The invention discloses a silicon slice optimal scheduling method, which comprises the following steps: a, acquiring a macro transmission sequence; b, converting the macro transmission sequence into a plurality of sub task sequences; c, when a task is run, selecting at least one sub task from each sub task subsequence; d, according to preset rules, on the premise of smooth execution, executing a sub task with the highest priority; and e, repeating the steps c and d and completing the transmission and processing of silicon slices. In the invention, on the basis of the macro transmission sequence, a lower layer micro transmission sequence execution policy is optimized, so the concurrency of the execution of the sub tasks is improved, the execution efficiency of Job is improved and consequently yield of a machine is increased.