The invention relates to the field of gas sensitive sensors, and in particular relates to an array type smell detecting element based on an MEMS (Micro Electro
Mechanical System) technology. The problem that the individuals in the gas sensitive
sensor array used by the existing electronic
nose are not uniform in response to characteristic drift is solved. The detecting element comprises a semi-conductor substrate, as well as a gas sensitive unit, a
temperature sensing unit for detecting the
working temperature of the gas sensitive unit, and a heating unit for heating the gas sensitive unit to the needed
working temperature, wherein the gas sensitive unit, the
temperature sensing unit and the heating unit are obtained by being processed with the MEMS
processing technology on the semi-conductor substrate; the gas sensitive unit comprises a plurality of gas sensitive metallic
oxide thin films which are arranged in the light of an array; the gas sensitive metallic
oxide thin films are different in size parameters but the same in type; and each thin film is provided with two electrodes for connection with
data acquisition equipment. The array type smell detecting element is simple in structure and can be realized by being processed with the MEMS technology which is relatively maturely developed; and in addition, the array type smell detecting element is beneficial to the realization of the integration and the
miniaturization of the electronic
nose and achieves reasonableness in method and
correctness in identification.