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Array type smell detecting element based on MEMS (Micro Electro Mechanical System) technology

The invention relates to the field of gas sensitive sensors, and in particular relates to an array type smell detecting element based on an MEMS (Micro Electro Mechanical System) technology. The problem that the individuals in the gas sensitive sensor array used by the existing electronic nose are not uniform in response to characteristic drift is solved. The detecting element comprises a semi-conductor substrate, as well as a gas sensitive unit, a temperature sensing unit for detecting the working temperature of the gas sensitive unit, and a heating unit for heating the gas sensitive unit to the needed working temperature, wherein the gas sensitive unit, the temperature sensing unit and the heating unit are obtained by being processed with the MEMS processing technology on the semi-conductor substrate; the gas sensitive unit comprises a plurality of gas sensitive metallic oxide thin films which are arranged in the light of an array; the gas sensitive metallic oxide thin films are different in size parameters but the same in type; and each thin film is provided with two electrodes for connection with data acquisition equipment. The array type smell detecting element is simple in structure and can be realized by being processed with the MEMS technology which is relatively maturely developed; and in addition, the array type smell detecting element is beneficial to the realization of the integration and the miniaturization of the electronic nose and achieves reasonableness in method and correctness in identification.
Owner:ZHONGBEI UNIV
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