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70results about How to "Reduce step difference" patented technology

Production method for array substrate of active-matrix organic light-emitting display (OLED)

The invention discloses a production method for an array substrate of an active-matrix organic light-emitting display (OLED). The production method comprises the following steps of: providing a substrate; forming a first semiconductor graph and a second semiconductor graph on the substrate; continuing to form a grid insulating layer and a first metal layer, and forming a grid by photo-etching; depositing an interlayer insulating layer, and forming four contact holes by means of etching; continuing to form a second metal layer, a source, a drain and a storage capacitor electrode; then continuing to form a passivation insulating layer and a transparent electrode layer; and finally forming a protecting film layer and an evaporation material layer on the whole surface, and exposing by a multi-grey-scale mask plate to form a stepped protecting film layer. In the production method for the array substrate of the OLED provided by the invention, the multi-grey-scale mask plate is used for exposing to form the stepped protecting film layer, thus effectively reducing the step difference of the protecting film layer and decreasing the occurrence probability of the poor display of the point defects of an AMOLED (active-matrix/organic light-emitting diode), and then improving the display quality of the AMOLED.
Owner:KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT
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