36results about How to "Solve Stretching Problems" patented technology

The invention provides a gray scale quantification method of a mask true image and a related product. The gray scale quantization method comprises the following steps: simulating a target mask to obtain a simulation space image; acquiring an actual measurement space image of the target mask acquired by image acquisition equipment; restoring the actually measured pixel value of the actually measured space image into an incident light intensity value by using a photoelectric response model of the image acquisition equipment; acquiring simulation light intensity values of a plurality of preset positions in the simulation space image and incident light intensity values of corresponding actual measurement positions; calibrating the simulation light intensity value of the simulation space image by using the simulation light intensity values of the plurality of preset positions and the incident light intensity values of the corresponding actual measurement positions to obtain a corrected light intensity image; and performing spatial registration on the corrected light intensity image and the actual light intensity image. According to the method, the problem of distortion caused by improper compression or stretching of the pixel value range in the actual measurement space image and the simulation space image is solved, the accuracy of gray quantization is improved, and the comparability between the simulation space image and the actual measurement space image is improved.