57results about How to "Small measurement error" patented technology

A pressure sensor for an extracorporeal circulating circuit includes a liquid chamber, a pressure measuring means, and a liquid flow path. The liquid chamber includes a reference surface not deformed by a pressure in the extracorporeal circulating circuit, a deforming surface disposed separated from the reference surface and deformed at least partially by a pressure in the extracorporeal circulating circuit, a first connection surface that joins the deforming surface with the reference surface to form a closed liquid-tight space inside them and is not deformed by a pressure in the extracorporeal circulating circuit, a liquid inflowing port provided in the side surface of the first connection surface, and a liquid outflowing port disposed away by ½ to less than one round from the inflowing port in the flowing direction of liquid introduced along the inner periphery of the side surface of the first connection surface. The pressure measuring means measures the deformation amount of the deforming surface, and is disposed outside the liquid chamber; and the liquid flow path is liquid-tightly connected with the liquid inflowing port so that liquid to be introduced into the liquid chamber flows in along the inner periphery of the side surface of the first connection surface.

An exposure apparatus and an exposure method that minimize the range over which exposing light becomes defocused even when a non-level portion is present within each shot are provided. One shot is selected from a plurality of shots (exposure unit areas) set on a wafer (S 50). 49 measurement points are set in the selected shot and the three-dimensional coordinates of each measurement point are determined (S 70). Next, an arithmetic operation is performed using the 49 sets of three-dimensional coordinate data to ascertain an "in-shot focus plane" (S 90). This arithmetic operation may be performed through, for instance, the method of least squares. The extents of positional deviation between the surface of the selected shot and the in-shot focus plane is ascertained and the extents of deviation are stored in memory as "adjustment values" (S 110). An exposure shot to undergo exposure processing is selected and the surface level variation manifesting at the exposure shot is measured. The adjustment values are subtracted from the results of the measurement and exposing light is irradiated on the exposure shot while moving the wafer along the vertical direction in conformance to the result of the subtraction (S 130).

A particulate matter detection device includes a collection electrode that collects the particulate matter, a discharge electrode that allows a corona discharge to occur when a voltage is applied between the collection electrode and the discharge electrode, a measurement electrode, the impedance between the collection electrode and the measurement electrode changing when the collection electrode has collected the particulate matter, and a measurement section that detects a change in the impedance between the collection electrode and the measurement electrode, the particulate matter detection device detecting the particulate matter by charging the particulate matter contained in the gas by utilizing the corona discharge, collecting the charged particulate matter by the collection electrode by utilizing an electrostatic force, and detecting a change in the impedance between the collection electrode that has collected the particulate matter and the measurement electrode using the measurement section.

A particulate matter detection device (100) includes a first electrode (10) that includes a conductive section (12) and a dielectric (14) that covers the conductive section (12), and a second electrode (20) that is disposed opposite to the first electrode (10) at an interval of 0.3 to 3.0 mm. Charged particulate matter contained in a fluid that passes through the space between the first electrode (10) and the second electrode (20), or particulate matter that is contained in a fluid and charged by a discharge that occurs due to application of a voltage between the electrodes (10) and (20) is electrically adsorbed on at least one of the electrodes (10) and (20), and the particulate matter adsorbed on the electrodes (10) and (20) is detected by measuring a change in electrical properties of the first electrode (10), or a change in electrical properties of the electrodes (10) and (20).

A roundness measuring apparatus, which has a small space required for installation and of which measurement error due to a temperature change is small, is disclosed. The roundness measuring apparatus includes: a base; a turn-table which is fixed to the base and rotates a work placed on the turn-table; a two-dimensional moving mechanism provided at the base so as to move a holder holding part in parallel to a measurement plane including a rotation axis of the turn-table and a measuring point of the work; a detector holder attached to the holder holding part; and a detector attached to the detector holder so that a probe can be displaced on the measurement plane.

Each of three magnetic sensors is positioned on a first virtual line that passes the centers of two magnetic shields in the width direction and is perpendicular to a virtual plane, so a value detected by the magnetic sensor is less likely to be influenced by an external magnetic field. The first virtual line and the center of a conductor intersecting the first virtual line are separated from each other by a certain distance. Therefore, even if a distance from the center of the conductor in the width direction to the magnetic sensor is short, it is possible to improve, on a high-frequency side, frequency characteristics in the detection sensitivity of the magnetic sensor for the frequency of the current under measurement.

An improved measurement circuit includes a current transformer and an active feedback circuit operated as a negative resistance that matches the value of the winding resistance of the current transformer. An amplifier in the feedback circuit provides power to drive a secondary current through a sense resistor and the transformer winding resistance, reducing the most significant error source in a current transformer circuit by presenting a negative impedance to the current transformer. Combined with the positive resistance of the transformer's winding, the negative impedance results in a net burden of zero on the current transformer, which eliminates the need for the transformer having to provide power to drive the secondary current. This facilitates the use of smaller transformers while achieving reduced measurement errors. Thus, a single, compact measurement device may be used in a wide range of applications with high measurement performance.

An electric machine is designed as a disk armature having a secondary part that is rotationally supported about an axis of rotation relative to a primary part. The secondary part has a magnetic disk, which, on its axial end faces, has a circumferentially extending series of alternating, oppositely magnetized, permanent magnetic poles. The magnetic poles interact magnetically with a winding provided on the primary part across at least one air gap disposed axially between the primary part and the secondary part. To sense the position of the secondary part relative to the primary part, a position transducer is provided having at least one magnetic field sensor for detecting the magnetic poles. The magnetic field sensor is located on the primary part in a region on the stator situated radially outside of the magnetic disk.

A method for the treatment of paralysis caused by injury to the brain. A set of movements by a healthy extremity is recorded and stored in a computer. Movements made by an affected extremity are recorded and compared to the standard provided by the healthy extremity. A score based on the similarity of the movement is reported to the user to aid in tracking progress. A similar system may also be used to detect and track the progress of degenerative diseases by comparing past movements to current movements.

A method for measuring the internal space of an elongate body. The elongate body has in a global xyz-coordinate system a longitudinal axis x. A laser profile scan is carried out, in which a laser scanner, which carries out scans in a plane, is moved through the internal space of the elongate body. The scan plane is tilted about the y-axis by a tilt angle α or about the z-axis by a tilt angle γ. Preferably, the scan plane is tilted about the y-axis and the z-axis corresponding to the global coordinate system of the internal space. An apparatus for carrying out the method.

A reagent layer (4) of a sensor (1) contains as a mediator a quinone compound having a hydrophilic functional group, phenanthrenequinone, and/or a phenanthrenequinone derivative. The quinone compound has a lower redox potential than a conventional mediator, so interfering substances have less effect on detection results with this sensor 1.

In an interference measuring device, which includes: a coherent beam generating source; a sample to be measured; a lens system for forming an image of the sample to be measured on an observing plane; an interference element for splitting a coherent beam into two systems, and forming an interference image on the observing plane or a plane equivalent thereto; an image pickup element for picking up the interference image on the observing plane; and a calculating device having functions of capturing and storing the interference image converted to electric signals by the image pickup element, and determining the phase distribution changed by the sample to be measured from the interference image by calculation, wherein a means for removing the phase change distribution due to the interference element is provided.

A device for determining the volume fraction of at least one component of a multi-phase medium on the basis of the running time of an electromagnetic desired signal emitted in the multi-phase medium, having at least one emitting device for emitting the desired signal into the multi-phase medium, having at least one receiving device for receiving the desired signal, and having an evaluation device for determining the running time of the desired signal between the emitting device and the receiving device, and at least one polarization device arranged between the emitting device and the receiving device. The desired signal is emitted at least indirectly from the emitting device through the multi-phase medium to the polarization device, the polarization device influences the polarization of the desired signal and the polarization-influenced desired signal is emitted at least indirectly from the polarization device to the receiving device which receives it.

Disclosed are absolute measuring systems comprising measuring rods that are composed of groups of at least two magnetic segments. The magnetic segments of at least one group have the same length in the direction of measurement while the magnetic segments of the different groups have different lengths. For arrangements encompassing more than two sensors on the single-track measuring rods, multistage phase difference processes are disclosed which result in high resolutions and accurate measurements while allowing for great measured lengths and, when anisotropic magnetoresistive sensors are used, for example, an unambiguous angle measurement range of 360°. FIG. 6a best represents the essence of the invention.

A substrate processing system includes a processing chamber 12, and an orienter 16 centering a wafer W. The orienter 16 is provided with an orienter sensor 42 measuring a central position discrepancy of the wafer W, and an image sensor 41 measuring a width of a non-film forming portion at circumferential portions of the wafer W. After a film deposition processing in the processing chamber 12, the wafer W is loaded into the orienter 16 where a central position discrepancy of the wafer W is measured, and the wafer W is then centered. Further, the width of the non-film forming portion of the wafer W is measured, and a film position discrepancy is calculated based on the width of the non-film forming portion. To correct the calculated film position discrepancy, a target transfer position of the wafer W on a mounting table 13 in the processing chamber 12 is adjusted.

A driving circuit of a transmitting apparatus drives a piezoelectric element in a frequency band different from a resonance frequency at which a vibration system including the piezoelectric element resonates the most strongly. A driving circuit of a sound sensor drives the piezoelectric element for transmitting or receiving an acoustic wave in a frequency band different from a resonance frequency at which a vibration system including the piezoelectric element resonates the most strongly. Such a transmitting apparatus is mounted as a transmitting apparatus of a sound sensor to thereby realize the sound sensor with a small measurement error. The sound sensor is adopted for traveling control and steering control of an autonomous traveling vehicle to thereby enable an autonomous traveling vehicle capable of stopping in the vicinity of an obstacle to be realized.

The invention discloses a 3D glass profile measuring instrument which comprises a rack mechanism, a Y-axis driving mechanism, an X-axis driving mechanism, a rotating fixing mechanism and a Z-axis detecting mechanism, wherein the rack mechanism is fixedly connected with the Y-axis driving mechanism and the Z-axis detecting mechanism through bolts, the Y-axis driving mechanism is fixedly connected with the X-axis driving mechanism through bolts, the X-axis driving mechanism is fixedly connected with the rotating fixing mechanism through bolts, the rack mechanism comprises a case bottom plate, acase outer cover and a rear cover plate are fixedly arranged at the top of the case bottom plate through bolts, and a platform supporting base and an upright post are welded at the top of the case bottom plate through bolts on the case outer cover. Through adoption of the 3D glass profile measuring instrument of the invention, a spectrum confocal sensor is used to measure the profile of mobile phone glass, and the non-contact measurement can not damage the mobile phone glass, and meanwhile, the measurement precision is high, the measurement error value is small, and the measurement time is short.