Method for joining a
differential pressure measuring
cell (1), which
differential pressure measuring
cell (1) comprises: a measuring diaphragm (2); a
transducer, a first and a second counterbody (41, 42), and a first and a second support body (51, 52), - wherein the measuring membrane (2) is arranged between the first counterbody (41) and the second counterbody (42) and is pressure-tightly connected to both counterbodies (41,42), - wherein a first measuring chamber (61) is formed between the measuring membrane (2) and the first counterbody (41) and a second measuring chamber (62) is formed between the measuring membrane (2) and the second counterbody (42), - wherein the first counterbody (41) and first support body (51) as well as the second counterbody (42) and second support body (52) each have a pressure channel (7) through which the first measuring chamber (61) can be subjected to a first pressure (p1) and the second measuring chamber (62) to a second pressure (p2) and - wherein the
transducer is designed to generate an electrical measurement
signal from a deformation of the measuring membrane (2) caused by the difference between the first pressure (p1) and the second pressure (p2), wherein the joining process is divided into the following process steps: -
Prefabrication of the two counter bodies (41,42) and pressure-tight connection of the measuring membrane (2) to the two counter bodies (41,42), - Applying a joining material (FM) to the end face (13a) of the first support body (51) facing the measuring membrane (2) or to the end face (12a) of the first counter body (41) facing away from the measuring membrane (2) and to the end face (13b) of the second support body (52) facing the measuring membrane (2) or to the end face (12b) of the second counter body (42) facing away from the measuring membrane (2), wherein on at least one of the end faces (12a, 12b, 13a, 13b) the joining material (FM) is structured during application such that • the end face (12a; 12b; 13a; 13b) has a continuous, internal area (31) without joining material (FM), • the end face (12a; 12b; 13a; 13b) has a continuous outer area (32) surrounding the inner area (31) with joining material (FM), - Pressure-tight connection of the end face (12a, 12b) of the counter body (41,42) facing away from the measuring membrane (2) with the end face (13a,13b) of the support body (51,52) facing the measuring membrane (2), wherein, in the connection of at least one of the counter bodies (41;42) with the adjacent support body (51;52) through the connected inner area (31) without joining material (FM) a hydraulic chamber (8) is formed between the counter body (41;42) and the support body (51;52), wherein the hydraulic chamber (8) formed by the continuous inner area (31) without joining material (FM) has a
maximum diameter (dS) which deviates by no more than 20% from the
diameter (dM) of the measuring diaphragm (2), and wherein the hydraulic chamber (8) communicates with the measuring chamber (61;62) via the pressure channel (7).