The invention provides a superjunction
semiconductor device and a method of manufacturing the superjunction
semiconductor device, which can restrain
voltage resistance reduction caused by manufacturing deviation. The
semiconductor device has an active region (30) through which current flows and a termination structure region (40). On a front surface of a semiconductor substrate (1) of a first
conductivity type, a first semiconductor layer (2) of the first
conductivity type is provided. On a surface of the first semiconductor layer (2) in the active region (30), a first parallel pn structure isprovided including first columns (3a) of the first
conductivity type and second columns (4a) of a second conductivity type disposed repeatedly alternating one another in a
plane parallel to the frontsurface. In the termination structure region (40), a second parallel pn structure is provided including third columns (3b) of the first conductivity type and fourth columns (4b) of the second conductivity type disposed repeatedly alternating one another. On a surface of the second parallel pn structure, a first semiconductor region (17) of the second conductivity type is provided including pluralregions apart from one another.