The invention discloses a high-sensitivity pendulous micromachined
silicon accelerometer and a preparation method thereof. The micromachined
silicon accelerometer comprises a
silicon substrate and a silicon sensitive structure which are connected into a whole; the silicon sensitive structure comprises a stress release structure, two pairs of support beams, a pair of
coupling sensitive
mass blocksand a pair of anchor points, the
coupling sensitive
mass blocks are symmetrically arranged, each
coupling sensitive
mass block is connected with the corresponding
anchor point through one independentsupport beam and is in coupling connection with the stress release structure through the other independent support beam, and the
mass center of each coupling sensitive mass block is located in the middle point of the support beam connected with the
anchor point; and in the preparation method,
dry etching preparation is adopted. The micromachined silicon
accelerometer has the advantages that the device space
utilization rate is high, the effective detection area of the sensitive mass blocks is large, the flexibility and the finished product rate are high, the cost is low, the
processing qualityis high, the
processing robustness is good, and the application range is wide.