate in a parallel mode. A middle rotating shaft is vertically arranged on the bottom plate. A worm wheel is arranged on the middle rotating shaft through a bearing. The worm wheel is meshed with a thread face of the thread rod. A motor box is arranged on the bottom plate. The motor box comprises a speed reducing motor, a worm and a worm adjusting sleeve. One end of the worm is arranged at the output end of the speed reducing motor. Spiral-shaped gear teeth meshed with the worm wheel are arranged on the worm. The thickness of the gear teeth are gradually increased from one end to the other end in the axial direction. The other end of the worm moves relatively in the axial direction in a worm adjusting sleeve.
Owner:TAICANG SHUNCHANG FORGE

A detector signal readout circuit, detector and signal processing method

The invention discloses a detector signal readout circuit, a detector and a signal processing method. Cathode signal output ends of each row of SiPM (Silicon Photomultipliers) pixels of an SiPM arrayare connected to form M row common connection ends, anode signal output ends of each column of the SiPM pixels are connected to form N column common connection ends, each row common connection end andeach column common connection end are connected with a signal readout circuit, in the case that the SiPM array is in a Geiger mode, the signal readout circuit can filter out alternating current signals of each row and each column, the M-row signal readout circuit can carry out weighted summation on the M-row cathode alternating current signals to obtain two row signals, the N-column signal readout circuit can carry out weighted summation on the N-column anode alternating current signals to obtain two column signals. According to the circuit, the detector and the method in the invention, setting of weight coefficients of the sub-circuits in the rows and columns enables the coordinate precision of the position of a scintillation crystal obtained through a gravity center method based on therow and column signals higher, also, large numbers of shunting resistors and analog amplifiers are not needed, so that the electronics complexity of the circuit and the area of the readout board are reduced.
Owner:SHENZHEN INST OF ADVANCED TECH
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