The invention discloses a variable frequency
oxygen sensor. A first
solid electrolyte layer and a cavity layer define a first
closed cavity, a second
solid electrolyte layer and the cavity layer define a second
closed cavity, the cavity layer is provided with a closed inner cavity located between the first
closed cavity and the second closed cavity, the closed inner cavity is isolated from a to-be-detected
atmosphere through the first
solid electrolyte layer, the cavity layer and the second solid electrolyte layer, an outer
electrode is arranged on the side, which faces a sensitive
electrode pin layer, of the first solid electrolyte layer, a first common
electrode is arranged on the side, which faces the cavity layer, of the first solid electrolyte layer, the first common electrode is accommodated in the first closed cavity, a second common electrode is arranged on the side, which faces the cavity layer, of the second solid electrolyte layer, an inner electrode is arranged on the side, which faces a
blocking layer, of the second solid electrolyte layer, and the second common electrode is accommodated in the second closed cavity. According to the variable-frequency
oxygen sensor disclosed by the invention, the
cold start time is shortened, and the condition that the closed inner cavity is cracked due to high and low temperature circulation can be avoided.