The invention relates to a
hydrogen tail gas emission safety detection
system, which is characterized in that a
gas monitoring system, a
nitrogen dilution system, an alarm system and a safety emergency
interlocking system are additionally arranged on the basis of the structure of a CVD (
chemical vapor deposition) or ICP (
inductively coupled plasma)
hydrogen tail gas emission system in the prior art, the safety of exhausted gas is monitored, and corresponding protection measures are set. The device has the advantages that the structural design is reasonable, the
hydrogen and
oxygen concentration detectors are arranged on the
tail gas emission pipeline of the CVD or ICP hydrogen tail gas emission system and interlocked with the
nitrogen pipeline, the condition of gas in the pipeline can be better monitored, when the hydrogen or
oxygen concentration exceeds the standard, an alarm can be automatically given at first, the emission
air volume can be manually increased according to needs, and the
emission efficiency is improved. Early warning is realized, and dangerous sources are eliminated; when the secondary standard exceeds the standard, a
dilution means can be automatically adopted in time,
nitrogen purging is started, and the
hydrogen concentration is reduced. Explosion and fire accidents can be effectively prevented, property loss is avoided in time, safety protection is provided, and the safety facility design can be effectively met.