The embodiments of the present invention disclose an array type terahertz vacuum
diode device and a manufacturing method thereof. The array type terahertz vacuum
diode device comprises a substrate anda plurality of terahertz vacuum diodes; the plurality of terahertz vacuum diodes are arranged in an array on the substrate; each of the terahertz vacuum diodes comprises a
photocathode, a vacuum channel layer and an
anode; the vacuum channel layer is provided with a vacuum channel; the vacuum channel extends through the vacuum channel layer; the
photocathode and the
anode are disposed at two endsof the vacuum channel respectively; a sealed cavity is formed among the
photocathode, the vacuum channel layer and the
anode; the vacuum channel is in the shape of a circular truncated cone; and thecontact area of the photocathode and the vacuum channel is smaller than the contact area of the anode and the vacuum channel. The array type terahertz vacuum
diode device provided by the embodiments of the present invention is a novel terahertz vacuum electronic device.